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公开(公告)号：US6071426A
公开(公告)日：2000-06-06
申请号：US986477
申请日：1997-12-08
IPC分类号： G01B9/02 , G02B6/12 , G02B6/122 , G02B6/28 , G02B6/32 , G02B6/34 , G02B6/36 , G02B6/136 , B29D11/00
CPC分类号： G02B6/2935 , G01B9/02051 , G02B6/122 , G02B6/2817 , G02B6/29361 , G02B2006/12104 , G02B6/32 , G02B6/3636 , G02B6/3652 , G02B6/3692
摘要： Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.
摘要翻译： 利用体硅的平行蚀刻特性并集成硅的平行蚀刻平面与硅晶片结合和杂质掺杂的体硅的微加工使得能够利用原位对准的用于光纤，微透镜的蚀刻凹槽来制造片上光学器件， 光电二极管和激光二极管。 可以进行微加工和集成的其他光学部件包括半透明分束器，微光学扫描仪，针孔，光栅，微光学滤光器等。可利用利用其平行蚀刻特性的体硅的微加工来开发小型化 诸如通过荧光光谱仪进行波长监测的生物仪器，以及诸如用于滤波波长的法布里 - 珀罗干涉法，可调谐腔激光器，微全息模块和光通信系统的波长分离器等小型化光学系统。
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公开(公告)号：US07755292B1
公开(公告)日：2010-07-13
申请号：US11625545
申请日：2007-01-22
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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公开(公告)号：US08264134B2
公开(公告)日：2012-09-11
申请号：US12795356
申请日：2010-06-07
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W Hansen
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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公开(公告)号：US20110006663A1
公开(公告)日：2011-01-13
申请号：US12795356
申请日：2010-06-07
申请人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W. Hansen
发明人： Margaret L. Tuma , Joseph S. Collura , Henry Helvajian , Michael D. Pocha , Glenn A. Meyer , Charles F. McConaghy , Barry L. Olsen , William W. Hansen
IPC分类号： H01K1/14
摘要： An ultraminiature light source using a double-spiral shaped tungsten filament includes end contact portions which are separated to allow for radial and length-wise unwinding of the spiral. The double-spiral filament is spaced relatively far apart at the end portions thereof so that contact between portions of the filament upon expansion is avoided. The light source is made by fabricating a double-spiral ultraminiature tungsten filament from tungsten foil and housing the filament in a ceramic package having a reflective bottom and a well wherein the filament is suspended. A vacuum furnace brazing process attaches the filament to contacts of the ceramic package. Finally, a cover with a transparent window is attached onto the top of the ceramic package by solder reflow in a second vacuum furnace process to form a complete hermetically sealed package.
摘要翻译： 使用双螺旋形钨丝的超微型光源包括端部接触部分，其被分离以允许螺旋的径向和纵向展开。 双螺旋丝在其端部处间隔相对较远，从而避免了在膨胀时细丝部分之间的接触。 光源通过从钨箔制造双螺旋超薄钨丝制成，并将灯丝容纳在具有反射底部和阱的陶瓷封装中，其中灯丝被悬挂。 真空炉钎焊工艺将灯丝连接到陶瓷封装的触点。 最后，通过在第二真空炉工艺中通过回流焊接将具有透明窗口的盖子附接到陶瓷封装的顶部，以形成完整的密封封装。
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5.发明授权Compact multiwavelength transmitter module for multimode fiber optic ribbon cable 失效用于多模光纤带状电缆的紧凑型多波长发射器模块公开(公告)号：US06419404B1
公开(公告)日：2002-07-16
申请号：US09607992
申请日：2000-06-30
IPC分类号： G02B636
CPC分类号： G02B6/4202 , G02B6/3845 , G02B6/4204 , G02B6/4214 , G02B6/4249
摘要： A compact multiwavelength transmitter module for multimode fiber optic ribbon cable, which couples light from an M×N array of emitters onto N fibers, where the M wavelength may be distributed across two or more vertical-cavity surface-emitting laser (VCSEL) chips, and combining emitters and multiplexer into a compact package that is compatible with placement on a printed circuit board. A key feature is bringing together two emitter arrays fabricated on different substrates—each array designed for a different wavelength—into close physical proximity. Another key feature is to compactly and efficiently combine the light from two or more clusters of optical emitters, each in a different wavelength band, into a fiber ribbon.
摘要翻译： 用于多模光纤带状电缆的紧凑型多波长发射器模块，其将来自MxN阵列的发射器的光耦合到N个光纤上，其中M波长可以分布在两个或更多个垂直腔表面发射激光器（VCSEL）芯片上，并且组合 发射器和多路复用器转换成与印刷电路板上的放置兼容的紧凑型封装。 一个关键特征是将在不同衬底上制造的两个发射极阵列组合在一起，每个阵列设计为不同的波长 - 成为紧密的物理接近。 另一个关键特征是将来自两个或更多个不同波长带的光发射器簇的光紧凑且有效地组合成光纤带。
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公开(公告)号：US5846694A
公开(公告)日：1998-12-08
申请号：US600571
申请日：1996-02-13
CPC分类号： G02B6/132 , G02B6/122 , G02B6/1228 , G02B6/1245 , G02B2006/12102 , G02B2006/12173 , G02B2006/12195
摘要： A method for manufacturing low-cost, nearly circular cross section waveguides comprises starting with a substrate material that a molten waveguide material can not wet or coat. A thin layer is deposited of an opposite material that the molten waveguide material will wet and is patterned to describe the desired surface-contact path pedestals for a waveguide. A waveguide material, e.g., polymer or doped silica, is deposited. A resist material is deposited and unwanted excess is removed to form pattern masks. The waveguide material is etched away to form waveguide precursors and the masks are removed. Heat is applied to reflow the waveguide precursors into near-circular cross-section waveguides that sit atop the pedestals. The waveguide material naturally forms nearly circular cross sections due to the surface tension effects. After cooling, the waveguides will maintain the round shape. If the width and length are the same, then spherical ball lenses are formed. Alternatively, the pedestals can be patterned to taper along their lengths on the surface of the substrate. This will cause the waveguides to assume a conical taper after reflowing by heat.
摘要翻译： 用于制造低成本，近圆形横截面波导的方法包括从熔融波导材料不能润湿或涂覆的基底材料开始。 沉积相对材料的薄层，熔融波导材料将被润湿并被图案化以描述用于波导的期望的表面 - 接触路径基座。 沉积波导材料，例如聚合物或掺杂二氧化硅。 沉积抗蚀剂材料并除去不想要的多余物以形成图案掩模。 将波导材料蚀刻掉以形成波导前体，并除去掩模。 施加热量以将波导前体重新流入位于基座顶部的近圆形横截面波导。 由于表面张力效应，波导材料自然形成近似圆形的横截面。 在冷却之后，波导将保持圆形。 如果宽度和长度相同，则形成球形球透镜。 或者，可以将基座图案化为沿其基板的表面上的长度逐渐变细。 这将导致波导在通过热回流之后呈现锥形锥形。
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公开(公告)号：US06925216B2
公开(公告)日：2005-08-02
申请号：US10676876
申请日：2003-09-30
CPC分类号： G02B6/132 , G02B2006/12061 , G02B2006/12169 , G02B2006/12173
摘要： An optical waveguide structure is formed by embedding a core material within a medium of lower refractive index, i.e. the cladding. The optical index of refraction of amorphous silicon (a-Si) and polycrystalline silicon (p-Si), in the wavelength range between about 1.2 and about 1.6 micrometers, differ by up to about 20%, with the amorphous phase having the larger index. Spatially selective laser crystallization of amorphous silicon provides a mechanism for controlling the spatial variation of the refractive index and for surrounding the amorphous regions with crystalline material. In cases where an amorphous silicon film is interposed between layers of low refractive index, for example, a structure comprised of a SiO2 substrate, a Si film and an SiO2 film, the formation of guided wave structures is particularly simple.
摘要翻译： 通过将芯材料嵌入在较低折射率的介质（即包层）内而形成光波导结构。 在约1.2和约1.6微米之间的波长范围内的非晶硅（a-Si）和多晶硅（p-Si）的光学折射率相差高达约20％，非晶相具有较大的指数 。 非晶硅的空间选择性激光结晶提供了用于控制折射率的空间变化并且用结晶材料围绕非晶区域的机制。 在非晶硅膜介于低折射率层之间的情况下，例如，由SiO 2衬底，Si膜和SiO 2膜构成的结构 导波结构的形成特别简单。
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公开(公告)号：US07277605B2
公开(公告)日：2007-10-02
申请号：US11132663
申请日：2005-05-18
IPC分类号： G02B6/00
CPC分类号： G01D5/35303 , G01K11/3213 , G02B6/29359
摘要： A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
摘要翻译： 法布里 - 珀罗腔通过部分或全部反射的表面形成，该表面位于集成的细长通道的自由端或晶片芯片的集成的界限壁和光纤端部上的部分反射表面上。 这种构造的装置可以用于通过使用光学检测系统的光纤检测一个或多个物理参数，例如应变，以提供小于约百分之一点一的测量精度。
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公开(公告)号：US5341017A
公开(公告)日：1994-08-23
申请号：US072310
申请日：1993-06-09
申请人： Rex Booth , Michael D. Pocha
发明人： Rex Booth , Michael D. Pocha
IPC分类号： H01L31/0352 , H01L31/09 , H03K17/78 , H01L23/48
CPC分类号： H03K17/78 , H01L31/03529 , H01L31/09 , Y02E10/50
摘要： An optoelectric switch is disclosed that utilizes a cylindrically shaped and contoured GaAs medium or other optically active semiconductor medium to couple two cylindrically shaped metal conductors with flat and flared termination points each having an ovoid prominence centrally extending there from. Coupling the truncated ovoid prominence of each conductor with the cylindrically shaped optically active semiconductor causes the semiconductor to cylindrically taper to a triple junction circular line at the base of each prominence where the metal conductor conjoins with the semiconductor and a third medium such as epoxy or air. Tapering the semiconductor at the triple junction inhibits carrier formation and injection at the triple junction and thereby enables greater current carrying capacity through and greater sensitivity of the bulk area of the optically active medium.
摘要翻译： 公开了一种光电开关，其利用圆柱形和成形的GaAs介质或其它光学活性半导体介质来将两个圆柱形金属导体与扁平和扩张的端接点相耦合，每个端子具有从其中心延伸的卵形凸起。 将每个导体的截短的卵形凸起与圆柱形光学有源半导体耦合使得半导体在金属导体与半导体结合的每个突出部的底部处圆柱形地锥形到三重连接圆形线，并且第三介质如环氧树脂或空气 。 在三重连接处锥形半导体抑制载流子形成和注入在三重结，从而通过光学活性介质的主体区域和更高的灵敏度实现更大的载流能力。
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