Vacuum treatment apparatus and a method for manufacturing
    4.
    发明授权
    Vacuum treatment apparatus and a method for manufacturing 有权
    真空处理装置及其制造方法

    公开(公告)号:US09252037B2

    公开(公告)日:2016-02-02

    申请号:US13997801

    申请日:2011-12-27

    Abstract: A vacuum treatment apparatus and method for manufacturing has a plurality of treatment chambers for treating workpieces, in particular silicon wafers, a transfer chamber attached to the treatment chambers communicating via respective openings and having handling zones located adjacent to each of the treatment chambers. A workpiece carrier is arranged within the transfer chamber and configured to transfer the workpieces between the handling zones, and one or more handlers for moving the workpieces between the handling zones and the treatment chambers. The transfer chamber is ring-shaped about an axis and the openings have opening substantially parallel thereto. This way, forces on the transfer chamber are redirected to a large support structure and thus, a cost-effective, light and still rigid mechanical construction can be achieved.

    Abstract translation: 真空处理装置和制造方法具有多个用于处理工件,特别是硅晶片的处理室,附接到经由各个开口连通的处理室的传送室,并且具有位于每个处理室附近的处理区域。 工件载体布置在传送室内并且构造成在处理区域之间传送工件,以及用于在处理区域和处理室之间移动工件的一个或多个处理器。 传送室围绕轴线是环形的并且开口具有基本上与其平行的开口。 这样,转移室上的力被重定向到大的支撑结构,因此,可以实现成本有效,轻且刚性的机械结构。

    VACUUM TREATMENT APPARATUS AND A METHOD FOR MANUFACTURING
    5.
    发明申请
    VACUUM TREATMENT APPARATUS AND A METHOD FOR MANUFACTURING 有权
    真空处理设备及其制造方法

    公开(公告)号:US20130287527A1

    公开(公告)日:2013-10-31

    申请号:US13997801

    申请日:2011-12-27

    Abstract: A vacuum treatment apparatus and method for manufacturing has a plurality of treatment chambers for treating workpieces, in particular silicon wafers, a transfer chamber attached to the treatment chambers communicating via respective openings and having handling zones located adjacent to each of the treatment chambers. A workpiece carrier is arranged within the transfer chamber and configured to transfer the workpieces between the handling zones, and one or more handlers for moving the workpieces between the handling zones and the treatment chambers. The transfer chamber is ring-shaped about an axis and the openings have opening substantially parallel thereto. This way, forces on the transfer chamber are redirected to a large support structure and thus, a cost-effective, light and still rigid mechanical construction can be achieved.

    Abstract translation: 真空处理装置和制造方法具有多个用于处理工件,特别是硅晶片的处理室,附接到经由各个开口连通的处理室的传送室,并且具有位于每个处理室附近的处理区域。 工件载体布置在传送室内并且构造成在处理区域之间传送工件,以及用于在处理区域和处理室之间移动工件的一个或多个处理器。 传送室围绕轴线是环形的并且开口具有基本上与其平行的开口。 这样,转移室上的力被重定向到大的支撑结构,因此,可以实现成本有效,轻且刚性的机械结构。

    Portable pulling device
    7.
    发明授权
    Portable pulling device 失效
    便携式推杆装置

    公开(公告)号:US3648977A

    公开(公告)日:1972-03-14

    申请号:US3648977D

    申请日:1969-07-14

    CPC classification number: B66D1/7494 B66D1/7489

    Abstract: A highly portable pulling device for moving loads along a cable. The device includes a capstan around which the cable is wound for at least one turn and a gasoline engine for driving the capstan. It is housed in an ellipsoidal housing having a generally smooth outer contour to prevent snagging when the device is used in close proximity to trees, bushes, and the like.

    Abstract translation: 一种用于沿着电缆移动负载的高度便携式的拉动装置。 该装置包括一绞线,电缆绕其围绕至少一圈,以及用于驱动绞盘的汽油机。 它被容纳在具有大致光滑的外轮廓的椭圆形壳体中,以防止当该装置用于靠近树木,灌木等时的阻塞。

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