公开(公告)号：US20080207008A1

公开(公告)日：2008-08-28

申请号：US12011009

申请日：2008-01-23

申请人： Ramesh Peelamedu ,  David C. Wong

发明人： Ramesh Peelamedu ,  David C. Wong

IPC分类号： H01L21/324 ,  H05B6/64

CPC分类号： H01L21/67115 ,  H01J37/32192 ,  H01J37/32825

摘要： Microwave energy is used as a radiation source for rapid thermal processing of semiconductor wafers. In one aspect, a hybrid material formed from a microwave modulator material is used to provide temperature uniformity across the wafer and to avoid cracking or breaking of wafers due to the development of thermal stresses. In another aspect, microwave-generated atmospheric pressure plasma is used to heat the wafer either directly or indirectly.

摘要翻译： 微波能量被用作半导体晶片快速热处理的辐射源。 在一个方面，使用由微波调制器材料形成的杂化材料来提供跨晶片的温度均匀性，并且避免由于热应力的发展而导致晶片的破裂或断裂。 另一方面，使用微波产生的大气压等离子体来直接或间接地加热晶片。

公开(公告)号：US5849104A

公开(公告)日：1998-12-15

申请号：US710701

申请日：1996-09-19

申请人： Raj Mohindra ,  David C. Wong ,  Suraj Puri

发明人： Raj Mohindra ,  David C. Wong ,  Suraj Puri

IPC分类号： B08B3/10 ,  G11B23/50 ,  H01L21/00 ,  H01L21/306 ,  B08B13/00

CPC分类号： H01L21/02052 ,  B08B3/10 ,  G11B23/505 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/6708 ,  H01L21/67086 ,  H01L21/67207 ,  H01L21/02049 ,  Y10S134/902

摘要： A cleaning system (1, 5) having multiple cleaning chambers (200) is provided. Each cleaning chamber (200) includes an interior region sufficient for immersing a carrier (242), which has at least one wafer disposed therein, into an ultra-clean liquid. The cleaning chamber (200) also has an inlet operably coupled to the interior region to introduce a gas into the interior region and a drain operably coupled to the interior region to remove the ultra-clean liquid from the interior region at a selected rate. A controller 14 is operably coupled to the chamber (200) for selectively controlling the selected rate. In an alternative embodiment, an installation technique (80) for the above cleaning system (1, 5) is provided.

摘要翻译： 提供具有多个清洁室（200）的清洁系统（1,5）。 每个清洁室（200）包括足够的内部区域，用于将其中设置有至少一个晶片的载体（242）浸入超清洁液体中。 清洁室（200）还具有可操作地连接到内部区域以将气体引入内部区域的入口和可操作地联接到内部区域的排水口，以选择的速率从内部区域移除超清洁液体。 控制器14可操作地耦合到腔室（200），以选择性地控制所选择的速率。 在替代实施例中，提供了用于上述清洁系统（5,5）的安装技术（80）。

公开(公告)号：US5611660A

公开(公告)日：1997-03-18

申请号：US538999

申请日：1995-10-05

申请人： David C. Wong ,  Nigel P. Schofield

发明人： David C. Wong ,  Nigel P. Schofield

IPC分类号： F04B37/16 ,  F04D19/04

CPC分类号： F04D19/046

摘要： A hybrid vacuum pump comprising a turbomolecular stage positioned at the inlet end of the pump and comprising a stator formed from an array of stationary blades and a rotor formed from a further array of blades arranged for rotation at high speed between the stator blades. A molecular drag stage is positioned at the outlet (high pressure) end of the pump and comprises at least two discs arranged for rotation within a stator with a minimal clearance between the circumferential edge of the discs and the stator. A flow passageway linking the turbomolecular stage with annular channels is defined between the stator and opposing faces of the discs and projections extending from the stator are provided for deflecting gas being pumped from the annular channels during rotation of the discs.

摘要翻译： 一种混合真空泵，包括位于泵的入口端处的涡轮分子级，并且包括由固定叶片阵列形成的定子和由设置成在定子​​叶片之间高速旋转的另外的叶片阵列形成的转子。 分子拖曳台定位在泵的出口（高压）端，并且包括至少两个盘，其布置成在定子​​内旋转，在盘的圆周边缘和定子之间具有最小的间隙。 在圆盘的定子和相对表面之间限定了连接涡轮分子台和环形通道的流动通道，并且从定子延伸出的突起被提供用于在盘旋转期间偏转从环形通道泵送的气体。

公开(公告)号：US5504674A

公开(公告)日：1996-04-02

申请号：US63790

申请日：1993-05-19

申请人： Jeff P. Chen ,  David C. Wong

发明人： Jeff P. Chen ,  David C. Wong

IPC分类号： G06F3/00 ,  G06F17/60 ,  G06F3/14

CPC分类号： G06Q40/08 ,  G06Q50/00

摘要： A communications network for processing insurance claims of objects. The communications network including claim terminals and repair terminals, each having a processor, a display monitor, and a mass storage device, for inputting and sending object-identification data, parts graphics images, and images from the claims terminals to the repair terminals through a communications channel. The repair terminals compute repair and replacement estimates and send the estimates to the claim terminal. The object-identification data include information stored in digital form for a multiplicity of objects. The sum of the costs for repairing an object or a part of an object versus the cost for replacing the object or the part of a object is compared. An imaging device may be used for capturing an electronic image in digital form of the damaged object. The display monitor displays the electronic image along with lists of parts of the damaged object, a parts description, or with a selected first part and a parts graphics image. A method for processing insurance claims of objects is also provided.

摘要翻译： 用于处理物品保险索赔的通信网络。 通信网络包括索赔终端和维修终端，每个终端和维修终端均具有处理器，显示监视器和大容量存储设备，用于通过以下方式将索赔终端输入和发送对象识别数据，零件图形图像和图像 通讯渠道。 修理终端计算维修和更换估计，并将估计数发送到索赔终端。 对象识别数据包括用于多个对象以数字形式存储的信息。 比较修复对象或对象的一部分的成本与用于替换对象或对象的部分的成本的总和。 成像装置可以用于以受损对象的数字形式捕获电子图像。 显示器监视器显示电子图像以及受损对象的部件列表，零件描述，或选定的第一部分和部件图形图像。 还提供了一种用于处理对象的保险索赔的方法。

公开(公告)号：US5988189A

公开(公告)日：1999-11-23

申请号：US111149

申请日：1998-07-06

申请人： Raj Mohindra ,  David C. Wong ,  Suraj Puri

发明人： Raj Mohindra ,  David C. Wong ,  Suraj Puri

IPC分类号： B08B3/10 ,  G11B23/50 ,  H01L21/00 ,  H01L21/306 ,  B08B3/02

CPC分类号： H01L21/02052 ,  B08B3/10 ,  G11B23/505 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/6708 ,  H01L21/67086 ,  H01L21/67207 ,  H01L21/02049 ,  Y10S134/902

摘要： A cleaning system (1, 5) having multiple cleaning chambers (200) is provided. Each cleaning chamber (200) includes an interior region sufficient for immersing a carrier (242), which has at least one wafer disposed therein, into an ultra-clean liquid. The cleaning chamber (200) also has an inlet operably coupled to the interior region to introduce a gas into the interior region and a drain operably coupled to the interior region to remove the ultra-clean liquid from the interior region at a selected rate. A controller 14 is operably coupled to the chamber (200) for selectively controlling the selected rate. In an alternative embodiment, an installation technique (80) for the above cleaning system (1,5) is provided.

摘要翻译： 提供具有多个清洁室（200）的清洁系统（1,5）。 每个清洁室（200）包括足够的内部区域，用于将其中设置有至少一个晶片的载体（242）浸入超清洁液体中。 清洁室（200）还具有可操作地连接到内部区域以将气体引入内部区域的入口和可操作地联接到内部区域的排水口，以选择的速率从内部区域移除超清洁液体。 控制器14可操作地耦合到腔室（200），以选择性地控制所选择的速率。 在替代实施例中，提供了用于上述清洁系统（1,5）的安装技术（80）。

公开(公告)号：US5432904A

公开(公告)日：1995-07-11

申请号：US247241

申请日：1993-11-09

申请人： David C. Wong

发明人： David C. Wong

IPC分类号： G06F3/00 ,  G06F3/14 ,  G06F17/30 ,  G06F17/60

CPC分类号： G06Q10/04 ,  G06Q40/08

摘要： A computer system including a processor, a display monitor and a mass storage device serving as a main memory for storing digital data. The digital data include information stored in digital form for a multiplicity of vehicles. A data base is provided of a plurality of groups of parts, a plurality of associated parts graphics, and a plurality of costs for repairing the parts and for replacing groups of parts. The method and apparatus include inputting vehicle-identification data of a damaged vehicle to the processor. The display monitor displays a list of groups of parts for the damaged vehicle. In response to selecting a particular group of parts, a parts description from the data base of the first group of parts is then displayed. A parts graphic may be displayed from the list of groups of parts, along with costs data including parts costs, repair time and painting time. The method and apparatus compare the sum of the costs for repairing a part of a vehicle versus the cost for replacing a part of a vehicle. Additionally, overlapping costs between two or more panels are determined, and subtracted from the total cost to repair. An electronic camera may be used for taking an electronic photograph in digital form of the damaged vehicle. The electronic photograph is transferred from the camera through a data port to the memory of the processor.

摘要翻译： 一种计算机系统，包括处理器，显示监视器和用作存储数字数据的主存储器的大容量存储设备。 数字数据包括以多种车辆的数字形式存储的信息。 数据库由多组零件组成，多个关联零件图形，以及用于修理零件和更换零件组的多个成本。 该方法和装置包括将损坏的车辆的车辆识别数据输入到处理器。 显示监视器显示受损车辆的零件组列表。 响应于选择特定的零件组，然后显示来自第一组零件的数据库的零件描述。 部件图表可以从部件组列表中显示，以及成本数据，包括零件成本，修理时间和涂装时间。 该方法和装置将修理车辆的一部分的成本与更换车辆的一部分的成本的总和进行比较。 另外，确定两个或多个面板之间的重叠成本，并从总成本中减去修复。 电子照相机可以用于以受损车辆的数字形式拍摄电子照片。 电子照片通过数据端口从相机传送到处理器的存储器。