公开(公告)号：US06724609B2

公开(公告)日：2004-04-20

申请号：US10038931

申请日：2002-01-04

申请人： Hoi Cheong Sun ,  Nitin V. Desai ,  William R. Roach ,  David Norman Ludington ,  Timothy Allen Pletcher ,  David Keller ,  Frank B. Lang ,  Peter D. Southgate ,  Joseph T. McGinn

发明人： Hoi Cheong Sun ,  Nitin V. Desai ,  William R. Roach ,  David Norman Ludington ,  Timothy Allen Pletcher ,  David Keller ,  Frank B. Lang ,  Peter D. Southgate ,  Joseph T. McGinn

IPC分类号： H02H2300

CPC分类号： H01L21/6833 ,  H02N13/00

摘要： Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

摘要翻译： 提供一种静电感测卡盘，用于将颗粒吸引到沉积电极附近的一部分颗粒接触表面，该静电感测卡盘包括一个像素，该像素包括：沉积电极（DE），用于选择性地在颗粒接触处建立吸引场（Ea） 表面; 相对于沉积电极相对偏置的屏蔽电极（SE）; 电荷感测电路，用于测量在每个沉积电极和屏蔽电极上累积的电荷，其中电荷感测电路在屏蔽电极处从其在沉积电极处感测到的第一电荷中减去其感测的第二电荷，由此确定累积电荷 沉积电极由屏蔽电极处的累积电荷平衡。

公开(公告)号：US06402369B1

公开(公告)日：2002-06-11

申请号：US09432736

申请日：1999-11-02

申请人： David Norman Ludington ,  Thomas Louis Fare ,  Dominic Joseph Lo Iacono ,  Timothy James Davis ,  Helen Jiang Semus ,  Paul John Stabile ,  Frank Guarnieri ,  Russell Todd Granzow ,  Peter J. Zanzucchi ,  William Chiang

发明人： David Norman Ludington ,  Thomas Louis Fare ,  Dominic Joseph Lo Iacono ,  Timothy James Davis ,  Helen Jiang Semus ,  Paul John Stabile ,  Frank Guarnieri ,  Russell Todd Granzow ,  Peter J. Zanzucchi ,  William Chiang

IPC分类号： G01N2500

CPC分类号： G01N25/482 ,  B01J2219/00317 ,  B01J2219/00495 ,  B01J2219/00659 ,  B01J2219/00707 ,  C40B60/14 ,  G01N25/4866

摘要： Provided are, among other things, devices for and methods for performing thermal signature assays on a two or more samples in an array, using active/control base thermopiles, the method comprising: [a] performing a heat transfer to the two or more samples in each of a two or more containers, using at least one base thermopile in thermal communication with the two or more containers; and [b] determining a total heat transferred to the samples by the base thermopile in step [a]; and [c] sensing in real time a temperature difference between a first sample and a second sample of the two or more samples resulting from performing step [a].

摘要翻译： 提供了尤其是用于使用主动/控制基热电堆在阵列中的两个或更多个样品上执行热特征测定的装置和方法，所述方法包括：[a]对所述两个或更多个样品进行热传递 在两个或更多个容器中的每一个中，使用与两个或更多个容器热连通的至少一个基座热电堆; 和[b]在步骤[a]中确定由基础热电堆转移到样品的总热量; 和[c]实时检测由执行步骤[a]得到的两个或多个样品的第一样品和第二样品之间的温度差。

公开(公告)号：US06370005B1

公开(公告)日：2002-04-09

申请号：US09417736

申请日：1999-10-14

申请人： Hoi Cheong Sun ,  Nitin V. Desai ,  William R. Roach ,  David Norman Ludington ,  Timothy Allen Pletcher ,  David Keller ,  Frank B. Lang ,  Peter D. Southgate ,  Joseph T. McGinn

发明人： Hoi Cheong Sun ,  Nitin V. Desai ,  William R. Roach ,  David Norman Ludington ,  Timothy Allen Pletcher ,  David Keller ,  Frank B. Lang ,  Peter D. Southgate ,  Joseph T. McGinn

IPC分类号： H02N1300

CPC分类号： H01L21/6833 ,  H02N13/00

摘要： Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

摘要翻译： 提供一种静电感测卡盘，用于将颗粒吸引到沉积电极附近的一部分颗粒接触表面，该静电感测卡盘包括一个像素，该像素包括：沉积电极（DE），用于选择性地在颗粒接触处建立吸引场（Ea） 表面; 相对于沉积电极相对偏置的屏蔽电极（SE）; 电荷感测电路，用于测量在每个沉积电极和屏蔽电极上累积的电荷，其中电荷感测电路在屏蔽电极处从其在沉积电极处感测到的第一电荷中减去其感测的第二电荷，由此确定累积电荷 沉积电极由屏蔽电极处的累积电荷平衡。

公开(公告)号：US5872623A

公开(公告)日：1999-02-16

申请号：US721427

申请日：1996-09-26

申请人： Paul J. Stabile ,  David Norman Ludington ,  Pamela Kay York ,  Arye Rosen ,  Satyam Choudary Cherukuri ,  Peter John Zanzucchi ,  Paul Heaney

发明人： Paul J. Stabile ,  David Norman Ludington ,  Pamela Kay York ,  Arye Rosen ,  Satyam Choudary Cherukuri ,  Peter John Zanzucchi ,  Paul Heaney

IPC分类号： B01L3/00 ,  C40B60/14 ,  G01N21/25 ,  G01N21/00

CPC分类号： G01N21/255 ,  B01L3/5085 ,  B01J2219/00317 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00702 ,  B01L2300/0654 ,  B01L2300/0803 ,  B01L2300/0819 ,  C40B60/14

摘要： The invention provides apparatuses for detecting light from, for example, closely spaced detection sites. In one embodiment, the invention provides an apparatus for measuring the amount of light emitted from or transmitted through two or more detection sites of a first set of detection sites on a planar substrate while spatially resolving the measurements for each detection site of the first set, the apparatus comprising: for each detection site of the first set, an addressable source of a light beam directed to that detection site at a first angle; and an array detector comprising a plurality of light responsive pixels, wherein for each detection site of the first set there is at least one light responsive pixel that receives light emitted from or transmitted through that detection site at a second angle that can be the same as the first angle.

摘要翻译： 本发明提供了用于检测来自例如紧密间隔的检测位置的光的装置。 在一个实施例中，本发明提供了一种用于测量从平面基板上的第一组检测位置的两个或更多个检测位点发射或透射的光的量的装置，同时空间地分辨第一组的每个检测位点的测量值， 该装置包括：对于第一组的每个检测部位，以第一角度指向该检测部位的光束的寻址源; 以及阵列检测器，其包括多个光响应像素，其中对于第一组的每个检测位置，存在至少一个光响应像素，其接收以第二角度发射或透过该检测部位的光，该第二角度可以与 第一个角度

公开(公告)号：US5854684A

公开(公告)日：1998-12-29

申请号：US721432

申请日：1996-09-26

申请人： Paul J. Stabile ,  David Norman Ludington ,  Pamela Kay York ,  Arye Rosen ,  Satyam Choudary Cherukuri ,  Peter John Zanzucchi ,  Paul Heaney

发明人： Paul J. Stabile ,  David Norman Ludington ,  Pamela Kay York ,  Arye Rosen ,  Satyam Choudary Cherukuri ,  Peter John Zanzucchi ,  Paul Heaney

IPC分类号： B01L3/00 ,  C40B60/14 ,  G01N21/25 ,  G01N21/00

CPC分类号： B01L3/5085 ,  G01N21/253 ,  B01J2219/00317 ,  B01J2219/00434 ,  B01J2219/00448 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00702 ,  B01J2219/00707 ,  B01L2300/0654 ,  B01L2300/0803 ,  B01L2300/0819 ,  C40B60/14

摘要： The invention provides apparatuses for detecting light from, for example, closely spaced detection sites. In one embodiment, the invention provides an apparatus for measuring the amount of light emitted from a first set of two or more detection sites on a planar substrate while spatially resolving the measurements from each first set detection site, the apparatus comprising: a source of a light beam directed towards the planar substrate at a first angle; one or more lenses for focusing light emitted or reflected from each of the first set detection sites and having a second angle having an angle offset from the first angle, onto a unique area of an array detector; and the array detector comprising a plurality of light responsive pixels, wherein for each first detection site there is at least one light responsive pixel that receives light emitted or reflected from that detection site and substantially no cross-talk from another detection site, and wherein substantially none of the light from the light source intersects with the array detector.

摘要翻译： 本发明提供了用于检测来自例如紧密间隔的检测位置的光的装置。 在一个实施例中，本发明提供了一种用于测量从平面基板上的第一组两个或更多个检测位置发射的光量的装置，同时在空间上分辨来自每个第一组检测位置的测量值，该装置包括： 以第一角度朝向平面基板的光束; 一个或多个透镜，用于将从第一组检测位置中的每一个发射或反射的光聚焦并且具有与第一角度偏移的第二角度到阵列检测器的唯一区域上; 并且所述阵列检测器包括多个光响应像素，其中对于每个第一检测位置，存在至少一个光响应像素，其接收从该检测位点发射或反射的光，并且基本上不从另一检测位点进行串扰，并且其中基本上 来自光源的光都不与阵列检测器相交。