公开(公告)号：US20240355577A1

公开(公告)日：2024-10-24

申请号：US18683071

申请日：2022-08-11

Applicant: ELDICO SCIENTIFIC AG

Inventor： Gunther STEINFELD ,  Harald NIEBEL ,  Christiaan VAN DEN BERG ,  Alexander VAN VEEN ,  Tomi TUOHIMAA

IPC: H01J37/21 ,  H01J37/14 ,  H01J37/147 ,  H01J37/153 ,  H01J37/26 ,  H01J37/295

CPC classification number: H01J37/21 ,  H01J37/14 ,  H01J37/1474 ,  H01J37/153 ,  H01J37/265 ,  H01J37/2955 ,  H01J2237/002 ,  H01J2237/0453 ,  H01J2237/1532

Abstract: A charged-particle beam device for charged-particle crystallography of a crystalline sample comprises a charged-particle source for generating a charged-particle beam to be radiated onto a sample and a charged-particle-optical system downstream the charged-particle source, which is configured to form in a diffraction mode a substantially parallel charged-particle beam at a predefined sample position and in an imaging mode a focused charged-particle beam having a focus at the predefined sample position. The charged-particle-optical system comprises a charged-particle zoom lens system consisting of a first magnetic lens, a second magnetic lens downstream the first magnetic lens and a third magnetic lens downstream the second magnetic lens, wherein at least the second magnetic lens, preferably each one of the first, the second and the third magnetic lens has a variable focal length. The charged-particle-optical system further comprises a single beam limiting aperture with a fixed aperture diameter arranged at a fixed position between the second magnetic lens and the third magnetic lens for limiting the diameter of the charged-particle beam at the sample position. The charged-particle-optical system is configured such that the diameter of the charged-particle beam at the sample position is in a range between 100 nanometer and 1000 nanometer, in particular between 220 nanometer and 250 nanometer, in the diffraction mode, and in a range between 10 nanometer and 200 nanometer in the imaging mode.

公开(公告)号：US20220238299A1

公开(公告)日：2022-07-28

申请号：US17611424

申请日：2020-05-19

Applicant: ELDICO SCIENTIFIC AG

Inventor： Gunther STEINFELD ,  Gustavo SANTISO-QUINONES ,  Eric HOVESTREYDT

IPC: H01J37/20 ,  H01J37/26 ,  G01N23/207

Abstract: The present invention relates to a diffractometer for charged-particle crystallography of a crystalline sample, in particular for electron crystallography of a crystalline sample. The diffractometer comprises a charged-particle source for generating a charged-particle beam along a charged-particle beam axis, a charged-particle-optical system for manipulating the charged-particle beam such as to irradiate the sample with the charged-particle beam and a charged-particle detection system at least for collecting a diffraction pattern of the sample based on the beam of charged-particles transmitted through the sample. The diffractometer further comprises a sample holder for holding the sample and a manipulator operatively coupled to the sample holder for positioning the sample relative to the beam axis. The manipulator comprises a rotation stage for tilting the sample holder with respect to the incident charged-particle beam around a tilt axis, and a multi-axes translation stage for moving the sample holder at least in a plane perpendicular to the tilt axis. The multi-axes translation stage is operatively coupled between the sample holder and the rotation stage such that the multi-axes translation stage is in a rotational system of the rotation stage and the sample holder is in a moving system of the multi-axes translation stage.

公开(公告)号：US20240255447A1

公开(公告)日：2024-08-01

申请号：US18429073

申请日：2024-01-31

Applicant: Eldico Scientific AG

Inventor： Francesco Garbuglia ,  Gustavo Santiso-Quinones ,  Laura Samperisi ,  Danny Taminiau ,  Nico Tan

IPC: G01N23/20058 ,  G01N23/20008

CPC classification number: G01N23/20058 ,  G01N23/20008

Abstract: One variation of a system includes: a housing configured to hold a vacuum; a primary assembly; and a cooling assembly. The primary assembly includes: a sample receiver including a base section and a sample holder mounted to the base section and configured to transiently receive and retain a sample specimen; a receiver platform configured to receive and support the sample receiver; and a set of positioner stages flexibly coupled to the receiver platform and configured to transiently drive the sample holder to locate the sample specimen in a position intersecting an electron pathway. The cooling assembly includes: a cold finger defining an end submerged in a volume of coolant; and a conductive cooling braid coupled to the cold finger and to the primary assembly; and configured to communicate heat from the primary assembly into the cold finger to cool the sample specimen to temperatures within a target sample temperature range.