公开(公告)号：US08982345B2

公开(公告)日：2015-03-17

申请号：US14003201

申请日：2012-03-08

Applicant: Etsuo Kawate ,  Miroslav Hain

Inventor： Etsuo Kawate ,  Miroslav Hain

IPC: G01N21/49 ,  G01N21/47 ,  G01N21/59 ,  G02B19/00

CPC classification number: G01N21/4738 ,  G01N21/474 ,  G01N21/59 ,  G01N2021/4714 ,  G01N2201/0637 ,  G02B19/0023 ,  G02B19/0085

Abstract: In an apparatus for measuring an optical characteristic of a sample, one object of the present invention is to provide an apparatus capable of measuring hemispherical total reflectance, hemispherical total transmittance, and light distribution, and to achieve a reduction in measurement time and an improvement in precision of the quantitative analysis of hemispherical total reflectance (transmittance). In a double ellipsoidal optical system which is an optical system in which one focal points of two ellipsoidal mirrors are positioned as a common focal point, and three focal points are aligned in a straight line, the double ellipsoidal optical system is composed of a partial ellipsoidal mirror 2, such as a quarter ellipsoidal mirror, and a belt-shape ellipsoidal mirror 1. By disposing, on a position of a focal point of the partial ellipsoidal mirror, a hemispherical detection optical system having a hemispherical lens or a rotational parabolic mirror, light scattered by an object, reflected by the partial ellipsoidal mirror, and focused on the point is photographed by for example a CCD camera 6 via a hemispherical lens and a taper fiber 5 so as to measure an optical characteristic of the object.

Abstract translation: 在用于测量样品的光学特性的装置中，本发明的一个目的是提供一种能够测量半球形全反射率，半球形全透射率和光分布的装置，并且实现测量时间的减少和改进 精确定量分析了半球全反射率（透射率）。 在双椭圆光学系统中，两个椭圆面镜的一个焦点被定位为公共焦点并且三个焦点以直线对准的光学系统，双椭圆体光学系统由部分椭圆体 镜子2，例如四分之一椭圆镜和带状椭圆面镜1.通过在半椭球镜的焦点的位置上设置半球形检测光学系统，该半球形检测光学系统具有半球形透镜或旋转抛物面镜， 通过半球形透镜和锥形光纤5，通过例如CCD照相机6拍摄被物体散射的物体，被部分椭球镜反射并聚焦在该点上的光，以测量物体的光学特性。

公开(公告)号：US06914680B2

公开(公告)日：2005-07-05

申请号：US10255940

申请日：2002-09-27

Applicant: Etsuo Kawate

Inventor： Etsuo Kawate

IPC: G01J3/02 ,  G01J3/08 ,  G01N21/41 ,  G01N21/55 ,  G01N21/59 ,  G01J1/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/08 ,  G01N21/41 ,  G01N21/55 ,  G01N21/59 ,  G01N2021/558

Abstract: An optical system for determining an optical constant by measuring the absolute reflectance and the absolute transmittance of a substance by using an incoming side beam switching mirror for selectively switching the direction of a light from a light source to first or second converged light reflecting units. The first and second converged light reflecting units project the light from the beam switching mirror so as to be converged in an intersecting manner at the position of a sample holder that can be positioned to present a sample fitting hole or a through hole for measuring the reflectance/transmittance by providing the light to an exit side beam switching mirror and detector.

Abstract translation: 一种用于通过使用入射侧光束切换镜测量物体的绝对反射率和绝对透射率来确定光学常数的光学系统，用于选择性地将来自光源的光的方向切换到第一或第二会聚光反射单元。 第一和第二会聚光反射单元投射来自光束切换镜的光，以便在可定位的样本保持器的位置处以交叉的方式会聚，以提供用于测量反射率的样本装配孔或通孔 通过向出射侧光束切换镜和检测器提供光来进行透射。

公开(公告)号：US20080013070A1

公开(公告)日：2008-01-17

申请号：US10579781

申请日：2004-11-22

Applicant: Etsuo Kawate

Inventor： Etsuo Kawate

IPC: G01J3/00 ,  G01J4/00 ,  G01N21/00

CPC classification number: G01N21/21 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8422

Abstract: A substrate in a parallelepiped plate form satisfies an interference condition when incident light has a wavelength (λ) fallen under the following (d: thickness, n: refractive index, θ: incident angle, N: integer). 2  nd  1 - ( sin   θ / n ) 2 λ = N [ Equation   7 ] At this time, the light in a transmission spectrum is intensified to cause a fringe peak to appear, whereas the light in a reflection spectrum is weakened to provide a fringe valley. At around the wavelength (frequency), as the incident angle is increased, the transmittance nears zero while reflectance increases nearing 1. Increasing the thickness of the substrate by placing a thin film thereon is similar to the increase in the substrate thickness in [Equation 7], whereby the wavelength satisfying the interference condition shifts toward the longer wavelength (lower frequency) Due to the three effects, at a great incident angle, a ratio of an optical (transmission or reflection) spectrum of a system having a substrate and thin film to an optical spectrum of a substrate only becomes a spectrum having a structure wherein maximum and minimum values are adjacent to each other. By analyzing this relative transmission spectrum or relative reflection spectrum, a complex dielectric constant of the thin film can be determined.

公开(公告)号：US07649633B2

公开(公告)日：2010-01-19

申请号：US10579781

申请日：2004-11-22

Applicant: Etsuo Kawate

Inventor： Etsuo Kawate

IPC: G01B11/02

CPC classification number: G01N21/21 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8422

Abstract: In order to measure a complex dielectric constant of a thin film on a substrate, a method includes irradiating the thin film sample with light at a first incident angle so that the light undergoes multiple internal reflections within the thin film sample. The method also includes measuring light that has transmitted through or reflected on the thin film sample following the multiple internal reflections, and determining a complex dielectric constant of the thin film sample based upon a spectrum of the transmitted or reflected light that has undergone the multiple internal reflections.

Abstract translation: 为了测量衬底上的薄膜的复介电常数，所述方法包括以第一入射角度照射所述薄膜样品，使得所述光在所述薄膜样品内经历多次内部反射。 该方法还包括在多次内部反射之后测量透过或反射在薄膜样品上的光，并且基于已经经历多个内部反射的透射光或反射光的光谱确定薄膜样品的复介电常数 反思。

公开(公告)号：US07102753B2

公开(公告)日：2006-09-05

申请号：US10785055

申请日：2004-02-25

Applicant: Etsuo Kawate

Inventor： Etsuo Kawate

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/474

Abstract: In an optical system, first and second optical paths intersected with each other on a sample holder are set, wherein the first and second optical paths are formed so that light from a light source is projected to be converged on the intersection from an incoming side beam switching mirror that selectively switches a direction of the light via one of first and second converged light reflectors, first and second received light reflectors that projects the light to an exiting side beam switching mirror disposed on the first and second optical paths respectively, the exiting side beam switching mirror switches a direction of the light projected from one of the first and second received light reflectors, and intensity of light from the sample in case of face side incidence and back side incidence to the sample can be measured.

Abstract translation: 在光学系统中，设置在样本保持器上彼此相交的第一和第二光路，其中第一和第二光路被形成为使得来自光源的光被投射以从入射侧光束会聚在交叉点上 切换镜，其经由第一和第二会聚光反射器中的一个选择性地切换光的方向，第一和第二接收光反射器，其将光投射到分别设置在第一和第二光路上的出射侧光束切换镜， 光束切换镜切换从第一和第二接收光反射器中的一个投射的光的方向，并且可以测量在面侧入射和背面入射到样品的情况下来自样品的光强度。

公开(公告)号：US20140002825A1

公开(公告)日：2014-01-02

申请号：US14003201

申请日：2012-03-08

Applicant: Etsuo Kawate ,  Miroslav Hain

Inventor： Etsuo Kawate ,  Miroslav Hain

IPC: G01N21/47

CPC classification number: G01N21/4738 ,  G01N21/474 ,  G01N21/59 ,  G01N2021/4714 ,  G01N2201/0637 ,  G02B19/0023 ,  G02B19/0085

Abstract: In an apparatus for measuring an optical characteristic of a sample, one object of the present invention is to provide an apparatus capable of measuring hemispherical total reflectance, hemispherical total transmittance, and light distribution, and to achieve a reduction in measurement time and an improvement in precision of the quantitative analysis of hemispherical total reflectance (transmittance). In a double ellipsoidal optical system which is an optical system in which one focal points of two ellipsoidal mirrors are positioned as a common focal point, and three focal points are aligned in a straight line, the double ellipsoidal optical system is composed of a partial ellipsoidal mirror 2, such as a quarter ellipsoidal mirror, and a belt-shape ellipsoidal mirror 1. By disposing, on a position of a focal point of the partial ellipsoidal mirror, a hemispherical detection optical system having a hemispherical lens or a rotational parabolic mirror, light scattered by an object, reflected by the partial ellipsoidal mirror, and focused on the point is photographed by for example a CCD camera 6 via a hemispherical lens and a taper fiber 5 so as to measure an optical characteristic of the object.

Abstract translation: 在用于测量样品的光学特性的装置中，本发明的一个目的是提供一种能够测量半球形全反射率，半球形全透射率和光分布的装置，并且实现测量时间的减少和改进 精确定量分析了半球全反射率（透射率）。 在双椭圆光学系统中，两个椭圆面镜的一个焦点被定位为公共焦点并且三个焦点以直线对准的光学系统，双椭圆体光学系统由部分椭圆体 镜子2，例如四分之一椭圆镜和带状椭圆面镜1.通过在半椭球镜的焦点的位置上设置半球形检测光学系统，该半球形检测光学系统具有半球形透镜或旋转抛物面镜， 通过半球形透镜和锥形光纤5，通过例如CCD照相机6拍摄被物体散射的物体，被部分椭球镜反射并聚焦在该点上的光，以测量物体的光学特性。