公开(公告)号：US09921144B2

公开(公告)日：2018-03-20

申请号：US15196808

申请日：2016-06-29

Applicant: Honeywell International Inc.

Inventor： Barrett E. Cole ,  Robert P. Costello

IPC: G01N21/00 ,  G01N15/14 ,  G01N15/06 ,  G01N15/10

CPC classification number: G01N15/1434 ,  G01N15/0205 ,  G01N15/06 ,  G01N21/53 ,  G01N2015/1043 ,  G01N2021/4707 ,  G01N2201/0637 ,  G01N2201/0642

Abstract: Devices and methods for detecting particulate matter are described herein. One device includes a laser, a reflector, an ellipsoidal reflector, and a detector, wherein the laser is configured to emit a beam, the reflector is configured to reflect the beam toward the ellipsoidal reflector, and the ellipsoidal reflector has a first focal region located on a path of the reflected beam, and a second focal region located at a surface of the detector.

公开(公告)号：US20160290915A1

公开(公告)日：2016-10-06

申请号：US15036712

申请日：2014-11-14

Applicant: BECKMAN COULTER, INC.

Inventor： Antao Chen ,  Juan J. Fernandez De Castro ,  Paul K. Church

IPC: G01N15/14 ,  G01N21/53 ,  G01N21/64

CPC classification number: G01N15/1436 ,  G01N15/1459 ,  G01N21/53 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2021/6421 ,  G01N2021/6463 ,  G01N2021/6478 ,  G01N2021/6484 ,  G01N2201/0637

Abstract: High numerical aperture collection optics for particle analyzers may include an ellipsoidal reflector or an ellipsoidal reflector in combination with a spherical reflector, and may efficiently collect light scattered or emitted by particles in a sample stream and then couple that collected light into a lower numerical aperture portion of the instrument's optical detection system, such as into an optical fiber for example. The reflectors may be integrated with a flow cell through which the sample stream passes, or may be separate components arranged around a flow cell or, in instruments not employing a flow cell, arranged around a sample stream in air. Refractive beam steering optics may allow multiple closely spaced excitation beams to be directed into the sample stream at low angles of incidence. The collection optics and refractive beam steering optics may be employed separately or in combination with each other.

Abstract translation: 用于粒子分析器的高数值孔径采集光学器件可以包括椭球反射器或与球形反射器组合的椭圆反射器，并且可以有效地收集由样品流中的颗粒散射或发射的光，然后将收集的光耦合到较低的数值孔径部分 的仪器的光学检测系统，例如成为光纤。 反射器可以与样品流通过的流动池一体化，或者可以是布置在流动池周围的分离的组件，或者在不使用流动池的仪器中，布置在空气中的样品流周围。 折射光束转向光学器件可以允许多个紧密间隔的激发光束以低入射角被引导到样品流中。 收集光学器件和折射光束转向光学元件可以单独使用或者彼此组合使用。

公开(公告)号：US09442007B2

公开(公告)日：2016-09-13

申请号：US13888007

申请日：2013-05-06

Applicant: Phoseon Technology, Inc.

Inventor： Doug Childers

IPC: F26B3/30 ,  F21V7/00 ,  F24C7/00 ,  G01J1/42 ,  C03C25/12 ,  G01N21/27 ,  G01N21/88 ,  G01N21/952 ,  B05D3/06 ,  G01N21/84

CPC classification number: G01J1/429 ,  B05D3/067 ,  B05D2256/00 ,  C03C25/12 ,  G01N21/274 ,  G01N21/8806 ,  G01N21/952 ,  G01N2021/8416 ,  G01N2201/062 ,  G01N2201/0637

Abstract: A system and method for monitoring and operating one or more light emitting devices is disclosed. In one example, light intensity within a dual elliptical reflecting chamber is sensed and operation of a fiber curing system is adjusted in response to an amount of sensed light energy.

Abstract translation: 公开了一种用于监测和操作一个或多个发光器件的系统和方法。 在一个示例中，感测双椭圆形反射室内的光强度并且响应于感测到的光能的量来调节光纤固化系统的操作。

公开(公告)号：US09322776B2

公开(公告)日：2016-04-26

申请号：US14463004

申请日：2014-08-19

Applicant: The Boeing Company

Inventor： Stephen Kerry Wilcken

IPC: G01N21/47

CPC classification number: G01N21/4738 ,  G01N21/55 ,  G01N2201/02 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: A system for characterizing a bi-directional reflectance distribution function scattered light pattern of a portion of a sample is disclosed. The system can comprise a hemispherical member comprising an reflective inner surface; an entrance port operable to receive electromagnetic radiation from an electromagnetic radiation source; a first reflective optical element operable to receive at least a portion of the electromagnetic radiation and to direct the at least the portion of the electromagnetic radiation onto the portion of the sample to be characterized; a wide-angle lens operable receive the electromagnetic radiation that was specularly reflected and diffusely scattered from the portion of the sample onto the inner surface of the hemispherical member; and an imaging device operable to record intensity information imaged by the wide-angle lens to characterize the bi-directional reflectance distribution function scattered light pattern of the portion of the sample.

Abstract translation: 公开了一种用于表征样品的一部分的双向反射分布函数散射光图案的系统。 该系统可以包括半球形构件，其包括反射内表面; 入口端口，其可操作以从电磁辐射源接收电磁辐射; 第一反射光学元件，其可操作以接收所述电磁辐射的至少一部分并且将所述电磁辐射的至少一部分引导到要表征的所述样品的所述部分上; 广角镜可操作地接收从样品部分镜面反射和漫射散射到半球形构件的内表面上的电磁辐射; 以及成像装置，其可操作以记录由广角镜头成像的强度信息，以表征样品部分的双向反射分布函数散射光图案。

公开(公告)号：US20070247624A1

公开(公告)日：2007-10-25

申请号：US11739679

申请日：2007-04-24

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法，包括以下步骤：使用多个偏振器提供多个入射偏振光束，其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束，其中每个分析器相对于其各自的偏振器具有指定的偏振角。

公开(公告)号：US20070242267A1

公开(公告)日：2007-10-18

申请号：US11735979

申请日：2007-04-16

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J3/40

CPC classification number: G01N21/9501 ,  G01B11/0625 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的器件，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器接收退出的光线，并且可以分析光线以确定被测器件的特性。

公开(公告)号：US07130033B2

公开(公告)日：2006-10-31

申请号：US11241920

申请日：2005-10-04

Applicant: Jacques Delacour

Inventor： Jacques Delacour

IPC: G01J1/00

CPC classification number: G01N21/55 ,  G01N2021/4711 ,  G01N2021/556 ,  G01N2021/558 ,  G01N2201/0637

Abstract: The invention relates to a device for measuring the light intensity of an object or object portion. The device comprises a dioptric central portion and a catadioptric peripheral portion that are independent from each other and that are suitable for delivering, from the light diffused by the object, two non-intersecting beams of the same kind, and a two-dimensional video sensor associated with an imaging device in order to obtain an image of the beams.

Abstract translation: 本发明涉及一种用于测量物体或物体部分的光强度的装置。 该装置包括彼此独立并且适于从物体扩散的光传送两个相同类型的不相交光束的折射中心部分和反射折射外围部分，以及二维视频传感器 与成像装置相关联以获得光束的图像。

公开(公告)号：US06288841B1

公开(公告)日：2001-09-11

申请号：US09475001

申请日：1999-12-30

Applicant: Solomon J. H. Lee ,  Chih-Kung Lee ,  Tony C. H. Lin ,  Shih-Jui Chen ,  Shu-Sheng Lee ,  Shuen-Chen Shiue

Inventor： Solomon J. H. Lee ,  Chih-Kung Lee ,  Tony C. H. Lin ,  Shih-Jui Chen ,  Shu-Sheng Lee ,  Shuen-Chen Shiue

IPC: G02B2710

CPC classification number: G01N21/211 ,  G01N2021/214 ,  G01N2201/0636 ,  G01N2201/0637 ,  G02B21/08 ,  G02B26/0816

Abstract: An optical path overlapping type incident angle changeable optical mechanism according to the invention allows an incident light beam to be incident onto a measured range of a sample within a large incident angle range. The optical mechanism includes a reflecting prism reflecting the incident light beam to generate a reflected light beam having an angle of 90° with respect to the incident light beam; a concave parabolic cylindric mirror guiding the reflected light beam coming from the reflecting prism to a measured range of a detect-waiting sample to thereby be further reflected to generate a detect-waiting light beam; a concave cylindric mirror used to make the detect-waiting light beam incident onto/reflected by the reflecting prism so as to overlap with the incident light beam; and a light beam splitting means used to separate the detect-waiting light beam from the incident light beam.

Abstract translation: 根据本发明的光路重叠型入射角可变光学机构允许入射光束入射到大的入射角范围内的样品的测量范围。 光学机构包括反射入射光束的反射棱镜，以产生相对于入射光束具有90°角的反射光束; 将来自反射棱镜的反射光束引导到检测等待样本的测量范围的凹面抛物线圆柱镜，从而进一步反射以产生检测等待光束; 用于使入射到反射棱镜/反射的检测等待光束与入射光束重叠的凹圆柱镜; 以及用于将检测等待光束与入射光束分离的光束分离装置。

公开(公告)号：US20190154589A1

公开(公告)日：2019-05-23

申请号：US16099706

申请日：2017-05-17

Applicant: BOBST MEX SA

Inventor： Matthieu RICHARD ,  Francis PILLOUD

IPC: G01N21/89

CPC classification number: G01N21/8914 ,  G01N21/8901 ,  G01N2021/8905 ,  G01N2021/8908 ,  G01N2021/8917 ,  G01N2201/0626 ,  G01N2201/0634 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: A quality control station (2) for a sheet element processing machine, having at least one camera (6) arranged for capturing images of sheet elements (4) transported through the quality control station (2), and further having an illumination unit (5) with at least one light emitter (16) and two reflectors (12, 14), the illumination unit (5) directing light onto a viewing area of the camera (6) such that the illumination intensity is constant despite changing media thickness. An illumination unit for such quality control station is disclosed.

公开(公告)号：US09816911B2

公开(公告)日：2017-11-14

申请号：US15036712

申请日：2014-11-14

Applicant: Beckman Coulter, Inc.

Inventor： Antao Chen ,  Juan J. Fernandez De Castro ,  Paul K. Church

IPC: G01N21/25 ,  G01N15/14 ,  G01N21/53 ,  G01N21/64 ,  G01N15/00

CPC classification number: G01N15/1436 ,  G01N15/1459 ,  G01N21/53 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2021/6421 ,  G01N2021/6463 ,  G01N2021/6478 ,  G01N2021/6484 ,  G01N2201/0637

Abstract: High numerical aperture collection optics for particle analyzers may include an ellipsoidal reflector or an ellipsoidal reflector in combination with a spherical reflector, and may efficiently collect light scattered or emitted by particles in a sample stream and then couple that collected light into a lower numerical aperture portion of the instrument's optical detection system, such as into an optical fiber for example. The reflectors may be integrated with a flow cell through which the sample stream passes, or may be separate components arranged around a flow cell or, in instruments not employing a flow cell, arranged around a sample stream in air. Refractive beam steering optics may allow multiple closely spaced excitation beams to be directed into the sample stream at low angles of incidence. The collection optics and refractive beam steering optics may be employed separately or in combination with each other.