Acoustic wave filter package lid attachment apparatus and method
utilizing a novolac epoxy based seal
    2.
    发明授权
    Acoustic wave filter package lid attachment apparatus and method utilizing a novolac epoxy based seal 失效
    声波过滤器包装盖附件装置和方法利用酚醛环氧树脂密封

    公开(公告)号:US5729185A

    公开(公告)日:1998-03-17

    申请号:US639673

    申请日:1996-04-29

    CPC分类号: H03H9/1092 Y10T29/42

    摘要: A method for packaging an acoustic wave filter (102). The method includes a step of providing a first wafer (100). The first wafer (100) supports acoustic wave transduction and propagation. The method also includes steps of processing the wafer (100) to provide transducer patterns (18, 18') thereon and disposing a seal ring (25) on the wafer (100). The seal ring (25) completely encloses active areas allowing portions of each bond pad to extend outside of the seal ring. The method further includes steps of disposing a second wafer (40) atop the seal ring (25) and the first wafer (100), sealing the second wafer (40) to the first wafer (100), dicing the second wafer (40) with a saw that provides a first kerf width, whereby portions of the second wafer (40) overlying bonding pads (20) of the transducer patterns (18, 18') are removed and dicing the first wafer (100) with a saw that provides a second kerf width narrower than the first kerf width to provide a packaged SAW die.

    摘要翻译: 一种用于封装声波滤波器(102)的方法。 该方法包括提供第一晶片(100)的步骤。 第一晶片(100)支持声波传导和传播。 该方法还包括处理晶片(100)以在其上提供换能器图案(18,18')并且在密封环(100)上设置密封环(25)的步骤。 密封环(25)完全包围活动区域,允许每个接合垫的部分延伸到密封环的外部。 该方法还包括以下步骤:在密封环(25)和第一晶片(100)的顶部设置第二晶片(40),将第二晶片(40)密封到第一晶片(100),将第二晶片(40) 具有提供第一切口宽度的锯,由此去除覆盖换能器图案(18,18')的覆盖焊盘(20)的第二晶片(40)的部分,并用锯提供第一晶片(100) 第二切口宽度比第一切口宽度窄,以提供封装的SAW模具。