摘要:
A scribing wheel for a brittle material includes a circumferential ridgeline in which two truncated cones have connected bottoms so as to share a rotational axis. Alternating notches and protrusions are formed along the circumference ridgeline. The protrusion are portions of the ridgeline remaining after the ridgeline is notched. The length of the notches is less than that of the protrusions so that a catch on the surface is improved while lowering the high penetrability.
摘要:
A scribing wheel for a brittle material includes a circumferential ridge line in which two truncated cones have connected bottoms so as to share a rotational axis. Alternating notches and protrusions are formed along the circumference ridge line. The protrusion are portions of the ridge line remaining after the ridge line is notched. The length of the notches is less than that of the protrusions so that a catch on the surface is improved while lowering the high penetrability.
摘要:
A scribing head 1 of this invention raises and lowers a scribing cutter by rotation of a servomotor 3. As a scribe pressure, a rotational torque of the servomotor 3 is transmitted to the scribing cutter. To form a scribe line across another scribe line which is formed earlier, the scribe pressure is raised temporarily when the scribing head passes the scribe line which is formed earlier. The rotational torque of the servomotor 3 is controlled at any of preset limits while the position of a cutter 6 of the scribing head shifts on the brittle substrate. The servomotor 3 is driven under position-control mode.
摘要:
A vertical crack is generated at a desired position on a brittle material substrate S by making a wheel tip 5a of a glass cutter 5 move while being in contact with the substrate surface by a load which does not allow the wheel tip 5a to damage the surface, using an armature 6 applying an abrupt impact force for generating the vertical crack having a predetermined depth, to the glass cutter 5 moving on the substrate. A scribe line is formed as the vertical crack is urged to extend along a planned scribe line, due to a stress gradient exerted onto the vertical crack and occurring between a compressive stress in an irradiation area on the substrate at which a laser beam is irradiated from a laser beam oscillator 8 and a tensile stress in a cooling area made by a cooling medium released from a cooling nozzle 7.
摘要:
A scribing wheel for a brittle material includes a circumferential ridgeline in which two truncated cones have connected bottoms so as to share a rotational axis. Alternating notches and protrusions are formed along the circumference ridgeline. The protrusion are portions of the ridgeline remaining after the ridgeline is notched. The length of the notches is less than that of the protrusions so that a catch on the surface is improved while lowering the high penetrability.
摘要:
A vertical crack is generated at a desired position on a brittle material substrate S by making a wheel tip 5a of a glass cutter 5 move while being in contact with the substrate surface by a load which does not allow the wheel tip 5a to damage the surface, using an armature 6 applying an abrupt impact force for generating the vertical crack having a predetermined depth, to the glass cutter 5 moving on the substrate. A scribe line is formed as the vertical crack is urged to extend along a planned scribe line, due to a stress gradient exerted onto the vertical crack and occurring between a compressive stress in an irradiation area on the substrate at which a laser beam is irradiated from a laser beam oscillator 8 and a tensile stress in a cooling area made by a cooling medium released from a cooling nozzle 7.
摘要:
A silicon wafer 50 including a plurality of semiconductor devices patterned on a top surface thereof as a result of a wafer production process is prepared. A transparent film is applied on the top surface of the semiconductor wafer 50 so as to cover all the plurality of semiconductor devices. The semiconductor wafer with the transparent film is placed on a rotatable table 26 such that a rear surface of the semiconductor wafer not covered with the transparent film is facing up away from the rotatable table 26. The rear surface of the semiconductor wafer 50 is heated with a laser beam to form a laser spot, along a scribe line formation line for dividing the semiconductor wafer into a plurality of semiconductor chips, to a temperature lower than a softening point of the semiconductor wafer, while an area close to the laser spot is continuously cooled along the scribe line formation line.
摘要:
A scribing head 1 of this invention raises and lowers a scribing cutter by rotation of a servomotor 3. As a scribe pressure, a rotational torque of the servomotor 3 is transmitted to the scribing cutter. To form a scribe line across another scribe line which is formed earlier, the scribe pressure is raised temporarily when the scribing head passes the scribe line which is formed earlier. The rotational torque of the servomotor 3 is controlled at any of preset limits while the position of a cutter 6 of the scribing head shifts on the brittle substrate. The servomotor 3 is driven under position-control mode.
摘要:
A cutter wheel for scribing a brittle material substrate having excellent biting in the surface of the brittle material substrate when the brittle material substrate used for a liquid crystal display panel or the like is cut and a method for manufacturing the cutter wheel with high productivity are provided. The cutter wheel made of a hard metal or sintered diamond is formed in such a manner that a V-shaped ridge line part is formed as an edge along the circumferential part of a disk-like wheel, and at least one notch is engraved in the above described ridge line part and notches as that described above are formed in the entirety of the periphery of the above described ridge line part at a pitch of more than 200 μm.
摘要:
A cutter wheel for brittle materials includes a disk with two side planes and an outer peripheral portion between the planes. The outer peripheral portion includes two bevel portions and a ridge portion between the bevel portions. The ridge portion has a plurality of peaks aligned along a circumferential line. For example, the ridge portion includes a straight line connecting two adjacent peaks in the plurality of peaks. Alternatively, the ridge portion is a depression between two adjacent peaks in the plurality of peaks, and the depth of the depression is deeper than the straight line connecting the two adjacent peaks. Preferably, the peaks are spaced apart at an equal distance.