公开(公告)号：US6141082A

公开(公告)日：2000-10-31

申请号：US172144

申请日：1998-10-14

申请人： Kei Nara ,  Seiji Miyazaki ,  Hideki Koitabashi

发明人： Kei Nara ,  Seiji Miyazaki ,  Hideki Koitabashi

IPC分类号： G03F9/00 ,  G03B27/52

CPC分类号： G03F9/7011 ,  G03F9/00 ,  G03F9/7003 ,  G03F9/7076 ,  G03F9/7088 ,  Y10S438/975

摘要： In order to provide a search alignment method capable of high-speed alignment without a relative movement between an alignment system and a substrate, an alignment mark is constituted by a plurality of element marks having shapes different from each other, the plurality of element marks are provided in such a manner that each two of them has a gap a little shorter than the size of the field of view of the alignment system therebetween, and if even one of the element marks constituting the alignment mark comes into the field of view of the alignment system, said element mark is identified out of all of said element marks, whereby the position of the entire alignment is measured from the position of said one element mark. Therefore, if the alignment mark is moved in a range wider than the field of view of the alignment system, it is possible to detect the position of the alignment mark by one measurement.

摘要翻译： 为了提供能够在对准系统和基板之间没有相对移动的情况下进行高速对准的搜索对准方法，由具有彼此不同的形状的多个元素标记构成对准标记，多个元素标记 设置成使得它们中的每一个具有比它们之间的对准系统的视场尺寸稍短的间隙，并且如果构成对准标记的元件标记中的一个进入到 对准系统中，从所有元件标记中识别所述元件标记，由此从所述一个元件标记的位置测量整个对准的位置。 因此，如果对准标记在比对准系统的视野宽的范围内移动，则可以通过一次测量来检测对准标记的位置。

公开(公告)号：US5999244A

公开(公告)日：1999-12-07

申请号：US743096

申请日：1996-11-04

申请人： Masamitsu Yanagihara ,  Kei Hara ,  Seiji Miyazaki ,  Hideki Koitabashi ,  Yoichi Hamashima ,  Hiroshi Kitano ,  Yoshiyuki Katamata

发明人： Masamitsu Yanagihara ,  Kei Hara ,  Seiji Miyazaki ,  Hideki Koitabashi ,  Yoichi Hamashima ,  Hiroshi Kitano ,  Yoshiyuki Katamata

IPC分类号： G03F7/20 ,  H01L21/027

CPC分类号： G03F7/706 ,  G03F7/70258 ,  G03F7/70275 ,  G03F7/70358 ,  G03F7/70691

摘要： Positional discrepancies of images of segmental areas, which are caused by stretching of a substrate in the Y direction, are corrected by changing magnifications of respective projection optical systems and inclinations of parallel plane glass pieces with respect optical axes. After that, positional discrepancies of the images after the correction are accurately detected by using a calibration system for the projection optical systems. Thus it is possible to confirm whether or not the positional discrepancies are accurately corrected. If the correction is insufficient as a result of the confirmation, at least one of correction of the magnifications of the respective projection optical systems and shift of the images projected through the respective projection optical systems onto the substrate is executed again so that amounts of the positional discrepancies are sufficiently small. On the other hand, the positional discrepancy can be easily determined by storing positional information and a detected signal concerning an image formed by a projection optical system in synchronization with a clock, followed by signal processing.

摘要翻译： 通过改变各个投影光学系统的放大率和平行平面玻璃片相对于光轴的倾斜来校正由Y方向上的基板的拉伸引起的节段区域的图像的位置差异。 之后，通过使用投影光学系统的校准系统来精确地检测校正后的图像的位置偏差。 因此，可以确认位置差异是否被精确地校正。 如果作为确认的结果校正不足，则再次执行各个投影光学系统的放大率的校正和通过各个投影光学系统投影的图像的移位中的至少一个，使得位置 差异足够小。 另一方面，通过与时钟同步地存储与投影光学系统形成的图像有关的位置信息和检测信号，接着进行信号处理，可以容易地确定位置偏差。

公开(公告)号：US5500736A

公开(公告)日：1996-03-19

申请号：US339284

申请日：1994-11-07

申请人： Hideki Koitabashi ,  Masamitsu Yanagihara ,  Junji Hazama

发明人： Hideki Koitabashi ,  Masamitsu Yanagihara ,  Junji Hazama

IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  G01B11/00

CPC分类号： G03F9/70

摘要： A position detecting method detects each position of a photosensitive substrate when executing shots of circuit patterns so that the circuit patterns are further superposed on the photosensitive substrate already formed with the circuit patterns. The method comprises the steps of performing a shot of a circuit pattern of a reticle in superposition on liquid crystal pixel segments already formed on a glass plate, registering, in a memory, a circuit pattern as a reference image in the liquid crystal pixel segment and performing pattern matching with other fields of the liquid crystal pixel segments by use of this reference image. An alignment is conducted based on a position of circuit pattern extracted thereby.

摘要翻译： 当执行电路图案的拍摄时，位置检测方法检测感光基板的每个位置，使得电路图案进一步叠加在已经形成有电路图案的感光基板上。 该方法包括以下步骤：在已经形成在玻璃板上的液晶像素段上叠加掩模版的电路图案，在存储器中将作为参考图像的电路图案配置在液晶像素段中，以及 通过使用该参考图像来执行与液晶像素段的其它场的模式匹配。 基于由此提取的电路图案的位置进行对准。

公开(公告)号：US5640243A

公开(公告)日：1997-06-17

申请号：US429192

申请日：1995-04-26

申请人： Hideki Koitabashi ,  Masamitsu Yanagihara ,  Junji Hazama

发明人： Hideki Koitabashi ,  Masamitsu Yanagihara ,  Junji Hazama

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/68 ,  G01B11/00

CPC分类号： G03F9/70

摘要： An image in which a feature corresponding to a reference mark formed at a predetermined position in an exposure apparatus is formed at a predetermined position in an arbitrary area is stored as a reference image, and a reference image including an image corresponding to the reference mark is detected from an image to be processed obtained by picking up an image near the reference mark to detect the position of the reference mark in the image to be processed, thus enabling detection of the positional relationship between a reference in the exposure apparatus and substrate alignment means.

摘要翻译： 将形成在曝光装置中的预定位置处的参考标记的特征对应的特征形成在任意区域中的预定位置的图像被存储为参考图像，并且包括与参考标记相对应的图像的参考图像是 从通过拾取参考标记附近的图像获得的待处理图像中检测到的，以检测待处理图像中的参考标记的位置，从而能够检测曝光装置中的基准和基板对准装置之间的位置关系 。

公开(公告)号：US5849441A

公开(公告)日：1998-12-15

申请号：US790862

申请日：1997-02-03

申请人： Kei Nara ,  Seiji Miyazaki ,  Hideki Koitabashi

发明人： Kei Nara ,  Seiji Miyazaki ,  Hideki Koitabashi

IPC分类号： G03F9/00

CPC分类号： G03F9/7011 ,  G03F9/00 ,  G03F9/7003 ,  G03F9/7076 ,  G03F9/7088 ,  Y10S438/975

摘要： In order to provide a search alignment method capable of high-speed alignment without a relative movement between an alignment system and a substrate, an alignment mark is constituted by a plurality of element marks having shapes different from each other, the plurality of element marks are provided in such a manner that each two of them has a gap a little shorter than the size of the field of view of the alignment system therebetween, and if even one of the element marks constituting the alignment mark comes into the field of view of the alignment system, said element mark is identified out of all of said element marks, whereby the position of the entire alignment is measured from the position of said one element mark. Therefore, if the alignment mark is moved in a range wider than the field of view of the alignment system, it is possible to detect the position of the alignment mark by one measurement.

摘要翻译： 为了提供能够在对准系统和基板之间没有相对移动的情况下进行高速对准的搜索对准方法，由具有彼此不同的形状的多个元素标记构成对准标记，多个元素标记 设置成使得它们中的每一个具有比它们之间的对准系统的视场尺寸稍短的间隙，并且如果构成对准标记的元件标记中的一个进入到 对准系统中，从所有元件标记中识别所述元件标记，由此从所述一个元件标记的位置测量整个对准的位置。 因此，如果对准标记在比对准系统的视野宽的范围内移动，则可以通过一次测量来检测对准标记的位置。