METHOD AND APPARATUS FOR IRRADIATING LASER
    1.
    发明申请
    METHOD AND APPARATUS FOR IRRADIATING LASER 有权
    辐射激光的方法和装置

    公开(公告)号:US20100190276A1

    公开(公告)日:2010-07-29

    申请号:US12753214

    申请日:2010-04-02

    IPC分类号: H01L21/66

    摘要: A laser irradiation process includes: scanning a substrate with laser having a predetermined lasing frequency at different irradiation intensities to form a plurality of first irradiation areas corresponding to the irradiation intensities; illuminating the first irradiation areas to reflected light receive from the first irradiation areas; determining microcrystallization intensity based on the received reflected light; and determining irradiation intensity based on the thus determined microcrystallization intensity. The laser irradiation process uses the irradiation intensity for irradiating a polycrystalline film in a product semiconductor device.

    摘要翻译: 激光照射处理包括:以不同照射强度的具有预定的激光频率的激光扫描基板,以形成与照射强度对应的多个第一照射区域; 将第一照射区域照射到从第一照射区域接收的反射光; 基于所接收的反射光确定微结晶强度; 并根据如此确定的微结晶强度确定照射强度。 激光照射方法使用照射强度来照射产品半导体器件中的多晶膜。

    Manufacturing method of thin film device substrate
    2.
    发明授权
    Manufacturing method of thin film device substrate 有权
    薄膜器件衬底的制造方法

    公开(公告)号:US07579222B2

    公开(公告)日:2009-08-25

    申请号:US11503286

    申请日:2006-08-14

    IPC分类号: H01L21/00

    摘要: Method of manufacturing a thin film device substrate wherein no trench fabrication is required to be applied onto the substrate surface, and a material which is impervious to light can be used, and the substrate can be peeled off quickly. Firstly, a peeling-off film, a silicon oxide film and an amorphous silicon film are formed in succession on a glass substrate, and the amorphous silicon film is irradiated from above to obtain a polycrystalline silicon film. Subsequently, using the polycrystalline silicon film as an active layer, a TFT is formed, and then a plastic substrate is bonded thereon, and finally the glass substrate is peeled off with the peeling-off film, to complete transfer of the TFT. Because the peeling-off film has a gap space, its etching rate is high. Therefore, it is unnecessary to form a trench for supplying an etchant on the surface of the glass substrate.

    摘要翻译: 可以使用不需要在基板表面上施加沟槽加工的​​薄膜器件基板的制造方法,并且可以使用不透光的材料,并且可以快速地剥离基板。 首先,在玻璃基板上依次形成剥离膜,氧化硅膜和非晶硅膜,从上方照射非晶硅膜,得到多晶硅膜。 随后,使用多晶硅膜作为有源层,形成TFT,然后将塑料基板接合在其上,最后用剥离膜剥离玻璃基板,完成TFT的转印。 由于剥离膜具有间隙空间,因此其蚀刻速率高。 因此,不需要在玻璃基板的表面上形成用于供给蚀刻剂的沟槽。

    Method of fabricating reflection type liquid crystal display
    3.
    发明授权
    Method of fabricating reflection type liquid crystal display 有权
    制造反射型液晶显示器的方法

    公开(公告)号:US07514303B2

    公开(公告)日:2009-04-07

    申请号:US11636441

    申请日:2006-12-11

    IPC分类号: H01L21/84

    摘要: A liquid crystal display device includes (a) a first substrate, (b) a second substrate spaced away from and facing the first substrate, (c) a liquid crystal layer sandwiched between the first and second substrates, (d) a transistor formed on the first substrate, (e) a wiring layer formed on the first substrate and electrically connected to the transistor, (f) a reflection electrode formed on the first substrate, an external incident light being reflected at the reflection electrode towards a viewer, and (g) a compensation layer formed directly on the wiring layer. The reflection electrode does not cover the wiring layer therewith, and the compensation layer has almost the same height as a height of the reflection electrode, the height being measured from a surface of the first substrate.

    摘要翻译: 液晶显示装置包括:(a)第一基板,(b)与第一基板间隔开并面对第一基板的第二基板,(c)夹在第一和第二基板之间的液晶层,(d) 所述第一基板,(e)形成在所述第一基板上并电连接到所述晶体管的布线层,(f)形成在所述第一基板上的反射电极,在所述反射电极朝向观察者反射的外部入射光,以及 g)直接形成在布线层上的补偿层。 反射电极不覆盖布线层,并且补偿层具有与反射电极的高度几乎相同的高度,高度是从第一基板的表面测量的。

    Manufacturing method of thin film device substrate

    公开(公告)号:US07122444B2

    公开(公告)日:2006-10-17

    申请号:US10974932

    申请日:2004-10-28

    IPC分类号: H01L21/30 H01L21/46

    摘要: Method of manufacturing a thin film device substrate wherein no trench fabrication is required to be applied onto the substrate surface, and a material which is impervious to light can be used, and the substrate can be peeled off quickly. Firstly, a peeling-off film, a silicon oxide film and an amorphous silicon film are formed in succession on a glass substrate, and the amorphous silicon film is irradiated from above to obtain a polycrystalline silicon film. Subsequently, using the polycrystalline silicon film as an active layer, a TFT is formed, and then a plastic substrate is bonded thereon, and finally the glass substrate is peeled off with the peeling-off film, to complete transfer of the TFT. Because the peeling-off film has a gap space, its etching rate is high. Therefore, it is unnecessary to form a trench for supplying an etchant on the surface of the glass substrate.

    Reflective LCD having a light scattering means formed on an electrode
side surface of a counter substrate
    7.
    发明授权
    Reflective LCD having a light scattering means formed on an electrode side surface of a counter substrate 失效
    具有形成在对置基板的电极侧表面上的光散射装置的反射LCD

    公开(公告)号:US5796455A

    公开(公告)日:1998-08-18

    申请号:US852521

    申请日:1997-05-07

    摘要: In a reflective liquid crystal display comprising a first insulative plate having a reflector, a second insulative plate having a transparent electrode, and a liquid crystal layer sandwiched between the reflector and the transparent electrode, a convex-concave surface is provided at the side of the second insulative plate. With this arrangement, a desired light scattering characteristics is realized with a high image quality and a high brightness, with neither a fuzziness of displayed characters nor a double image. On the other hand, since no thin film transistor is formed at the side of the second insulative plate, the convex-concave surface can be simply formed with no necessity of depositing an insulating film covering the thin film transistor and patterning the deposited insulating film.

    摘要翻译: 在包括具有反射器的第一绝缘板和具有透明电极的第二绝缘板和夹在反射器和透明电极之间的液晶层的反射型液晶显示器中,在凹凸表面 第二绝缘板。 通过这种布置,以高图像质量和高亮度实现期望的光散射特性,既不显示字符的模糊性也不具有双重图像。 另一方面,由于在第二绝缘板的侧面没有形成薄膜晶体管,所以可以简单地形成凸凹面,而不需要沉积覆盖薄膜晶体管的绝缘膜,并对沉积的绝缘膜进行图案化。

    Layer-stacked wiring and semiconductor device using the same
    8.
    发明授权
    Layer-stacked wiring and semiconductor device using the same 有权
    层叠布线和使用其的半导体器件

    公开(公告)号:US07851807B2

    公开(公告)日:2010-12-14

    申请号:US12490790

    申请日:2009-06-24

    IPC分类号: H01L29/15

    CPC分类号: H01L29/4908 H01L29/66757

    摘要: A layer-stacked wiring made up of a microcrystalline silicon thin film and a metal thin film is provided which is capable of suppressing an excessive silicide formation reaction between the microcrystalline silicon thin film and metal thin film, thereby preventing peeling of the thin film. In a polycrystalline silicon TFT (Thin Film Transistor) using the layer-stacked wiring, the microcrystalline silicon thin film is so configured that its crystal grains each having a length of the microcrystalline silicon thin film in a direction of a film thickness being 60% or more of a film thickness of the microcrystalline silicon thin film amount to 15% or less of total number of crystal grains or that its crystal grains each having a length of the microcrystalline silicon thin film in a direction of a film thickness being 50% or less of a film thickness of the microcrystalline silicon thin film amount to 85% or more of the total number of crystal grains making up the microcrystalline silicon thin film.

    摘要翻译: 提供了由微晶硅薄膜和金属薄膜构成的层叠布线,其能够抑制微晶硅薄膜和金属薄膜之间的过度的硅化物形成反应,从而防止薄膜的剥离。 在使用层叠布线的多晶硅TFT(Thin Film Transistor,多晶硅TFT)中,微晶硅薄膜的结构使得其晶粒各自具有薄膜厚度为60%的微晶硅薄膜的长度, 微晶硅薄膜的膜厚更多为15个以下的晶粒总数,或者其晶粒尺寸为50%以下,每个微晶硅薄膜的长度均为50%以下 的微晶硅薄膜的膜厚的总和为构成微晶硅薄膜的晶粒总数的85%以上。

    Generation of pattern data with no overlapping or excessive distance between adjacent dot patterns
    9.
    发明申请
    Generation of pattern data with no overlapping or excessive distance between adjacent dot patterns 有权
    生成相邻点图案之间没有重叠或过大距离的图案数据

    公开(公告)号:US20090322757A1

    公开(公告)日:2009-12-31

    申请号:US12462710

    申请日:2009-08-07

    IPC分类号: G06T11/20

    摘要: A device is disclosed for generating pattern data for unevenness that is randomly arranged on the surface of the reflective substrate of a reflective liquid crystal display device. The number of coordinates, a basic pitch, a movable range, and a dot diameter are entered from a data entry unit. An array generation unit regularly arranges base coordinates in two dimensions in accordance with the basic pitch. Coordinate displacement unit randomly displaces within the movable range at a portion of the basic coordinates to generate a multiplicity of displaced coordinates. Pattern generation unit arranges dot patterns with the dot diameter entered at each of the displaced coordinates generated to generate pattern data.

    摘要翻译: 公开了一种用于产生随机地布置在反射型液晶显示装置的反射基板的表面上的不均匀图案数据的装置。 从数据输入单元输入坐标数,基准间距,可移动范围和点直径。 阵列生成单元根据基本间距规则地排列基准坐标二维。 坐标位移单元在基本坐标的一部分的可移动范围内随机移位,以产生多个位移坐标。 图案生成单元布置具有在生成的每个位移坐标处输入的点直径的点图案以生成图案数据。

    Generation of pattern data with no overlapping or excessive distance between adjacent patterns
    10.
    发明授权
    Generation of pattern data with no overlapping or excessive distance between adjacent patterns 有权
    产生相邻图案之间没有重叠或过度距离的图案数据

    公开(公告)号:US07612847B2

    公开(公告)日:2009-11-03

    申请号:US10487496

    申请日:2002-09-05

    IPC分类号: G02F1/1335

    摘要: A device is disclosed for generating pattern data for unevenness that is randomly arranged on the surface of the reflective substrate of a reflective liquid crystal display device. The number of coordinates, a basic pitch, a movable range, and a dot diameter are entered from a data entry unit. An array generation unit regularly arranges base coordinates in two dimensions in accordance with the basic pitch. Coordinate displacement unit randomly displaces within the movable range at a portion of the basic coordinates to generate a multiplicity of displaced coordinates. Pattern generation unit arranges dot patterns with the dot diameter entered at each of the displaced coordinates generated to generate pattern data.

    摘要翻译: 公开了一种用于产生随机地布置在反射型液晶显示装置的反射基板的表面上的不均匀图案数据的装置。 从数据输入单元输入坐标数,基准间距,可移动范围和点直径。 阵列生成单元根据基本间距规则地排列基准坐标二维。 坐标位移单元在基本坐标的一部分的可移动范围内随机移位,以产生多个位移坐标。 图案生成单元布置具有在生成的每个位移坐标处输入的点直径的点图案以生成图案数据。