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公开(公告)号：US07508120B2
公开(公告)日：2009-03-24
申请号：US10543119
申请日：2004-01-21
IPC分类号： H01L41/09
CPC分类号： H01L41/316
摘要： A lower electrode is formed on a silica glass substrate or a stainless substrate. Through a sputtering process, a thin film of aluminum nitride and/or zinc oxide is formed on the lower substrate so that the degree of dipole-orientation becomes 55% or more, and thereby a piezoelectric thin film is formed. And an upper electrode is formed on the piezoelectric thin film.A piezoelectric device has a piezoelectric layer made of aluminum nitride and/or zinc oxide. Aluminum nitride and zinc oxide with a crystal structure have inborn piezoelectric characteristics because their crystal structures are not symmetrical, they do not have Curie temperature unlike ferroelectrics, and in aluminum nitride and zinc oxide, magnetic transition does not occur even at high temperature, so that they never lose piezoelectric characteristics until crystal melts or sublimates.
摘要翻译： 在石英玻璃基板或不锈钢基板上形成下电极。 通过溅射工艺，在下基板上形成氮化铝和/或氧化锌薄膜，使得偶极取向度达到55％以上，从而形成压电薄膜。 并且在压电薄膜上形成上电极。 压电装置具有由氮化铝和/或氧化锌制成的压电层。 具有晶体结构的氮化铝和氧化锌具有先天的压电特性，因为它们的晶体结构不对称，它们不像铁电体那样具有居里温度，并且在氮化铝和氧化锌中，即使在高温下也不会发生磁转变，因此 在晶体熔化或升华之前，它们不会失去压电特性。
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公开(公告)号：US5204078A
公开(公告)日：1993-04-20
申请号：US766960
申请日：1991-09-25
申请人： Hiroshi Tateyama , Kinue Tsunematsu , Kunio Kimura , Hideharu Hirosue , Kazuhiko Jinnai , Takashi Furusawa
发明人： Hiroshi Tateyama , Kinue Tsunematsu , Kunio Kimura , Hideharu Hirosue , Kazuhiko Jinnai , Takashi Furusawa
IPC分类号： C01B33/42
CPC分类号： C01B33/425 , C01B33/28 , Y10S106/03 , Y10T428/2911
摘要： The present invention is a method for producing swellable or nonswellable fluorine mica at a relatively lower temperature by heating a powdery mixture comprising 10 to 35% by weight of an alkali silicofluoride as the main component optionally together with an alkali fluoride and the balance of talc. This fluorine mica is used for pigments, etc.
摘要翻译： 本发明是通过将含有10〜35重量％的氟化硅作为主要成分的粉末状混合物，与碱金属氟化物和余量的滑石一起加热，从而在相对较低的温度下生产可膨胀或不可用的氟云母的方法。 该氟云母用于颜料等
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公开(公告)号：US2625781A
公开(公告)日：1953-01-20
申请号：US19488550
申请日：1950-11-09
申请人： HIROSHI TATEYAMA
发明人： HIROSHI TATEYAMA
IPC分类号： A01D31/00
CPC分类号： A01D31/00
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4.发明授权公开(公告)号：US07233094B2
公开(公告)日：2007-06-19
申请号：US10516333
申请日：2003-05-29
申请人： Morito Akiyama , Naohiro Ueno , Hiroshi Tateyama , Yoshitaka Sunagawa , Yoshihiro Umeuchi , Keiichiro Jinushi
发明人： Morito Akiyama , Naohiro Ueno , Hiroshi Tateyama , Yoshitaka Sunagawa , Yoshihiro Umeuchi , Keiichiro Jinushi
CPC分类号： H01L41/316 , Y10T29/42
摘要： The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.
摘要翻译： 本发明的目的是提供一种高性能压电元件，其通过从W层形成底部电极而不间断地形成不具有超高c轴取向的小丘，裂纹和剥离的氮化铝薄膜 粘合剂层在玻璃或其他便宜的基材上。 本发明的压电元件是使用超高取向氮化铝薄膜的压电元件，其特征在于，压电元件没有小丘，裂纹和剥离，并且包括堆叠结构，其中底部电极，压电体薄 膜和顶电极依次形成在基板上; 底部电极由取向的W层制成，其中W（111）面平行于衬底的表面; 并且压电体薄膜由具有不超过2.5°的摇摆曲线全宽半最大值（RCFWHM）的c轴取向氮化铝薄膜形成。
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5.发明申请公开(公告)号：US20050236710A1
公开(公告)日：2005-10-27
申请号：US10516333
申请日：2003-05-29
申请人： Morito Akiyama , Naohiro Ueno , Hiroshi Tateyama , Yoshitaka Sunagawa , Yoshihiro Umeuchi , Keiichiro Jinushi
发明人： Morito Akiyama , Naohiro Ueno , Hiroshi Tateyama , Yoshitaka Sunagawa , Yoshihiro Umeuchi , Keiichiro Jinushi
IPC分类号： C23C14/34 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/316 , H01L21/28 , H01L23/52
CPC分类号： H01L41/316 , Y10T29/42
摘要： The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.
摘要翻译： 本发明的目的是提供一种高性能压电元件，其通过从W层形成底部电极而不间断地形成不具有超高c轴取向的小丘，裂纹和剥离的氮化铝薄膜 粘合剂层在玻璃或其他便宜的基材上。 本发明的压电元件是使用超高取向氮化铝薄膜的压电元件，其特征在于，压电元件没有小丘，裂纹和剥离，并且包括堆叠结构，其中底部电极，压电体薄 膜和顶电极依次形成在基板上; 底部电极由取向的W层制成，其中W（111）面平行于衬底的表面; 并且压电体薄膜由具有不超过2.5°的摇摆曲线全宽半最大值（RCFWHM）的c轴取向氮化铝薄膜形成。
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6.发明申请公开(公告)号：US20050119132A1
公开(公告)日：2005-06-02
申请号：US10497149
申请日：2002-11-29
申请人： Chao-Nan Xu , Wengsheng Shi , Hiroshi Tateyama , Keiko Nishikubo
发明人： Chao-Nan Xu , Wengsheng Shi , Hiroshi Tateyama , Keiko Nishikubo
CPC分类号： B82Y30/00 , B01J19/06 , B01J2208/00734 , B01J2219/1946 , C01B13/34 , C01F17/0025 , C01P2002/50 , C01P2004/03 , C01P2004/32 , C01P2004/61 , C01P2004/62 , C01P2004/64 , C09K11/7734 , F26B3/12 , F26B7/002
摘要： A spherical crystalline metal oxide particle is produced by introducing a metal ion-containing solution, which has been atomized, into an atmosphere that is kept at 1000° C. or more and under oxidizing condition, in order to concurrently dry and sinter the metal ion-containing solution. Moreover, As an apparatus for producing the particle, an apparatus is used, which is structured by connecting: (A) a heating apparatus for concurrently drying and sintering an atomized particulate, the heating apparatus (4) including multi channel atomizing apparatus (3) having a function of atomizing a metal ion-containing solution, and a function of sorting a size of the thus atomized particulate; and (B) an electrostatic particle collecting apparatus (5) for electrostatically collecting the particle that is thus produced by (A) and has a predetermined size. With this arrangement, it is possible to provide a method and an apparatus capable of obtaining a highly crystalline spherical particle of a metal oxide safely and easily.
摘要翻译： 通过将已经雾化的含有金属离子的溶液引入保持在1000℃以上且在氧化条件下的气氛中来制造球状结晶金属氧化物颗粒，以同时干燥和烧结金属离子 含有解决方案。 另外，作为粒子的制造装置，使用以下装置：（A）同时干燥和烧结雾化粒子的加热装置，包括多通道雾化装置（3）的加热装置（4） 具有使含有金属离子的溶液雾化的功能，以及对这样雾化的颗粒的尺寸进行分选的功能; 和（B）用于静电收集由（A）制成并具有预定尺寸的颗粒的静电颗粒收集装置（5）。 通过这种布置，可以提供能够安全且容易地获得金属氧化物的高结晶球形颗粒的方法和装置。
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公开(公告)号：US5017523A
公开(公告)日：1991-05-21
申请号：US491427
申请日：1990-03-09
申请人： Kunio Kimura , Kazuhiko Jinnai , Hiroshi Tateyama
发明人： Kunio Kimura , Kazuhiko Jinnai , Hiroshi Tateyama
CPC分类号： C04B14/24 , C03B19/107 , C03C11/002 , Y02P40/57
摘要： Ultra-fine hollow glass spheres suitable as a filler in light-weight composite materials for building use and the like can be prepared from a fine powder of volcanic glass even when the starting powder has a particle size as fine as 20 .mu.m or smaller. The inventive method comprises an acid-leaching treatment of the starting powder using hydrochloric or sulfuric acid under hydrothermal conditions at 150.degree.-200.degree. C. to modify the chemical composition in the surface layer of the particles and a subsequent heat treatment of the acid-treated particles at a specified high temperature to effect expansion by the water vapor produced from the structural water in the softened particles. By virtue of the modified composition in the surface layer and in contrast to the prior art method without the acid treatment, a good balance can be obtained between the rate of water vapor release and softening of the particles even when the particle size is extremely small to facilitate expansion of the particles.
摘要翻译： 即使起始粉末的粒径为20μm以下，也可以由火山玻璃的微细粉末制备适合作为建筑用轻质复合材料的填料的超细中空玻璃球。 本发明的方法包括在150-2200℃的水热条件下使用盐酸或硫酸对起始粉末进行酸浸处理，以改变颗粒表层的化学组成，随后热处理酸 - 在特定的高温下处理的颗粒通过由软化的颗粒中的结构水产生的水蒸汽进行膨胀。 由于表面层中的改性组合物，与不进行酸处理的现有技术方法形成对照，即使在粒径非常小的情况下，也可以获得水蒸气释放速率和颗粒软化之间的良好平衡 有助于颗粒的膨胀。
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8.发明申请Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods 有权纤锌矿薄膜，含纤锌矿结晶层的层压板及其制造方法公开(公告)号：US20070057285A1
公开(公告)日：2007-03-15
申请号：US10556663
申请日：2004-05-14
IPC分类号： H01L29/732 , H01L31/00 , H01L21/00
CPC分类号： H01L41/316 , C23C14/06 , C30B23/00 , C30B29/403 , C30B29/406 , H01L41/257
摘要： According to the present invention, a thin film made of a wurtzite structure compound is manufactured by a reactive sputtering using a metal material as a target, and a nitrogen gas or an oxygen gas as a reactive gas. By optimizing film-forming conditions when manufacturing the film, it is possible to obtain a wurtzite thin film whose polarization directions of crystal grains are aligned in a uniform direction. According to a laminate of the present invention, a first wurtzite crystalline layer made of a wurtzite crystalline structure compound is formed in advance between a substrate and a functional material layer that is a ground. Thus, it is possible to improve the crystallinity and crystalline orientation of a second wurtzite crystalline layer formed on the functional material layer.
摘要翻译： 根据本发明，通过使用金属材料作为靶的反应性溅射和作为反应气体的氮气或氧气制造由纤锌矿结构化合物制成的薄膜。 通过在制造膜时优化成膜条件，可以获得其晶粒的极化方向在均匀方向上排列的纤锌矿薄膜。 根据本发明的层压体，预先在基板和作为地面的功能性材料层之间形成由纤锌矿型结晶化合物构成的第一纤锌矿结晶层。 因此，可以提高在功能材料层上形成的第二纤锌矿结晶层的结晶度和结晶取向性。
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公开(公告)号：US07152482B2
公开(公告)日：2006-12-26
申请号：US10529746
申请日：2003-09-26
申请人： Naohiro Ueno , Morito Akiyama , Hiroshi Tateyama
发明人： Naohiro Ueno , Morito Akiyama , Hiroshi Tateyama
IPC分类号： G01L9/00
CPC分类号： G06F3/0414 , G01L1/16 , G01L9/008 , G01L23/222
摘要： A piezoelectric sensor arranged so as to includes: a transparent piezoelectric element having a piezoelectric property; and a pair of transparent conductor film layers opposed to each other with the piezoelectric element therebetween, the transparent piezoelectric element and the transparent conductor film layers are formed between a pair of transparent substrates, opposed to each other, which serve as pressure transmission means. Consequently, the transparent piezoelectric sensor has an excellent durability. A piezoelectric sensor comprises a piezoelectric element with a piezoelectric property which is made of a piezoelectric material having no Curie point and has a dipole orientation degree of not less than 75%. Consequently, the piezoelectric sensor having an excellent durability and a simple structure is provided at low cost.
摘要翻译： 一种压电传感器，其布置成包括：具有压电特性的透明压电元件; 和一对彼此相对的透明导电膜层，透明压电元件和透明导体膜层形成在彼此相对的一对透明基板之间，用作压力传递装置。 因此，透明压电传感器具有优异的耐久性。 压电传感器包括具有压电特性的压电元件，该压电元件由不具有居里点且具有不小于75％的偶极取向度的压电材料制成。 因此，以低成本提供了具有优异的耐久性和简单结构的压电传感器。
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公开(公告)号：US20060144154A1
公开(公告)日：2006-07-06
申请号：US10529746
申请日：2003-09-26
申请人： Naohiro Ueno , Morito Akiyama , Hiroshi Tateyama
发明人： Naohiro Ueno , Morito Akiyama , Hiroshi Tateyama
IPC分类号： G01L9/00
CPC分类号： G06F3/0414 , G01L1/16 , G01L9/008 , G01L23/222
摘要： A piezoelectric sensor arranged so as to includes: a transparent piezoelectric element having a piezoelectric property; and a pair of transparent conductor film layers opposed to each other with the piezoelectric element therebetween, the transparent piezoelectric element and the transparent conductor film layers are formed between a pair of transparent substrates, opposed to each other, which serve as pressure transmission means. Consequently, the transparent piezoelectric sensor has an excellent durability. A piezoelectric sensor comprises a piezoelectric element with a piezoelectric property which is made of a piezoelectric material having no Curie point and has a dipole orientation degree of not less than 75%. Consequently, the piezoelectric sensor having an excellent durability and a simple structure is provided at low cost.
摘要翻译： 一种压电传感器，其布置成包括：具有压电特性的透明压电元件; 和一对彼此相对的透明导电膜层，透明压电元件和透明导体膜层形成在彼此相对的一对透明基板之间，用作压力传递装置。 因此，透明压电传感器具有优异的耐久性。 压电传感器包括具有压电特性的压电元件，该压电元件由不具有居里点且具有不小于75％的偶极取向度的压电材料制成。 因此，以低成本提供了具有优异的耐久性和简单结构的压电传感器。
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