Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method
    1.
    发明授权
    Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method 失效
    包含超高取向氮化铝薄膜的压电器件及其制造方法

    公开(公告)号:US07233094B2

    公开(公告)日:2007-06-19

    申请号:US10516333

    申请日:2003-05-29

    IPC分类号: H01L41/04 H01L41/18 H04R17/00

    CPC分类号: H01L41/316 Y10T29/42

    摘要: The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.

    摘要翻译: 本发明的目的是提供一种高性能压电元件,其通过从W层形成底部电极而不间断地形成不具有超高c轴取向的小丘,裂纹和剥离的氮化铝薄膜 粘合剂层在玻璃或其他便宜的基材上。 本发明的压电元件是使用超高取向氮化铝薄膜的压电元件,其特征在于,压电元件没有小丘,裂纹和剥离,并且包括堆叠结构,其中底部电极,压电体薄 膜和顶电极依次形成在基板上; 底部电极由取向的W层制成,其中W(111)面平行于衬底的表面; 并且压电体薄膜由具有不超过2.5°的摇摆曲线全宽半最大值(RCFWHM)的c轴取向氮化铝薄膜形成。

    Piezoelectric device comprising ultrahighly-orientated aluminum nitride thin film and its manufacturing method
    2.
    发明申请
    Piezoelectric device comprising ultrahighly-orientated aluminum nitride thin film and its manufacturing method 失效
    包含超高取向氮化铝薄膜的压电器件及其制造方法

    公开(公告)号:US20050236710A1

    公开(公告)日:2005-10-27

    申请号:US10516333

    申请日:2003-05-29

    CPC分类号: H01L41/316 Y10T29/42

    摘要: The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.

    摘要翻译: 本发明的目的是提供一种高性能压电元件,其通过从W层形成底部电极而不间断地形成不具有超高c轴取向的小丘,裂纹和剥离的氮化铝薄膜 粘合剂层在玻璃或其他便宜的基材上。 本发明的压电元件是使用超高取向氮化铝薄膜的压电元件,其特征在于,压电元件没有小丘,裂纹和剥离,并且包括堆叠结构,其中底部电极,压电体薄 膜和顶电极依次形成在基板上; 底部电极由取向的W层制成,其中W(111)面平行于衬底的表面; 并且压电体薄膜由具有不超过2.5°的摇摆曲线全宽半最大值(RCFWHM)的c轴取向氮化铝薄膜形成。

    Battery pack
    4.
    发明申请
    Battery pack 有权
    电池组

    公开(公告)号:US20060246348A1

    公开(公告)日:2006-11-02

    申请号:US10556137

    申请日:2004-05-21

    IPC分类号: H01M10/50 H01M2/10

    摘要: The battery pack uses a restraining tool capable of secure restraint despite relatively low rigidity to achieve weight and cost reductions. The battery pack is formed of a plurality of parallel arranged battery modules (2), each consisting of a plurality of cells (5) electrically connected in series and coupled together in one piece with gaps (8) formed therebetween (5, 5), each cell being formed of elements for electromotive force encased in a prismatic case. The restraining tool includes connecting members (4) extending through the gaps (8) at both ends of the parallel arranged battery modules (2) and between two given cells (5, 5).

    摘要翻译: 尽管相对较低的刚度,电池组使用能够牢固约束的约束工具,以实现重量和成本的降低。 电池组由多个平行布置的电池模块(2)形成,每个电池模块(2)由多个串联电连接并与之间形成间隙(5,5)一体地联接在一起的多个电池(5)组成, 每个电池由包含在棱柱形壳体中的电动势的元件形成。 限制工具包括在平行布置的电池模块(2)的两端延伸穿过间隙(8)并且在两个给定的电池(5,5)之间的连接构件(4)。

    Battery pack
    5.
    发明授权
    Battery pack 有权
    电池组

    公开(公告)号:US07740978B2

    公开(公告)日:2010-06-22

    申请号:US10556137

    申请日:2004-05-21

    摘要: The battery pack uses a restraining tool capable of secure restraint despite relatively low rigidity to achieve weight and cost reductions. The battery pack is formed of a plurality of parallel arranged battery modules (2), each consisting of a plurality of cells (5) electrically connected in series and coupled together in one piece with gaps (8) formed therebetween (5, 5), each cell being formed of elements for electromotive force encased in a prismatic case. The restraining tool includes connecting members (4) extending through the gaps (8) at both ends of the parallel arranged battery modules (2) and between two given cells (5, 5).

    摘要翻译: 尽管相对较低的刚度,电池组使用能够牢固约束的约束工具,以实现重量和成本的降低。 电池组由多个平行布置的电池模块(2)形成,每个电池模块(2)由多个串联电连接并与之间形成间隙(5,5)一体地联接在一起的多个电池(5)组成, 每个电池由包含在棱柱形壳体中的电动势的元件形成。 限制工具包括在平行布置的电池模块(2)的两端延伸穿过间隙(8)并且在两个给定的电池(5,5)之间的连接构件(4)。

    Pressure sensor and its application
    6.
    发明授权
    Pressure sensor and its application 失效
    压力传感器及其应用

    公开(公告)号:US5902933A

    公开(公告)日:1999-05-11

    申请号:US861023

    申请日:1997-05-21

    IPC分类号: G01L9/00 G01L9/12 H01G7/00

    CPC分类号: G01L9/0072 G01L9/125

    摘要: A pressure sensor includes a detection unit 1 having capacities C1 and C2 varied by a predetermined external action, a reference detection 2 unvaried by the predetermined external action, a first oscillator 31 and 32 for generating a detection frequency signal according to the capacities C1 and C2 of the detection unit 1, a second oscillator 33 for producing a reference frequency signal according to the capacity of the reference unit 2, and measuring circuits 34, 35, 36 and 37 for measuring the number of the periods of the detection frequency signal within a predetermined period of the reference frequency signal to produce a measured signal. The sensor can minimize a detection error, and directly convert the change of capacity into a pulse signal (digital signal) without convertion into an analog, so that the circuit construction be simplified and realized at a reduced cost. The gas meter G includes a gas pressure introducing path 155 formed on a wall of a measuring chamber 154 within its meter body 150, and the pressure sensor S secured on a wall of the measuring chamber 154 through a sealing means the pressure receiving portion of which communicates with the gas pressure introducing path 155, whereby any specific gas introducing tube to introduce the gas into the pressure sensor S is not required and the problems of sealing at an insertion portion of the specific gas introducing tube toward the measuring chamber 156 are resolved.

    摘要翻译: 压力传感器包括具有由预定外部动作变化的容量C1和C2的检测单元1,不受预定外部动作影响的参考检测2,用于根据容量C1和C2产生检测频率信号的第一振荡器31和32 ,用于根据参考单元2的容量产生参考频率信号的第二振荡器33,以及测量电路34,35,36和37,用于测量检测单元1内的检测频率信号的周期数 基准频率信号的预定周期,以产生测量信号。 传感器可以最小化检测误差,并将容量的变化直接转换为脉冲信号(数字信号),而不会转换成模拟,从而降低成本,简化和实现电路结构。 燃气表G包括形成在其表体150内的测量室154的壁上的气体压力引入路径155,并且压力传感器S通过密封装置固定在测量室154的壁上,压力传感器S的压力接收部分 与气体压力引入路径155连通,由此不需要将气体引入压力传感器S中的任何特定的气体导入管,并且能够解决特定气体导入管朝向测量室156的插入部分的密封问题。

    Battery Module, Battery Pack, and Method for Producing the Battery Module
    7.
    发明申请
    Battery Module, Battery Pack, and Method for Producing the Battery Module 有权
    电池模块,电池组和生产电池模块的方法

    公开(公告)号:US20090061289A1

    公开(公告)日:2009-03-05

    申请号:US11659320

    申请日:2005-07-15

    IPC分类号: H01M2/12 H01M10/00

    摘要: An inexpensive battery pack including a battery module wherein a safety valve is provided for each cell in which battery pack gas leakage can be prevented. A battery pack 100 has a plurality of battery modules 110 each including a plurality of cells 120 respectively provided with a safety valve 123. The plurality of cells 120 included in each battery module 110 are arranged such that safety-valve mounting walls 121a are oriented in the same direction. Each battery module 110 comprises a gas duct member 130 covering all the safety valves 123 of the cells 120 included therein and forming a gas discharge path 131 between the gas duct member 130 and the safety-valve mounting walls 121a, and a sealing member 160 for hermetically sealing the gaps between each cell case 121 and the gas duct member 130.

    摘要翻译: 一种便宜的电池组,包括电池模块,其中为可以防止电池组气体泄漏的每个电池提供安全阀。 电池组100具有多个电池模块110,每个电池模块110包括分别设置有安全阀123的多个电池单元120.包括在每个电池模块110中的多个电池单元120布置成使得安全阀安装壁121a定向成 方向相同 每个电池模块110包括覆盖其中包括的电池单元120的所有安全阀123的气体管道构件130,并且在气体管道构件130和安全阀安装壁121a之间形成气体排出路径131,以及密封构件160, 气密地密封每个电池壳体121和气体管道构件130之间的间隙。