摘要:
The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.
摘要:
The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.
摘要:
The battery pack uses a restraining tool capable of secure restraint despite relatively low rigidity to achieve weight and cost reductions. The battery pack is formed of a plurality of parallel arranged battery modules (2), each consisting of a plurality of cells (5) electrically connected in series and coupled together in one piece with gaps (8) formed therebetween (5, 5), each cell being formed of elements for electromotive force encased in a prismatic case. The restraining tool includes connecting members (4) extending through the gaps (8) at both ends of the parallel arranged battery modules (2) and between two given cells (5, 5).
摘要:
The battery pack uses a restraining tool capable of secure restraint despite relatively low rigidity to achieve weight and cost reductions. The battery pack is formed of a plurality of parallel arranged battery modules (2), each consisting of a plurality of cells (5) electrically connected in series and coupled together in one piece with gaps (8) formed therebetween (5, 5), each cell being formed of elements for electromotive force encased in a prismatic case. The restraining tool includes connecting members (4) extending through the gaps (8) at both ends of the parallel arranged battery modules (2) and between two given cells (5, 5).
摘要:
A pressure sensor includes a detection unit 1 having capacities C1 and C2 varied by a predetermined external action, a reference detection 2 unvaried by the predetermined external action, a first oscillator 31 and 32 for generating a detection frequency signal according to the capacities C1 and C2 of the detection unit 1, a second oscillator 33 for producing a reference frequency signal according to the capacity of the reference unit 2, and measuring circuits 34, 35, 36 and 37 for measuring the number of the periods of the detection frequency signal within a predetermined period of the reference frequency signal to produce a measured signal. The sensor can minimize a detection error, and directly convert the change of capacity into a pulse signal (digital signal) without convertion into an analog, so that the circuit construction be simplified and realized at a reduced cost. The gas meter G includes a gas pressure introducing path 155 formed on a wall of a measuring chamber 154 within its meter body 150, and the pressure sensor S secured on a wall of the measuring chamber 154 through a sealing means the pressure receiving portion of which communicates with the gas pressure introducing path 155, whereby any specific gas introducing tube to introduce the gas into the pressure sensor S is not required and the problems of sealing at an insertion portion of the specific gas introducing tube toward the measuring chamber 156 are resolved.
摘要:
An inexpensive battery pack including a battery module wherein a safety valve is provided for each cell in which battery pack gas leakage can be prevented. A battery pack 100 has a plurality of battery modules 110 each including a plurality of cells 120 respectively provided with a safety valve 123. The plurality of cells 120 included in each battery module 110 are arranged such that safety-valve mounting walls 121a are oriented in the same direction. Each battery module 110 comprises a gas duct member 130 covering all the safety valves 123 of the cells 120 included therein and forming a gas discharge path 131 between the gas duct member 130 and the safety-valve mounting walls 121a, and a sealing member 160 for hermetically sealing the gaps between each cell case 121 and the gas duct member 130.
摘要:
A method for fabricating a semiconductor-mounting body having at least one semiconductor device mounted on a substrate and a sealing resin set in the gap between the substrate and the semiconductor device, has a first step of setting a flexibly deformable sheet on a face of the semiconductor device not facing the substrate; and a second step of generating an air-pressure difference between the side where the semiconductor device is not present and the side where the semiconductor device is present on the basis of the sheet so that the air pressure at the side where the semiconductor device is not present becomes higher than the side where the semiconductor device is present and pressurizing the semiconductor device by the sheet after the first step.
摘要:
A slide switch comprising a box-shaped housing base member, a switching contact mechanism housed within the base member, an electrically insulating flexible film member having an external configuration permitting it to be housed within the base member, a striker mounted on the film member, and a cover member mounted on the base member.