公开(公告)号：US06618154B2

公开(公告)日：2003-09-09

申请号：US09846331

申请日：2001-05-02

Applicant: Horst Engel ,  Hakon Mikkelsen ,  Lambert Danner ,  Matthias Slodowski ,  Kuno Backhaus ,  Joachim Wienecke

Inventor： Horst Engel ,  Hakon Mikkelsen ,  Lambert Danner ,  Matthias Slodowski ,  Kuno Backhaus ,  Joachim Wienecke

IPC: G01B902

CPC classification number: G01B11/0625

Abstract: The invention refers to an optical measurement arrangement, in particular for layer thickness measurement and for ascertaining optical material properties such as refractive index, extinction factor, etc. of a specimen (P), having an illumination device (1) for emitting a measurement light beam (6), a beam splitter (8) for dividing the measurement light beam (6) into a specimen light beam (10) and a reference light beam (9), a measurement objective for directing the specimen light beam (10) onto a measurement location (M) on the surface of the specimen (P) and for acquiring the light reflected from the measurement location (M), and an analysis device (11) into which the reference light beam (9) and the specimen light beam (10) reflected from the specimen (P) are coupled in order to obtain information about the specimen (P), in particular about layer thicknesses present thereon. Light-guiding devices (23, 25) having a plurality of light-guiding fibers are provided for coupling the specimen light beam (10) and the reference light beam (9) into the analysis device (11). The result is to create a compact optical measurement arrangement that can be flexibly set up and is insensitive to disturbance, which is suitable in particular for automatic monitoring of continuous production processes, in particular in semiconductor chip manufacture.

公开(公告)号：US3968282A

公开(公告)日：1976-07-06

申请号：US533240

申请日：1974-12-16

Applicant: Horst Engel

Inventor： Horst Engel

IPC: B21D22/10 ,  B21D26/02 ,  B21D26/029 ,  B30B5/02 ,  B32B3/00

CPC classification number: B21D26/029 ,  B21D22/12 ,  B30B5/02 ,  Y10T428/24479 ,  Y10T428/24777 ,  Y10T428/31826

Abstract: A pressure pad of rubber or rubber like synthetic material with a marginal rim portion connected to the remaining portion of the pad by a cross sectionally arc-shaped portion and adapted sealingly to engage a rigid holding element connectable to a press, said cross sectionally arc-shaped portion being provided with a slightly reduced wall section, e.g. in the form of a groove.

Abstract translation: 橡胶或橡胶的压力垫，如合成材料，其边缘边缘部分通过截面弧形部分连接到垫的剩余部分，并且适于密封地接合可连接到压力机的刚性保持元件，所述横截面弧形部分， 形状部分设置有略微缩小的壁部分，例如 以凹槽的形式。

公开(公告)号：US06826511B2

公开(公告)日：2004-11-30

申请号：US10360965

申请日：2003-02-07

Applicant: Hakon Mikkelsen ,  Horst Engel ,  Joachim Wienecke

Inventor： Hakon Mikkelsen ,  Horst Engel ,  Joachim Wienecke

IPC: G06F1500

CPC classification number: G01B11/0625

Abstract: A method and apparatus for determination of layer thicknesses and optical parameters of a number of layers of a specimen, in which the reflectance spectrum of the specimen is measured and then smoothed, and a modeled reflectance spectrum is adapted to the measured one by means of an optimization criterion so as thereby to determine the layer thickness. The optimization criterion is determined by the totality of the absolute values of the wavelength differences of all pairs of wavelengths, a pair of wavelengths being constituted by those wavelengths that respectively correspond to a selected extreme in the measured reflectance spectrum characterized by an index counting the extremes in ascending or descending order, and a selected extreme in the modeled reflectance spectrum having the same index.

Abstract translation: 一种用于确定试样的多个层的层厚度和光学参数的方法和装置，其中测量样品的反射光谱然后平滑，并且建模的反射光谱通过 优化标准，从而确定层厚度。 优化标准由所有波长对的波长差的绝对值的总和确定，一对波长由分别对应于所测量的反射光谱中选定的极端的那些波长构成，其特征在于计数极值 在升序或降序，以及具有相同指数的建模反射光谱中选定的极值。

公开(公告)号：US06600560B2

公开(公告)日：2003-07-29

申请号：US09845763

申请日：2001-05-02

Applicant: Hakon Mikkelsen ,  Horst Engel ,  Lambert Danner ,  Christof Stey

Inventor： Hakon Mikkelsen ,  Horst Engel ,  Lambert Danner ,  Christof Stey

IPC: G01J400

CPC classification number: G01B11/0641 ,  G01N21/211

Abstract: The invention concerns an optical measurement arrangement having an ellipsometer, in which an incident beam (16) of polarized light is directed at an angle of incidence &agr;≠0° onto a measurement location (M) on the surface of a specimen (P). Information concerning properties of the specimen (P), preferably concerning layer thicknesses and optical material properties such as refractive index n, extinction coefficient k, and the like, is obtained from an analysis of a return beam (17) reflected from the specimen (P). The incident beam (16) is directed by a mirror objective (15) onto the surface of the specimen (P). The return beam (17) is also captured by the mirror objective (15). The result is to create an optical measurement arrangement, operating on the ellipsometric principle, which has a simple, compact configuration and permits a high measurement accuracy down to the sub-nanometer range.