公开(公告)号：US07102871B2

公开(公告)日：2006-09-05

申请号：US10696133

申请日：2003-10-29

申请人： Cheng-Liang Chang ,  Ray Chuang ,  Jen Wei ,  Chian-Kuo Huang ,  Huan-Wen Lai ,  Ching-Sun Lee ,  Cheng-Yua Chuang ,  Chi-Ching Lo ,  Neo-Feng Chiou ,  Yen-Bo Huang

发明人： Cheng-Liang Chang ,  Ray Chuang ,  Jen Wei ,  Chian-Kuo Huang ,  Huan-Wen Lai ,  Ching-Sun Lee ,  Cheng-Yua Chuang ,  Chi-Ching Lo ,  Neo-Feng Chiou ,  Yen-Bo Huang

IPC分类号： H01T23/00

CPC分类号： C23C16/4586 ,  C23C16/4581 ,  H01L21/6831

摘要： A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.

摘要翻译： 一种用于从静电卡盘组件分离基座，陶瓷元件和基座的拆卸装置。 底座具有第一端面和第二端面。 陶瓷元件设置在第一端面上。 基座设置在陶瓷元件上。 拆卸装置包括主体和至少一个推动元件。 主体设置在第二端面上并具有通孔。 至少一个推动元件穿过通孔并推动陶瓷元件和基座，以将陶瓷元件和基座与基座的第一端面分开。

公开(公告)号：US09982340B2

公开(公告)日：2018-05-29

申请号：US13439127

申请日：2012-04-04

申请人： Chih-Tsung Lee ,  Hung Jui Chang ,  You-Hua Chou ,  Shiu-Ko Jangjian ,  Chung-En Kao ,  Ming-Chin Tsai ,  Huan-Wen Lai

发明人： Chih-Tsung Lee ,  Hung Jui Chang ,  You-Hua Chou ,  Shiu-Ko Jangjian ,  Chung-En Kao ,  Ming-Chin Tsai ,  Huan-Wen Lai

IPC分类号： C23C16/44 ,  C23C16/30 ,  C23C16/509 ,  H01J37/32

CPC分类号： C23C16/4412 ,  C23C16/308 ,  C23C16/5096 ,  H01J37/32091 ,  H01J37/3244

摘要： An apparatus comprises: a shower head having a supply plenum for supplying the gas to the chamber and a vacuum manifold fluidly coupled to the supply plenum; and at least one vacuum system fluidly coupled to the vacuum manifold of the shower head.

公开(公告)号：US20130267045A1

公开(公告)日：2013-10-10

申请号：US13439127

申请日：2012-04-04

申请人： Chih-Tsung LEE ,  Hung Jui CHANG ,  You-Hua CHOU ,  Shiu-Ko JANGJIAN ,  Chung-En KAO ,  Ming-Chin TSAI ,  Huan-Wen LAI

发明人： Chih-Tsung LEE ,  Hung Jui CHANG ,  You-Hua CHOU ,  Shiu-Ko JANGJIAN ,  Chung-En KAO ,  Ming-Chin TSAI ,  Huan-Wen LAI

IPC分类号： H01L21/66 ,  C23C16/50 ,  C23C16/455

CPC分类号： C23C16/4412 ,  C23C16/308 ,  C23C16/5096 ,  H01J37/32091 ,  H01J37/3244

摘要： An apparatus comprises: a shower head having a supply plenum for supplying the gas to the chamber and a vacuum manifold fluidly coupled to the supply plenum; and at least one vacuum system fluidly coupled to the vacuum manifold of the shower head.

摘要翻译： 一种装置包括：具有用于将气体供应到所述室的供应气室的喷淋头和与所述供应气室流体耦合的真空歧管; 以及至少一个与喷淋头的真空歧管流体耦合的真空系统。

公开(公告)号：US20050094349A1

公开(公告)日：2005-05-05

申请号：US10696133

申请日：2003-10-29

申请人： Cheng-Liang Chang ,  Ray Chuang ,  Jen Wei ,  Chian-Kuo Huang ,  Huan-Wen Lai ,  Ching-Sun Lee ,  Cheng-Yua Chuang ,  Chi-Ching Lo ,  Neo-Feng Chiou ,  Yen-Bo Huang

发明人： Cheng-Liang Chang ,  Ray Chuang ,  Jen Wei ,  Chian-Kuo Huang ,  Huan-Wen Lai ,  Ching-Sun Lee ,  Cheng-Yua Chuang ,  Chi-Ching Lo ,  Neo-Feng Chiou ,  Yen-Bo Huang

IPC分类号： C23C16/458 ,  H01L21/683 ,  H02H1/00

CPC分类号： C23C16/4586 ,  C23C16/4581 ,  H01L21/6831

摘要： A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.

摘要翻译： 一种用于从静电卡盘组件分离基座，陶瓷元件和基座的拆卸装置。 底座具有第一端面和第二端面。 陶瓷元件设置在第一端面上。 基座设置在陶瓷元件上。 拆卸装置包括主体和至少一个推动元件。 主体设置在第二端面上并具有通孔。 至少一个推动元件穿过通孔并推动陶瓷元件和基座，以将陶瓷元件和基座与基座的第一端面分开。