METHOD OF FABRICATING MICRO MECHANICAL MOVING MEMBER AND METAL INTERCONNECTS THEREOF
    4.
    发明申请
    METHOD OF FABRICATING MICRO MECHANICAL MOVING MEMBER AND METAL INTERCONNECTS THEREOF 审中-公开
    制造微机械移动构件及其金属互连的方法

    公开(公告)号:US20080188024A1

    公开(公告)日:2008-08-07

    申请号:US11735498

    申请日:2007-04-16

    CPC classification number: B81C1/00095

    Abstract: A method of fabricating micro mechanical moving member and metal interconnects thereof. A first metal interconnect pattern and a second metal interconnect pattern disposed thereon are formed on a substrate by plating processes. Subsequently, an inter-metal dielectric layer is formed on the substrate, the first metal interconnect pattern and the second metal interconnect pattern. The inter-metal dielectric layer is then planarized and the second metal interconnect pattern is exposed. After that, at least one micro mechanical moving member electrically connected to the second metal interconnect pattern is formed on the inter-metal dielectric layer by plating techniques.

    Abstract translation: 一种制造微机械移动构件及其金属互连的方法。 通过电镀工艺在衬底上形成设置在其上的第一金属互连图案和第二金属互连图案。 随后,在衬底,第一金属互连图案和第二金属互连图案上形成金属间介电层。 然后将金属间介电层平坦化,并暴露第二金属互连图案。 之后,通过电镀技术在金属间介电层上形成电连接到第二金属布线图形的至少一个微机械移动部件。

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