Lightwave Circuit and Method for Manufacturing Same
    1.
    发明申请
    Lightwave Circuit and Method for Manufacturing Same 有权
    光波回路及制造方法相同

    公开(公告)号:US20140023320A1

    公开(公告)日:2014-01-23

    申请号:US14007085

    申请日:2011-11-21

    IPC分类号: G02B6/26

    CPC分类号: G02B6/26 G02B6/125 G02B6/136

    摘要: Provided are a lightwave circuit and a method of manufacturing the same. The lightwave circuit includes a first substrate having an engraved core formation groove which is formed on an upper portion of the first substrate, a core layer which is formed inside the engraved core formation groove, a BPSG bonding layer which is formed on the first substrate including the core layer, and a second substrate which is formed on the BPSG bonding layer. Accordingly, light loss and branching uniformity of the lightwave circuit are effectively improved, and the lightwave circuit is manufactured simply and inexpensively while also further improving light loss and branching uniformity of the lightwave circuit.

    摘要翻译: 提供了一种光波电路及其制造方法。 光波电路包括:第一基板,其具有形成在第一基板的上部的雕刻芯形成槽,形成在雕刻芯形成槽内部的芯层;形成在第一基板上的BPSG接合层,包括 芯层和形成在BPSG结合层上的第二基板。 因此,有效地提高了光波电路的光损失和分支均匀性,并且简单且廉价地制造光波电路,同时还进一步提高了光波电路的光损失和分支均匀性。

    Method of fabricating thermooptic tunable wavelength filter
    2.
    发明授权
    Method of fabricating thermooptic tunable wavelength filter 有权
    制作热光可调谐波长滤光片的方法

    公开(公告)号:US06303040B1

    公开(公告)日:2001-10-16

    申请号:US09389459

    申请日:1999-09-03

    IPC分类号: B44C122

    摘要: A method of fabricating a thermooptic tunable wavelength filter of optical communication systems using WDM is provided, which includes the steps of forming a polymer optical waveguide on a semiconductor substrate using a polymer material, forming a polymer Bragg grating on the optical waveguide using O2 RIE and polymer spin coating, and forming a thermooptic tuning electrode over the polymer optical waveguide in which the Bragg grating is integrated. This provides the thermooptical tunable wavelength filter which has very narrow wavelength band width of transmission signal, low crosstalk with optical signals adjacent thereto, stable wavelength tuning characteristic using thermooptic effect and wide tuning ranges. Furthermore, the optical devices using the polymer optical waveguide can be fabricated with low cost. Thus, they have advantages in terms of economy and marketability.

    摘要翻译: 提供了一种制造使用WDM的光通信系统的光波可调波长滤波器的方法,其包括以下步骤:使用聚合物材料在半导体衬底上形成聚合物光波导,使用O 2 RIE在光波导上形成聚合物布拉格光栅; 聚合物旋涂,并在其上集成布拉格光栅的聚合物光波导上形成热光调谐电极。 这提供了光学可调波长滤波器,其具有非常窄的传输信号的波长带宽,与其相邻的光信号的低串扰,使用热光效应和宽调谐范围的稳定的波长调谐特性。 此外,可以以低成本制造使用聚合物光波导的光学装置。 因此,它们在经济和市场化方面具有优势。

    Lightwave circuit and method for manufacturing same
    3.
    发明授权
    Lightwave circuit and method for manufacturing same 有权
    光波电路及其制造方法

    公开(公告)号:US09031373B2

    公开(公告)日:2015-05-12

    申请号:US14007085

    申请日:2011-11-21

    CPC分类号: G02B6/26 G02B6/125 G02B6/136

    摘要: Provided are a lightwave circuit and a method of manufacturing the same. The lightwave circuit includes a first substrate having an engraved core formation groove which is formed on an upper portion of the first substrate, a core layer which is formed inside the engraved core formation groove, a BPSG bonding layer which is formed on the first substrate including the core layer, and a second substrate which is formed on the BPSG bonding layer. Accordingly, light loss and branching uniformity of the lightwave circuit are effectively improved, and the lightwave circuit is manufactured simply and inexpensively while also further improving light loss and branching uniformity of the lightwave circuit.

    摘要翻译: 提供了一种光波电路及其制造方法。 光波电路包括:第一基板,其具有形成在第一基板的上部的雕刻芯形成槽,形成在雕刻芯形成槽内部的芯层;形成在第一基板上的BPSG接合层,包括 芯层和形成在BPSG结合层上的第二基板。 因此,有效地提高了光波电路的光损失和分支均匀性,并且简单且廉价地制造光波电路,同时还进一步提高了光波电路的光损失和分支均匀性。

    Optical module and fabrication method of the same
    4.
    发明授权
    Optical module and fabrication method of the same 有权
    光模块及其制作方法相同

    公开(公告)号:US08025444B2

    公开(公告)日:2011-09-27

    申请号:US11816349

    申请日:2007-05-25

    IPC分类号: G02B6/36 G02B6/12

    摘要: Disclosed is an optical module comprising, an optical waveguide on the upper side of a substrate; a cutout with at least two slant surfaces, passing at least the core of the optical waveguide; and a film-filter above the cutout. Constructions of bi-directional multi-wavelength optical transmitter-receiver assembly using the optical module as a unit element are also provided in variety on a planar substrate. According to this invention, a bi-directional multi-wavelength transmitter-receiver, which is compact, reliable, excellent in the optical performance and simple in the alignments between the composing elements, can be produced.

    摘要翻译: 公开了一种光学模块,包括:在基板的上侧的光波导; 具有至少两个倾斜表面的切口,至少穿过光波导的芯; 以及在切口上方的薄膜过滤器。 使用光学模块作为单位元件的双向多波长光学发射机 - 接收机组件的构造也在平面基板上提供多种多样。 根据本发明,可以制造紧凑,可靠,光学性能优异并且组合元件之间的对准简单的双向多波长发射器 - 接收器。

    SEMICONDUCTOR DEVICE
    5.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20160293599A1

    公开(公告)日:2016-10-06

    申请号:US14995457

    申请日:2016-01-14

    摘要: A semiconductor device, including first and second fin patterns separated by a first trench; a gate electrode intersecting the first and second fin patterns; and a contact on at least one side of the gate electrode, the contact contacting the first fin pattern, the contact having a bottom surface that does not contact the second fin pattern, a height from a bottom of the first trench to a topmost end of the first fin pattern in a region in which the contact intersects the first fin pattern being a first height, and a height from the bottom of the first trench to a topmost end of the second fin pattern in a region in which an extension line of the contact extending along a direction in which the gate electrode extends intersects the second fin pattern being a second height, the first height being smaller than the second height.

    摘要翻译: 一种半导体器件,包括由第一沟槽分隔的第一和第二鳍状图案; 与第一和第二鳍状图案相交的栅电极; 以及在所述栅极电极的至少一侧上的触点,所述触点接触所述第一鳍状图案,所述触点具有不接触所述第二鳍状图案的底表面,从所述第一沟槽的底部到最顶端的高度 在第一鳍状物的第一鳍状物与第一鳍状物的第一高度相交的区域中的第一鳍状图案和从第一沟槽的底部到第二鳍状图案的最上端的高度, 沿着栅极延伸的方向延伸的接触部将第二翅片图案与第二高度相交,第一高度小于第二高度。

    Semiconductor Devices and Methods for Manufacturing the Same
    6.
    发明申请
    Semiconductor Devices and Methods for Manufacturing the Same 有权
    半导体器件及其制造方法

    公开(公告)号:US20160293546A1

    公开(公告)日:2016-10-06

    申请号:US15082820

    申请日:2016-03-28

    摘要: The inventive concepts relate to a semiconductor device including a field effect transistor and a method for manufacturing the same. The semiconductor device includes a substrate including first and second source/drain regions formed thereon, a gate electrode intersecting the substrate between the first and second source/drain regions, and an active contact electrically connecting the first and second source/drain regions to each other. The active contact is spaced apart from the gate electrode. The active contact includes first sub-contacts provided on the first and second source/drain regions so as to be connected to the first and second source/drain regions, respectively, a second sub-contact provided on the first sub-contacts to electrically connect the first sub-contacts to each other, and a barrier layer provided between the second sub-contact and each of the first sub-contacts.

    摘要翻译: 本发明构思涉及包括场效应晶体管的半导体器件及其制造方法。 半导体器件包括:衬底,其包括形成在其上的第一和第二源极/漏极区域;与第一和第二源极/漏极区域之间的衬底相交的栅电极;以及将第一和第二源极/漏极区域彼此电连接的有源触点 。 有源触点与栅电极间隔开。 有源触点包括设置在第一和第二源极/漏极区上的第一子触点,以便分别连接到第一和第二源极/漏极区域,第二子触点设置在第一子触点上以电连接 所述第一子接触彼此接触,以及设置在所述第二子接触件和每个所述第一子接触件之间的阻挡层。

    Method of manufacturing planar optical waveguides
    7.
    发明授权
    Method of manufacturing planar optical waveguides 失效
    制造平面光波导的方法

    公开(公告)号:US5800860A

    公开(公告)日:1998-09-01

    申请号:US496268

    申请日:1995-06-28

    摘要: A novel planar waveguide structure has been constructed by sintering substantially pure SiO.sub.2 layers in a He.sub.2 /BCl.sub.3 atmosphere. This results in the generation of a liquid phase of substantially lower viscosity than that of the deposited silica by itself. Since viscous sintering is enhanced by the presence of this liquid, consolidation occurs at lower temperature, e.g. 1000.degree.-1100.degree. C., than those used in the prior art, e.g. 1350.degree.-1500.degree. C. Much of the B.sub.2 O.sub.3 remains unreacted with the silica particles it helps to sinter, acting like a flux to bring about consolidation. This remaining B.sub.2 O.sub.3 is removed at the conclusion of the consolidation procedure by steam treatment at temperatures of 900.degree.-1100.degree. C. Some boron is incorporated into the silica layer, changing its CTE without substantially increasing its index. Thus, this method improves both structure and processing of planar waveguides by reducing the processing temperature and producing a glass which does not bow the substrate and essentially eliminates birefringence resulting in polarization dependent losses. This greatly benefits sophisticated circuits such as those intended for wavelength diversion multiplexing and allows narrow and precisely positional pass bands.

    摘要翻译: 通过在He2 / BCl3气氛中烧结基本上纯的SiO 2层来构造新颖的平面波导结构。 这导致产生比沉积二氧化硅自身明显低的粘度的液相。 由于这种液体的存在增强了粘性烧结,因此在较低温度下发生固结,例如, 1000°-1100℃,比现有技术中使用的那些。 1350°-1500℃。大部分B2O3仍然与二氧化硅颗粒未反应,有助于烧结,起到助焊剂的作用,从而形成固结。 在900°-1100℃的温度下,通过蒸汽处理,在固结程序结束时,除去剩余的B2O3。一些硼被掺入到二氧化硅层中,改变其CTE而基本上不增加其指数。 因此,该方法通过降低加工温度并产生不会对基板弯曲的玻璃并且基本上消除导致偏振相关损耗的双折射,从而改善了平面波导的结构和处理。 这对于诸如那些用于波长分流复用的复杂电路非常有益,并允许窄且精确的位置通带。

    Optical Module and Fabrication Method of the Same
    9.
    发明申请
    Optical Module and Fabrication Method of the Same 有权
    光模块及其制作方法

    公开(公告)号:US20100135619A1

    公开(公告)日:2010-06-03

    申请号:US11816349

    申请日:2007-05-25

    IPC分类号: G02B6/36 B29D11/00

    摘要: Disclosed is an optical module comprising, an optical waveguide on the upper side of a substrate; a cutout with at least two slant surfaces, passing at least the core of the optical waveguide; and a film-filter above the cutout. Constructions of bi-directional multi-wavelength optical transmitter-receiver assembly using the optical module as a unit element are also provided in variety on a planar substrate. According to this invention, a bi-directional multi-wavelength transmitter-receiver, which is compact, reliable, excellent in the optical performance and simple in the alignments between the composing elements, can be produced.

    摘要翻译: 公开了一种光学模块,包括:在基板的上侧的光波导; 具有至少两个倾斜表面的切口,至少穿过光波导的芯; 以及在切口上方的薄膜过滤器。 使用光学模块作为单位元件的双向多波长光学发射机 - 接收机组件的构造也在平面基板上提供多种多样。 根据本发明,可以制造紧凑,可靠,光学性能优异且组合元件之间的对准简单的双向多波长发射器 - 接收器。

    Optical switch for reducing processing errors in a coupling region
    10.
    发明授权
    Optical switch for reducing processing errors in a coupling region 失效
    用于减少耦合区域中处理误差的光开关

    公开(公告)号:US5828796A

    公开(公告)日:1998-10-27

    申请号:US747766

    申请日:1996-11-13

    摘要: An optical switch having reduced processing errors in a coupling region, according to the claimed invention includes an input portion having a pair of optical waveguides; an output portion having a pair of optical waveguides; a light phase shifting portion for inducing an additional phase change on light travelling in the input portion; a first light coupling waveguide for coupling between two light signals of the input portion and for providing a coupled signal with the light phase shifting portion; and a second light coupling waveguide for coupled between two light signals of the light phase shifting means and for providing a coupled signal with the output portion. The light coupling unit includes a waveguide. The switch reduces considerably any error that stems from manufacturing variations between waveguides in a coupling region since the waveguides share the error produced in a coupling region. The length of the switching element can be reduced since the coupled between waveguides is not indirect as in DC switches and BB switches. Due to the reduction in length, the output loss is reduced considerable.

    摘要翻译: 根据要求保护的发明,在耦合区域中具有减小的处理误差的光开关包括具有一对光波导的输入部分; 具有一对光波导的输出部; 光相移部分,用于在输入部分中行进的光线上引起附加的相位变化; 第一光耦合波导,用于耦合所述输入部分的两个光信号,并用于与所述光相移部分提供耦合信号; 以及第二光耦合波导,用于耦合在所述光相移装置的两个光信号之间,并用于与所述输出部分提供耦合信号。 光耦合单元包括波导。 由于波导共享在耦合区域中产生的误差,所以该开关显着地减少了由耦合区域中的波导之间的制造变化引起的任何误差。 开关元件的长度可以减小,因为在DC开关和BB开关中,波导之间的耦合不是间接的。 由于长度的减小,输出损耗相当可观。