公开(公告)号：US08815723B2

公开(公告)日：2014-08-26

申请号：US13335817

申请日：2011-12-22

申请人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

发明人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

IPC分类号： H01L21/22 ,  H01L27/146

CPC分类号： H01L31/1864 ,  H01L22/12 ,  H01L22/20 ,  H01L27/1463 ,  H01L27/1464 ,  H01L27/14643 ,  H01L27/14687 ,  H01L27/14689 ,  H01L27/14698

摘要： A method of forming an image sensor device includes forming a light sensing region at a front surface of a silicon substrate and a patterned metal layer there over. Thereafter, the method also includes performing an ion implantation process to the back surface of the silicon substrate and performing a green laser annealing process to the implanted back surface of the silicon substrate. The green laser annealing process uses an annealing temperature greater than or equal to about 1100° C. for a duration of about 100 to about 400 nsec. After performing the green laser annealing process, a silicon polishing process is performed on the back surface of the silicon substrate.

摘要翻译： 形成图像传感器装置的方法包括在硅衬底的前表面上形成感光区域，并在其上形成图案化的金属层。 此后，该方法还包括对硅衬底的背面执行离子注入工艺，并对硅衬底的注入后表面进行绿色激光退火处理。 绿色激光退火工艺使用大于或等于约1100℃的退火温度约100至约400纳秒的持续时间。 在进行绿色激光退火处理之后，在硅衬底的背面进行硅研磨处理。

公开(公告)号：US20130084660A1

公开(公告)日：2013-04-04

申请号：US13335817

申请日：2011-12-22

申请人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

发明人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

IPC分类号： H01L21/66 ,  H01L31/02

CPC分类号： H01L31/1864 ,  H01L22/12 ,  H01L22/20 ,  H01L27/1463 ,  H01L27/1464 ,  H01L27/14643 ,  H01L27/14687 ,  H01L27/14689 ,  H01L27/14698

摘要： A method of forming an image sensor device includes forming a light sensing region at a front surface of a silicon substrate and a patterned metal layer there over. Thereafter, the method also includes performing an ion implantation process to the back surface of the silicon substrate and performing a green laser annealing process to the implanted back surface of the silicon substrate. The green laser annealing process uses an annealing temperature greater than or equal to about 1100° C. for a duration of about 100 to about 400 nsec. After performing the green laser annealing process, a silicon polishing process is performed on the back surface of the silicon substrate.

摘要翻译： 形成图像传感器装置的方法包括在硅衬底的前表面上形成感光区域，并在其上形成图案化的金属层。 此后，该方法还包括对硅衬底的背面进行离子注入工艺，并对硅衬底的注入背面进行绿色激光退火处理。 绿色激光退火工艺使用大于或等于约1100℃的退火温度约100至约400纳秒的持续时间。 在进行绿色激光退火处理之后，在硅衬底的背面进行硅研磨处理。

公开(公告)号：US5173318A

公开(公告)日：1992-12-22

申请号：US707143

申请日：1991-05-30

申请人： Sheng-I Leu ,  I-Chang Lin ,  Ching-Yu Chen ,  Chen-Shun Chen

发明人： Sheng-I Leu ,  I-Chang Lin ,  Ching-Yu Chen ,  Chen-Shun Chen

IPC分类号： C12H1/12 ,  C12H1/16

CPC分类号： C12H1/12 ,  C12H1/16

摘要： A method for aging a fermented product includes the steps of: (a) cooling the fermented product in a container; (b) introducing ozone in the cooled fermented product for oxidation; and (c) applying an ultrasonic vibration to the container to vibrate and heat the fermented product in step (b) for oxidizing the fermented product. An aging device for a fermented product includes: an aging tank for containing the fermented product, the aging tank having an inlet and an outlet for the fermented product; an ozone supplying unit having an inlet pipe and an outlet pipe which are connected to the aging tank; a cooling unit mounted to the aging tank; an ultrasonic vibration unit mounted to the aging tank; and a thermometer mounted on the aging tank to detect the temperature of the fermented product. A method for preparing a distilled liquor includes the steps of (a') distilling a fermented precursor; (b') chilling the distilled fermented precursor; and (c') aging the chilled fermented precursor by the aging method described above.

摘要翻译： 一种老化发酵产品的方法包括以下步骤：（a）将容器中的发酵产物冷却; （b）在冷却的发酵产物中引入臭氧进行氧化; 和（c）在所述容器中施加超声波振动以振动并加热步骤（b）中的用于氧化发酵产品的发酵产品。 用于发酵产品的老化装置包括：用于容纳发酵产品的老化罐，老化罐具有用于发酵产品的入口和出口; 臭氧供给单元，其具有与老化罐连接的入口管和出口管; 安装在老化罐上的冷却单元; 安装在老化罐上的超声波振动装置; 和安装在老化罐上的温度计，以检测发酵产品的温度。 制备蒸馏液的方法包括以下步骤：（a'）蒸发发酵的前体; （b'）冷却蒸馏的发酵前体; 和（c'）通过上述老化方法使冷冻的发酵前体老化。

公开(公告)号：US20130082342A1

公开(公告)日：2013-04-04

申请号：US13249591

申请日：2011-09-30

申请人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

发明人： Shou Shu Lu ,  Hsun-Ying Huang ,  I-Chang Lin ,  Chia-Chi Hsiao ,  Yung-Cheng Chang

IPC分类号： H01L31/0232

CPC分类号： H01L27/14621 ,  H01L27/1463 ,  H01L27/1464 ,  H01L27/14687

摘要： The present disclosure provides an image sensor device and a method of forming the image sensor device. In an example, a method includes providing a substrate having a first surface and a second surface, the first surface being opposite the second surface; forming a light sensing region at the first surface of the substrate; forming a doped layer at the second surface of the substrate; and after forming the doped layer, polishing the second surface of the substrate.

摘要翻译： 本公开提供了一种图像传感器装置和形成图像传感器装置的方法。 在一个示例中，一种方法包括提供具有第一表面和第二表面的基底，第一表面与第二表面相对; 在所述基板的所述第一表面处形成光感测区域; 在所述衬底的第二表面处形成掺杂层; 并且在形成掺杂层之后，研磨衬底的第二表面。