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1.发明授权公开(公告)号：US06693278B2
公开(公告)日：2004-02-17
申请号：US10024762
申请日：2001-12-20
IPC分类号： G01N2300
CPC分类号： H01J37/28 , G01N23/20 , H01J2237/2817 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： In the production of semiconductors it is necessary to inspect circuit patterns on wafers. In circuits having very small details (for example, 40 nm), inspection can be carried out by means of electron beam columns, a plurality of wafers then being inspected at the same time and the signals being compared on-line. In an inspection apparatus in accordance with the invention more beam columns 1 to 7 are provided for every wafer A, B, C in order to obtain a high feed-through rate. The inspection is carried out by way of an x-y scan and the wafers are fed through according to a rectilinear movement, thus providing the possibility of scanning only the Care Area Fraction of the wafers, resulting in a high feed-through rate for the wafers in the inspection apparatus.
摘要翻译： 在半导体的生产中，必须检查晶圆上的电路图案。 在具有非常小的细节的电路（例如，40nm）中，可以通过电子束柱进行检查，然后同时检查多个晶片，并且在线比较信号。 在根据本发明的检查装置中，为了获得高的馈通速率，为每个晶片A，B，C提供了更多的光束列1至7。 检查通过xy扫描进行，并且晶片根据直线运动进给，从而提供仅扫描晶片的护理部分级别的可能性，导致晶片的高馈送速率 检查装置。
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2.发明授权Multi-beam lithography apparatus with mutually different beam limiting apertures 有权具有相互不同的光束限制孔径的多光束光刻设备公开(公告)号：US06593584B2
公开(公告)日：2003-07-15
申请号：US09745940
申请日：2000-12-22
IPC分类号： H01J37073
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/06 , H01J37/3177 , H01J2237/06316 , H01J2237/0635
摘要： Multi-beam lithography apparatus is used for writing patterns on a substrate 14 such as a wafer for ICs. The patterns may have details of various dimensions. In order to enhance the production rate, it is attractive to write fine details with a small spot 16 and large details with a large spot. It is known to vary the spot size by varying the emissive surface of the electron source. In accordance with the invention the spot size is varied by varying the size 22 of the beam limiting aperture 20, thus enabling optimization of the beam current in dependence on the spot size. A preferred embodiment is provided with an additional (condenser) lens 24 such that the object distance remains constant when the magnification of the lens system 18, 24 is varied.
摘要翻译： 多光束光刻设备用于在诸如用于IC的晶片的衬底14上书写图案。 图案可以具有各种尺寸的细节。 为了提高生产率，有吸引力的是用一个小点16和大的细节写大细节的细节。 已知通过改变电子源的发射表面来改变光斑尺寸。 根据本发明，通过改变光束限制孔径20的尺寸22来改变光点尺寸，从而能够根据光斑尺寸优化光束电流。 优选实施例设置有附加（聚光镜）透镜24，使得当透镜系统18,24的倍率变化时物体距离保持恒定。
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公开(公告)号：US09649470B2
公开(公告)日：2017-05-16
申请号：US13825022
申请日：2011-09-14
CPC分类号： A61M21/02 , A61M21/00 , A61M2021/0022 , A61M2021/0088 , A61M2205/10 , A61M2205/50 , A63B23/185
摘要： A breath pacing apparatus and a method for pacing a respiration of a person include a haptic output unit with a variable haptically perceivable feature. The haptic output unit is configured to change the haptically perceivable feature periodically according to a sequence of desired respiration cycles, where a characteristic of the change of the haptically perceivable feature is related to a length of the respiration cycles in the sequence of desired respiration cycles.
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公开(公告)号：US20160331305A1
公开(公告)日：2016-11-17
申请号：US15196479
申请日：2016-06-29
申请人： Jan Martijn KRANS , Bartel VAN DE SLUIS , Juergen VOGT , Ronaldus AARTS , Tim TIJS , Ype BRADA , Maarten VAN DEN BOOGAARD , Jan BENNIK , Roy RAYMANN , Petronella ZWARTKRUIS-PELGRIM , Jia DU
发明人： Jan Martijn KRANS , Bartel VAN DE SLUIS , Juergen VOGT , Ronaldus AARTS , Tim TIJS , Ype BRADA , Maarten VAN DEN BOOGAARD , Jan BENNIK , Roy RAYMANN , Petronella ZWARTKRUIS-PELGRIM , Jia DU
CPC分类号： A61B5/486 , A61B5/08 , A61B5/0816
摘要： To provide a breath pacing system and a corresponding method for pacing the respiratory activity of a subject that provide the possibility to adapt the output signal to the respiration characteristics of the subject automatically and effectively a breath pacing system (10) for pacing the respiratory activity of a subject and a respective method is proposed, comprising: an input unit (14) for generating or determining an input signal related to a respiration characteristic of a subject, a signal analyzing unit (16) provided to recognize a signal pattern within the input signal, and an output unit (12) for outputting output signals corresponding to a desired breathing sequence, wherein said output unit (12) is provided to be activated, upon a starting signal, to output a sequence of output signals comprising a signal pattern related to a previously recognized signal pattern.
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5.发明授权Breath pacing system and method for pacing the respiratory activity of a subject 有权呼吸起搏系统和起搏对象主体呼吸活动的方法公开(公告)号：US09392963B2
公开(公告)日：2016-07-19
申请号：US13884010
申请日：2011-11-15
申请人： Jan Martijn Krans , Bartel Van De Sluis , Juergen Vogt , Ronaldus Aarts , Tim Tijs , Ype Brada , Maarten Van Den Boogaard , Jan Bennik , Roy Raymann , Petronella Zwartkruis-Pelgrim , Jia Du
发明人： Jan Martijn Krans , Bartel Van De Sluis , Juergen Vogt , Ronaldus Aarts , Tim Tijs , Ype Brada , Maarten Van Den Boogaard , Jan Bennik , Roy Raymann , Petronella Zwartkruis-Pelgrim , Jia Du
CPC分类号： A61B5/486 , A61B5/08 , A61B5/0816
摘要： To provide a breath pacing system and a corresponding method for pacing the respiratory activity of a subject that provide the possibility to adapt the output signal to the respiration characteristics of the subject automatically and effectively a breath pacing system (10) for pacing the respiratory activity of a subject and a respective method is proposed, comprising: an input unit (14) for generating or determining an input signal related to a respiration characteristic of a subject, a signal analyzing unit (16) provided to recognize a signal pattern within the input signal, and an output unit (12) for outputting output signals corresponding to a desired breathing sequence, wherein said output unit (12) is provided to be activated, upon a starting signal, to output a sequence of output signals comprising a signal pattern related to a previously recognized signal pattern.
摘要翻译： 提供呼吸起搏系统和用于起搏对象的呼吸活动的相应方法，其提供将输出信号适应于受试者的呼吸特征的可能性，以自动和有效地调节呼吸起搏系统（10），用于起搏呼吸活动 提出了一种主题和各自的方法，包括：用于产生或确定与被摄体的呼吸特性相关的输入信号的输入单元（14），用于识别输入信号内的信号模式的信号分析单元（16） 以及输出单元（12），用于输出对应于期望呼吸序列的输出信号，其中所述输出单元（12）被设置为在启动信号时被激活以输出包括与 先前识别的信号模式。
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6.发明申请BREATH PACING SYSTEM AND METHOD FOR PACING THE RESPIRATORY ACTIVITY OF A SUBJECT 有权呼吸系统和方法，用于吸引主体的呼吸活动公开(公告)号：US20130231522A1
公开(公告)日：2013-09-05
申请号：US13884010
申请日：2011-11-15
申请人： Jan Martijn Krans , Bartel Van De Sluis , Juergen Vogt , Ronaldus Aarts , Tim Tijs , Ype Brada , Maarten Van Den Boogaard , Jan Bennik , Roy Raymann , Petronella Zwartkruis-Pelgrim , Jia Du
发明人： Jan Martijn Krans , Bartel Van De Sluis , Juergen Vogt , Ronaldus Aarts , Tim Tijs , Ype Brada , Maarten Van Den Boogaard , Jan Bennik , Roy Raymann , Petronella Zwartkruis-Pelgrim , Jia Du
IPC分类号： A61B5/08
CPC分类号： A61B5/486 , A61B5/08 , A61B5/0816
摘要： To provide a breath pacing system and a corresponding method for pacing the respiratory activity of a subject that provide the possibility to adapt the output signal to the respiration characteristics of the subject automatically and effectively a breath pacing system (10) for pacing the respiratory activity of a subject and a respective method is proposed, comprising: an input unit (14) for generating or determining an input signal related to a respiration characteristic of a subject, a signal analyzing unit (16) provided to recognize a signal pattern within the input signal, and an output unit (12) for outputting output signals corresponding to a desired breathing sequence, wherein said output unit (12) is provided to be activated, upon a starting signal, to output a sequence of output signals comprising a signal pattern related to a previously recognized signal pattern.
摘要翻译： 提供呼吸起搏系统和用于起搏对象的呼吸活动的相应方法，其提供将输出信号适应于受试者的呼吸特征的可能性，以自动和有效地调节呼吸起搏系统（10），用于起搏呼吸活动 提出了一种主题和各自的方法，包括：用于产生或确定与被摄体的呼吸特性相关的输入信号的输入单元（14），用于识别输入信号内的信号模式的信号分析单元（16） 以及输出单元（12），用于输出对应于期望呼吸序列的输出信号，其中所述输出单元（12）被设置为在启动信号时被激活以输出包括与 先前识别的信号模式。
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7.发明申请公开(公告)号：US20130190554A1
公开(公告)日：2013-07-25
申请号：US13825022
申请日：2011-09-14
IPC分类号： A61M21/02
CPC分类号： A61M21/02 , A61M21/00 , A61M2021/0022 , A61M2021/0088 , A61M2205/10 , A61M2205/50 , A63B23/185
摘要： The invention relates to a breath pacing apparatus, comprising a haptic output unit with a variable haptically perceivable feature, said haptic output unit being provided to change said haptically perceivable feature periodically according to a sequence of desired respiration cycles, wherein a characteristic of the change of said haptically perceivable feature is related to the length of the respiration cycles. The invention is further related to a corresponding method for pacing the respiration of a person.
摘要翻译： 本发明涉及一种呼吸起搏装置，其包括具有可变的可感知特征的触觉输出单元，所述触觉输出单元被提供以根据期望的呼吸循环的序列周期性地改变所述快速感知特征，其中， 所谓幽默可见的特征与呼吸周期的长度有关。 本发明还涉及用于起搏人的呼吸的相应方法。
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公开(公告)号：US06646261B2
公开(公告)日：2003-11-11
申请号：US10024777
申请日：2001-12-20
申请人： Jan Martijn Krans
发明人： Jan Martijn Krans
IPC分类号： H01J3728
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/2448 , H01J2237/2817
摘要： The invention relates to wafer inspection by means of a scanning electron microscope (SEM) column in which the secondary electron detector 22, 24 is positioned centrally above the objective lens of the column. Secondary electrons that leave the central part of the specimen in a direction substantially perpendicular to its surface are inevitably collected in the central part of the detector surface where the bore 36 for the primary beam 6 is situated. Consequently, such electrons do not contribute to the detector signal. In order to avoid such a detrimental loss of signal contribution, it is proposed to provide a central electrode 35 in the central bore 36 such that secondary electrons that approach the bore are driven aside towards the electron-sensitive detector region 48.
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