公开(公告)号：US11603313B2

公开(公告)日：2023-03-14

申请号：US17552869

申请日：2021-12-16

Applicant: Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

Inventor： Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

IPC: B01D53/00 ,  B01D53/04 ,  B01D53/14 ,  C01B23/00

Abstract: Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

公开(公告)号：US20190232212A1

公开(公告)日：2019-08-01

申请号：US16382335

申请日：2019-04-12

Applicant: Neel Rangnekar ,  Yang Luo ,  Jennifer Bugayong Luna

Inventor： Neel Rangnekar ,  Yang Luo ,  Jennifer Bugayong Luna

IPC: B01D53/047 ,  B01J20/20 ,  B01J20/12 ,  B01J20/16 ,  B01J20/28

CPC classification number: B01D53/047 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2253/11 ,  B01D2257/102 ,  B01D2257/502 ,  B01D2257/504 ,  B01D2257/7025 ,  B01J20/12 ,  B01J20/165 ,  B01J20/20 ,  B01J20/2803 ,  B01J20/28054

Abstract: The invention relates to the intensification of hydrogen PSA processes through utilization of specifically engineered core-shell composite adsorbents. Different embodiments of core-shell adsorbents can be used with either high or low heat capacity cores, and different adsorbent shells (e.g. activated carbon, zeolite, silica gel, alumina etc.) resulting in higher mass transfer rates and hence sharper mass transfer fronts during the PSA process. The location of the limiting impurity front determines the product purity. Therefore, with sharper impurity fronts, lower height of adsorbent bed is required, and cycle time can be proportionally reduced. Also, thermal swing during the PSA can be reduced by use of such adsorbents. The use of a high heat capacity core to reduce the thermal swing, leads to higher overall working capacity of the adsorbent bed.

公开(公告)号：US20220363540A1

公开(公告)日：2022-11-17

申请号：US17552869

申请日：2021-12-16

Applicant: Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

Inventor： Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

IPC: C01B23/00 ,  B01D53/00 ,  B01D53/14 ,  B01D53/04

Abstract: Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

公开(公告)号：US20230183068A1

公开(公告)日：2023-06-15

申请号：US18165513

申请日：2023-02-07

Applicant: Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

Inventor： Jennifer Bugayong Luna ,  Atul M. Athalye ,  Ce Ma ,  Ashwini K. Sinha

IPC: C01B23/00 ,  B01D53/00 ,  B01D53/04 ,  B01D53/14

CPC classification number: C01B23/0094 ,  B01D53/005 ,  B01D53/0462 ,  B01D53/1431 ,  B01D53/1456 ,  C01B23/0021 ,  C01B23/0057 ,  C01B23/0078 ,  C01B23/0089 ,  B01D2253/1122 ,  B01D2257/11 ,  B01D2257/2047 ,  B01D2257/2066 ,  B01D2257/502 ,  B01D2257/504 ,  B01D2257/80 ,  C01B2210/0004 ,  C01B2210/0021 ,  C01B2210/0025 ,  C01B2210/0035 ,  C01B2210/0037 ,  C01B2210/005 ,  C01B2210/0056 ,  C01B2210/0068 ,  C01B2210/0098

Abstract: Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

公开(公告)号：US11571651B2

公开(公告)日：2023-02-07

申请号：US16382335

申请日：2019-04-12

Applicant: Neel Rangnekar ,  Yang Luo ,  Jennifer Bugayong Luna

Inventor： Neel Rangnekar ,  Yang Luo ,  Jennifer Bugayong Luna

IPC: B01D53/04 ,  B01J20/20 ,  B01D53/047 ,  B01J20/12 ,  B01J20/16 ,  B01J20/28 ,  B01D53/02 ,  B01J20/32

Abstract: The invention relates to the intensification of hydrogen PSA processes through utilization of specifically engineered core-shell composite adsorbents. Different embodiments of core-shell adsorbents can be used with either high or low heat capacity cores, and different adsorbent shells (e.g. activated carbon, zeolite, silica gel, alumina etc.) resulting in higher mass transfer rates and hence sharper mass transfer fronts during the PSA process. The location of the limiting impurity front determines the product purity. Therefore, with sharper impurity fronts, lower height of adsorbent bed is required, and cycle time can be proportionally reduced. Also, thermal swing during the PSA can be reduced by use of such adsorbents. The use of a high heat capacity core to reduce the thermal swing, leads to higher overall working capacity of the adsorbent bed.