公开(公告)号：US08536964B2

公开(公告)日：2013-09-17

申请号：US13741609

申请日：2013-01-15

申请人： Raymond Goggin ,  Padraig Fitzgerald

发明人： Raymond Goggin ,  Padraig Fitzgerald

IPC分类号： H01H51/22

CPC分类号： H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

公开(公告)号：US08294539B2

公开(公告)日：2012-10-23

申请号：US12338767

申请日：2008-12-18

申请人： Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

发明人： Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

IPC分类号： H01H51/22

CPC分类号： H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US08194382B2

公开(公告)日：2012-06-05

申请号：US11962865

申请日：2007-12-21

申请人： Denis Ellis ,  Raymond Goggin

发明人： Denis Ellis ,  Raymond Goggin

IPC分类号： H01H47/26

CPC分类号： H01H59/0009 ,  H01H47/001

摘要： A method of driving a switch having a movable member and a contact first applies (to the switch) a first signal having a first level, and then applies a second signal having a second level to the switch (after applying the first signal). The first level is greater than the second level. One or both of the first and second signals cause the movable member to move to electrically connect with the contact.

摘要翻译： 驱动具有可移动部件和触点的开关的方法首先将具有第一电平的第一信号施加（至开关），然后向开关施加具有第二电平的第二信号（施加第一信号之后）。 第一级大于第二级。 第一和第二信号中的一个或两个使得可移动部件移动以与触头电连接。

公开(公告)号：US20110287586A1

公开(公告)日：2011-11-24

申请号：US13117608

申请日：2011-05-27

申请人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/50

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：US07968364B2

公开(公告)日：2011-06-28

申请号：US12544470

申请日：2009-08-20

申请人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/00

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：US20080157339A1

公开(公告)日：2008-07-03

申请号：US11960271

申请日：2007-12-19

申请人： Liam O Suilleabhain ,  Raymond Goggin ,  Eva Murphy ,  Kieran Harney

发明人： Liam O Suilleabhain ,  Raymond Goggin ,  Eva Murphy ,  Kieran Harney

IPC分类号： H01L23/02

CPC分类号： B81B7/007 ,  B81B2201/014 ,  B81B2207/015 ,  B81B2207/017 ,  B81C1/0023 ,  B81C2203/032 ,  H01H59/0009 ,  H01L2924/0002 ,  H01L2924/00

摘要： A MEMS apparatus has a MEMS device sandwiched between a base and a circuit chip. The movable member of the MEMS device is attached at the side up against the circuit chip. The movable member may be mounted on a substrate of the MEMS device or formed directly on a passivation layer on the circuit chip. The circuit chip provides control signals to the MEMS device through wire bonds, vias through the MEMS device or a conductive path such as solder balls external to the MEMS device.

摘要翻译： MEMS装置具有夹在基座和电路芯片之间的MEMS器件。 MEMS器件的可移动部件的一侧上靠在电路芯片上。 可移动部件可以安装在MEMS器件的基板上，或直接形成在电路芯片上的钝化层上。 电路芯片通过引线键合，通过MEMS器件的通孔或导电路径（例如MEMS器件外部的焊球）向MEMS器件提供控制信号。

公开(公告)号：US20130126317A1

公开(公告)日：2013-05-23

申请号：US13741609

申请日：2013-01-15

申请人： Raymond GOGGIN ,  Padraig FITZGERALD

发明人： Raymond GOGGIN ,  Padraig FITZGERALD

IPC分类号： H01H57/00

CPC分类号： H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US08368490B2

公开(公告)日：2013-02-05

申请号：US12755285

申请日：2010-04-06

申请人： Raymond Goggin ,  Padraig Fitzgerald

发明人： Raymond Goggin ,  Padraig Fitzgerald

IPC分类号： H01H51/22

CPC分类号： H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在接近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US20100155202A1

公开(公告)日：2010-06-24

申请号：US12338767

申请日：2008-12-18

申请人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

发明人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

IPC分类号： H01H59/00 ,  H01H11/00

CPC分类号： H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US08124436B2

公开(公告)日：2012-02-28

申请号：US13117608

申请日：2011-05-27

申请人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/00

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。