Exposure mask device and method for orienting a plurality of substrates on an exposure mask
    1.
    发明申请
    Exposure mask device and method for orienting a plurality of substrates on an exposure mask 有权
    曝光掩模装置和用于在曝光掩模上定向多个基板的方法

    公开(公告)号:US20050014073A1

    公开(公告)日:2005-01-20

    申请号:US10489528

    申请日:2002-08-28

    IPC分类号: G03F7/20 G03F9/00

    摘要: A method for registering a plurality of substrates that are retained on a workpiece carrier onto an exposure mask for carrying out a photolithography process has the steps of registering and immobilizing the exposure mask onto an alignment panel having precisely fitting passthrough orifices for reception of one substrate for each passthrough orifice and inserting into the passthrough orifices of the alignment panel the substrates that are retained on the workpiece carrier.

    摘要翻译: 用于将保留在工件载体上的多个基板登记到用于进行光刻工艺的曝光掩模上的方法具有将曝光掩模对准并将其固定在具有精确配合的通孔的对准面板上,用于接收一个基板 每个通孔孔口并将对准面板的通孔中的基板保持在工件载体上。

    Heat exchanger for cooling semi-conductor components
    2.
    发明授权
    Heat exchanger for cooling semi-conductor components 失效
    用于冷却半导体部件的热交换器

    公开(公告)号:US5950721A

    公开(公告)日:1999-09-14

    申请号:US915187

    申请日:1997-08-20

    摘要: Heat exchanger for cooling semi-conductor components or the like equipment features cooling fins that are spaced apart, attached to and project out from a base section of extruded aluminum or another light metal, each fin being secured in a groove or the like recess in the base section,The cooling fins are in the form of cooling-fin plates made of thin-gauge strips of material and, as viewed in longitudinal cross-section, are profiled at least in the region where they join the base section.

    摘要翻译: 用于冷却半导体部件或类似设备的热交换器具有间隔开的冷却翅片,附接到挤出的铝或另一种轻金属的基部并从其突出,每个翅片固定在凹槽或类似凹槽中的凹槽中 冷却翅片呈薄壁材料条制成的冷却翅片板,纵向横截面看,至少在连接基部的区域内形成。

    Process for making a matrix of thin layer transistors with memory
capacitors
    3.
    发明授权
    Process for making a matrix of thin layer transistors with memory capacitors 失效
    制造具有存储电容器的薄层晶体管矩阵的工艺

    公开(公告)号:US5462887A

    公开(公告)日:1995-10-31

    申请号:US343108

    申请日:1994-11-22

    申请人: Joachim Gluck

    发明人: Joachim Gluck

    摘要: The process for making a matrix of thin layer transistors with memory capacitors includes forming a first conductive layer on a substrate, and in a first mask step, etching it to form row conductors of the matrix, gate contacts of the thin layer transistors and ground electrodes of the memory capacitors; forming a gate-insulating layer for the thin layer transistors; forming a semiconductor layer, especially an a-Si:H semiconductor layer; applying a p- or n-doped semiconductor layer to provide drain and source contacts; forming and etching a second conductive layer for the column conductors of the matrix of the thin layer transistors, the drain and source contacts of the thin layer transistors and the counter electrodes of the memory capacitors in a second mask step; plasma etching of the doped semiconductor layer with the second conductor layer acting as mask and determining an end of the etching process by observing the optical emission of an etching plasma used for the plasma etching; etching the undoped semconductor layer in a third mask step; forming and etching a transparent conductive layer to form an screen element electrode and metallizing the column conductors of the matrix of thin layer transistors to provide conductive connection of their drain contacts with the counter electrodes of the memory capacitors in a fourth mask step; and forming a transparent passivating layer.

    摘要翻译: 制造具有存储电容器的薄层晶体管的矩阵的工艺包括在衬底上形成第一导电层,并且在第一掩模步骤中,蚀刻它以形成矩阵的行导体,薄层晶体管的栅极触点和接地电极 的存储电容器; 形成薄层晶体管的栅极绝缘层; 形成半导体层,特别是a-Si:H半导体层; 施加p或n掺杂半导体层以提供漏极和源极接触; 在第二掩模步骤中形成和蚀刻用于薄层晶体管的矩阵的列导体的第二导电层,薄层晶体管的漏极和源极触点和存储电容器的对电极; 掺杂半导体层的等离子体蚀刻,其中第二导体层用作掩模,并通过观察用于等离子体蚀刻的蚀刻等离子体的光发射来确定蚀刻工艺的结束; 在第三掩模步骤中蚀刻未掺杂的半导体层; 形成和蚀刻透明导电层以形成屏幕元件电极并且金属化薄层晶体管矩阵的列导体,以在第四掩模步骤中提供它们的漏极触点与存储电容器的对电极的导电连接; 并形成透明钝化层。

    Exposure mask device and method for orienting a plurality of substrates on an exposure mask
    4.
    发明授权
    Exposure mask device and method for orienting a plurality of substrates on an exposure mask 有权
    曝光掩模装置和用于在曝光掩模上定向多个基板的方法

    公开(公告)号:US07257890B2

    公开(公告)日:2007-08-21

    申请号:US10489528

    申请日:2002-08-28

    IPC分类号: G03F7/20 G03F9/00

    摘要: A method for registering a plurality of substrates that are retained on a workpiece carrier onto an exposure mask for carrying out a photolithography process has the steps of registering and immobilizing the exposure mask onto an alignment panel having precisely fitting passthrough orifices for reception of one substrate for each passthrough orifice and inserting into the passthrough orifices of the alignment panel the substrates that are retained on the workpiece carrier.

    摘要翻译: 用于将保留在工件载体上的多个基板登记到用于进行光刻工艺的曝光掩模上的方法具有将曝光掩模对准并将其固定在具有精确配合的通孔的对准面板上,用于接收一个基板 每个通孔孔口并将对准面板的通孔中的基板保持在工件载体上。

    Composite section having a supporting base of light-weight metal and at
least one metallically-joined, profiled strip and process for
manufacturing a composite section
    5.
    发明授权
    Composite section having a supporting base of light-weight metal and at least one metallically-joined, profiled strip and process for manufacturing a composite section 失效
    复合截面具有轻质金属的支撑基座和至少一个金属接合的型材带材和用于制造复合部分的方法

    公开(公告)号:US6012627A

    公开(公告)日:2000-01-11

    申请号:US71222

    申请日:1998-05-01

    CPC分类号: B21C23/24 B21C23/22

    摘要: A composite section features a base of light-weight metallic material as section component and at least one further profiled section component, in particular a profiled strip of another metallic material which is joined metallically as a surface layer to the base section during an extrusion process. Projecting out of the inner-lying face of the profiled strip and directed at the base is at least one projection and/or an additional element which are/is embedded in the base. Each additional element may delimit an undercut space which is filled in an interlocking manner by metallic material of the base.

    摘要翻译: 复合部分具有作为截面部件的轻质金属材料的基部和至少一个另外的成型部分部件,特别是另一种金属材料的成型条,其在挤压过程期间金属地连接到基部的表面层。 从成型条带的内表面伸出并且指向基部的至少一个投影和/或附加元件被嵌入在基座中。 每个附加元件可限定由底座的金属材料以互锁方式填充的底切空间。

    Composite section having a supporting base and at least one
metallically-joined, profile strip
    6.
    发明授权
    Composite section having a supporting base and at least one metallically-joined, profile strip 失效
    复合截面具有支撑底座和至少一个金属连接的型材条

    公开(公告)号:US5918712A

    公开(公告)日:1999-07-06

    申请号:US872025

    申请日:1997-06-10

    CPC分类号: B21C23/24 B21C23/22

    摘要: A composite section (10) features a base (12) of light-weight metallic material as section component and at least one further profiled section component, in particular a profiled strip (18) of another metallic material which is joined metallically as a surface layer to the base section during an extrusion process. Projecting out of the inner-lying face (21) of the profiled strip (18) and directed at the base (12) is at least one projection and/or an additional element (23) which are/is embedded in the base (12). Each additional element (23) may delimit an undercut space which is filled in an interlocking manner by metallic material of the base (12).

    摘要翻译: 复合部分(10)具有作为部分部件的轻质金属材料的基部(12)和至少一个另外的成型部分部件,特别是另一种金属材料的成型条带(18),金属材料的金属材料金属地连接成表面层 在挤出过程中到基部。 从型材条(18)的内表面(21)伸出并指向基部(12)的至少一个凸起和/或附加元件(23)被嵌入在基座(12)中 )。 每个附加元件(23)可限定由底座(12)的金属材料以互锁方式填充的底切空间。

    Method for manufacturing a thin-layer component, in particular a thin-layer, high-pressure sensor, and thin-layer component
    7.
    发明申请
    Method for manufacturing a thin-layer component, in particular a thin-layer, high-pressure sensor, and thin-layer component 审中-公开
    用于制造薄层部件,特别是薄层高压传感器和薄层部件的方法

    公开(公告)号:US20050275502A1

    公开(公告)日:2005-12-15

    申请号:US11147496

    申请日:2005-06-07

    IPC分类号: G01L9/04 G01L9/00 H01C10/10

    CPC分类号: G01L9/0054

    摘要: Proposed is a method for manufacturing a thin-layer component, in particular a thin-layer, high-pressure sensor, as well as a thin-layer component, where a resistive layer for forming measuring elements, in particular strain gauges, is deposited on an electrically non-conductive surface of a diaphragm layer, a contact-layer system for electrically contacting the measuring elements being deposited on the measuring elements in such a manner, that regions of the measuring elements are situated between each region of the contact-layer system and the diaphragm layer. This is used to provide, in particular, a high-pressure sensor, in which the capacitances of the contacts of the contact-layer system are designed to be symmetric.

    摘要翻译: 提出了制造薄层部件,特别是薄层高压传感器以及薄层部件的方法,其中用于形成测量元件的电阻层,特别是应变计沉积在 隔膜层的非导电表面,用于以这样一种方式使沉积在测量元件上的测量元件电接触的接触层系统,使测量元件的区域位于接触层系统的每个区域之间 和隔膜层。 这用于特别提供一种高压传感器,其中接触层系统的触点的电容被设计为对称的。

    Composite profiled section
    8.
    发明授权
    Composite profiled section 失效
    复合型材剖面

    公开(公告)号:US06935473B1

    公开(公告)日:2005-08-30

    申请号:US09786568

    申请日:1999-08-07

    申请人: Joachim Gluck

    发明人: Joachim Gluck

    IPC分类号: B60M1/30 B60M1/00

    CPC分类号: B60M1/302

    摘要: A composite profiled section consisting of a base profiled section (1) made of a good electro-conductive material and at least one surface layer that is joined to the base profiled section (1) and is made of a material, such as a metal anti-wear strip (19), with a high resistance to abrasion. At least one of the longitudinal edges of the anti-wear strip (19) should contain recesses (27), notches (77, 78) or compressions (82) that are at least partially filled with a connecting substance (59) or a connecting profile (11, 39, 66, 69, 74) for connection to the base profiled section (1) in a positive or non-positive fit.

    摘要翻译: 1.一种复合型材,其特征在于,包括由良好的导电材料制成的基座型材部分(1)和与所述基体型材部分(1)接合的至少一个表面层,并由诸如金属抗反射材料 (19),耐磨性高。 耐磨条(19)的纵向边缘中的至少一个应包含至少部分地填充有连接物质(59)或连接件(59)的凹部(27),凹口(77,78)或压缩件(82) (11,39,66,69,74),用于以正或非正配合连接到基础型材部分(1)。

    Composite section having a supporting base of light-weight metal and at
least one metallically-joined, profiled strip and process for
manufacturing a composite section
    9.
    发明授权
    Composite section having a supporting base of light-weight metal and at least one metallically-joined, profiled strip and process for manufacturing a composite section 失效
    复合截面具有轻质金属的支撑基座和至少一个金属接合的型材带材和用于制造复合部分的方法

    公开(公告)号:US5967271A

    公开(公告)日:1999-10-19

    申请号:US152538

    申请日:1998-09-18

    CPC分类号: B21C23/24 B21C23/22

    摘要: A composite section (10) features a base (12) of light-weight metallic material as section component and at least one further profiled section component, in particular a profiled strip (18) of another metallic material which is joined metallically as a surface layer to the base section during an extrusion process. Projecting out of the inner-lying face (21) of the profiled strip (18) and directed at the base (12) is at least one projection and/or an additional element (23) which are/is embedded in the base (12). Each additional element (23) may delimit an undercut space which is filled in an interlocking manner by metallic material of the base (12).

    摘要翻译: 复合部分(10)具有作为部分部件的轻质金属材料的基部(12)和至少一个另外的成型部分部件,特别是另一种金属材料的成型条带(18),金属材料的金属材料金属地连接成表面层 在挤出过程中到基部。 从型材条(18)的内表面(21)伸出并指向基部(12)的至少一个凸起和/或附加元件(23)被嵌入在基座(12)中 )。 每个附加元件(23)可限定由底座(12)的金属材料以互锁方式填充的底切空间。

    System comprising at least two conductor rails joined by an electrical
conductor
    10.
    发明授权
    System comprising at least two conductor rails joined by an electrical conductor 失效
    系统包括由电导体连接的至少两个导体轨道

    公开(公告)号:US5865282A

    公开(公告)日:1999-02-02

    申请号:US796018

    申请日:1997-02-05

    申请人: Joachim Gluck

    发明人: Joachim Gluck

    IPC分类号: B60M1/30 H02G5/00 B60M7/00

    CPC分类号: H02G5/002

    摘要: In a system comprising at least two conductor rails, in particular composite sections each featuring a rail-shaped load-bearing section and at least one strip-shaped section of another metal of greater wear resistance joined to the matrix of the load-bearing section, the ends of pairs of neighbouring rails are connected electrically by at least one conductor of variable length. The ends of the conductor rails are bent out of the central axis (M) of the conductor rail and led parallel to and a distance (n) displaced from that axis, such that the strip-shaped section of one conductor rail end is approximately aligned with the strip-shaped section of the other conductor rail away from the rail end; the conductor rail ends are joined in such a manner that they can move with respect to each other along the axial direction.

    摘要翻译: 在包括至少两个导体轨道的系统中,特别是复合部分,每个导体轨道具有轨道状承载部分和连接到承重部分的基体上的具有更大耐磨性的另一种金属的至少一个带状部分, 成对的相邻轨道的端部由至少一个可变长度的导体电连接。 导体轨道的端部弯曲离开导体轨道的中心轴线(M),并平行于该距离并从该轴线移动一定距离(n),使得一个导轨端部的带状部分大致对准 另一个导体导轨的带状部分远离轨道端; 导轨端部以这样的方式接合,使得它们可以沿轴向相对于彼此移动。