公开(公告)号：US20110268883A1

公开(公告)日：2011-11-03

申请号：US13064926

申请日：2011-04-26

申请人： Jason R. Haaheim ,  John Edward Bussan ,  Edward R. Solheim ,  John Moskal ,  Michael R. Nelson ,  Vadim Val-Khvalabov

发明人： Jason R. Haaheim ,  John Edward Bussan ,  Edward R. Solheim ,  John Moskal ,  Michael R. Nelson ,  Vadim Val-Khvalabov

IPC分类号： B05D5/00 ,  B05C13/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An apparatus for leveling an array of microscopic pens relative to a substrate surface or measuring a relative tilting therebetween includes an actuator configured to drive one of the array or the substrate to vary a distance therebetween, one or more force sensors configured to measure a force between the array and the surface, and a device configured calculate a force curve parameter of the force over the distance or time. The apparatus is configured to level the array relative to the surface by varying a relative tilting between the array and the substrate surface based on the force curve parameter or to measure the relative tilting based on the force curve parameter. Methods and software also are provided.

摘要翻译： 一种用于相对于衬底表面调平微阵列阵列或测量它们之间的相对倾斜的装置包括致动器，其构造成驱动阵列或衬底之一以改变其间的距离，一个或多个力传感器被配置成测量 阵列和表面，以及配置的装置计算力与力的距离或时间的参数。 该装置被配置为通过基于力曲线参数改变阵列和基板表面之间的相对倾斜度来相对于表面来平坦化阵列，或者基于力曲线参数来测量相对倾斜度。 还提供了方法和软件。

公开(公告)号：US20110268882A1

公开(公告)日：2011-11-03

申请号：US13064925

申请日：2011-04-26

申请人： John Edward Bussan ,  Jason R. Haaheim ,  John Moskal ,  Edward R. Solheim ,  Vadim Val-Khvalabov ,  Michael R. Nelson ,  Nabil A. Amro ,  Javad M. Vakil

发明人： John Edward Bussan ,  Jason R. Haaheim ,  John Moskal ,  Edward R. Solheim ,  Vadim Val-Khvalabov ,  Michael R. Nelson ,  Nabil A. Amro ,  Javad M. Vakil

IPC分类号： B05D5/00 ,  B05C13/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An apparatus for leveling an array of microscopic pens with respect to a substrate surface is provided. The apparatus includes an array of microscopic pens; a substrate having a substrate surface; a controllable arm comprising a spherical ball on an end thereof; a force sensor configured to measure a force exerted on the array or the substrate surface at each of the plurality of positions; one or more actuators configured to drive the array and/or the substrate to vary a relative distance and a relative tilting between the array and the substrate surface; and a controller configured to determine a planar offset of the array with respect to the substrate and initiate a leveling of the array with respect to the substrate based on the planar offset. Methods are also provided.

摘要翻译： 提供了一种用于使微阵列阵列相对于衬底表面调平的装置。 该装置包括一列微镜笔; 具有基板表面的基板; 一个可控臂，其一端包括一个球形球; 力传感器，其构造成测量在所述多个位置中的每一个处施加在所述阵列或所述基板表面上的力; 一个或多个致动器被配置为驱动阵列和/或基板以改变阵列和基板表面之间的相对距离和相对倾斜; 以及控制器，被配置为确定阵列相对于衬底的平面偏移，并基于平面偏移启动相对于衬底的阵列的调平。 还提供了方法。

公开(公告)号：US20100256824A1

公开(公告)日：2010-10-07

申请号：US12718753

申请日：2010-03-05

申请人： Vadim VAL-KHVALABOV ,  Javad M. Vakil ,  John E. Bussan ,  Jeffrey R. Rendlen ,  Michael R. Nelson ,  John Moskal

发明人： Vadim VAL-KHVALABOV ,  Javad M. Vakil ,  John E. Bussan ,  Jeffrey R. Rendlen ,  Michael R. Nelson ,  John Moskal

IPC分类号： G05D23/19 ,  G05D7/06

CPC分类号： F24F3/14 ,  F24F5/0042 ,  F24F11/30 ,  F24F2110/10 ,  F24F2110/20

摘要： Improved environmental control system for improved nanolithography, imaging, detecting, and fabricating. An article comprising: at least one environmental chamber; at least one conditioning chamber adapted to be in gaseous communication with the environmental chamber, wherein the conditioning chamber comprises at least one gas transport device such as a fan, optionally at least one temperature probe, and at least one heating-cooling device such as a thermoelectric device which in operation provides a cold side and a hot side, at least one water vapor source, and at least one temperature sensor, at least one humidity sensor, wherein the fan, the thermoelectric device, the water vapor source, the temperature sensor, and the humidity sensor are adapted for a temperature controlled and humidity controlled gaseous flow. Two fans can be used, wherein the fans can transport air in the same direction or in opposite directions.

摘要翻译： 改进的纳米光刻，成像，检测和制造的改进的环境控制系统。 一种制品，包括：至少一个环境室; 至少一个适于与所述环境室气态连通的调节室，其中所述调节室包括至少一个气体输送装置，例如风扇，可选地至少一个温度探头，以及至少一个加热冷却装置，例如 操作中的热电装置提供冷侧和热侧，至少一个水蒸气源和至少一个温度传感器，至少一个湿度传感器，其中风扇，热电装置，水蒸汽源，温度传感器 ，并且湿度传感器适用于温度控制和湿度控制的气流。 可以使用两个风扇，其中风扇可以沿相同方向或相反方向输送空气。