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公开(公告)号：US20110268883A1
公开(公告)日：2011-11-03
申请号：US13064926
申请日：2011-04-26
申请人： Jason R. Haaheim , John Edward Bussan , Edward R. Solheim , John Moskal , Michael R. Nelson , Vadim Val-Khvalabov
发明人： Jason R. Haaheim , John Edward Bussan , Edward R. Solheim , John Moskal , Michael R. Nelson , Vadim Val-Khvalabov
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An apparatus for leveling an array of microscopic pens relative to a substrate surface or measuring a relative tilting therebetween includes an actuator configured to drive one of the array or the substrate to vary a distance therebetween, one or more force sensors configured to measure a force between the array and the surface, and a device configured calculate a force curve parameter of the force over the distance or time. The apparatus is configured to level the array relative to the surface by varying a relative tilting between the array and the substrate surface based on the force curve parameter or to measure the relative tilting based on the force curve parameter. Methods and software also are provided.
摘要翻译： 一种用于相对于衬底表面调平微阵列阵列或测量它们之间的相对倾斜的装置包括致动器，其构造成驱动阵列或衬底之一以改变其间的距离，一个或多个力传感器被配置成测量 阵列和表面，以及配置的装置计算力与力的距离或时间的参数。 该装置被配置为通过基于力曲线参数改变阵列和基板表面之间的相对倾斜度来相对于表面来平坦化阵列，或者基于力曲线参数来测量相对倾斜度。 还提供了方法和软件。
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公开(公告)号：US20110268882A1
公开(公告)日：2011-11-03
申请号：US13064925
申请日：2011-04-26
申请人： John Edward Bussan , Jason R. Haaheim , John Moskal , Edward R. Solheim , Vadim Val-Khvalabov , Michael R. Nelson , Nabil A. Amro , Javad M. Vakil
发明人： John Edward Bussan , Jason R. Haaheim , John Moskal , Edward R. Solheim , Vadim Val-Khvalabov , Michael R. Nelson , Nabil A. Amro , Javad M. Vakil
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An apparatus for leveling an array of microscopic pens with respect to a substrate surface is provided. The apparatus includes an array of microscopic pens; a substrate having a substrate surface; a controllable arm comprising a spherical ball on an end thereof; a force sensor configured to measure a force exerted on the array or the substrate surface at each of the plurality of positions; one or more actuators configured to drive the array and/or the substrate to vary a relative distance and a relative tilting between the array and the substrate surface; and a controller configured to determine a planar offset of the array with respect to the substrate and initiate a leveling of the array with respect to the substrate based on the planar offset. Methods are also provided.
摘要翻译： 提供了一种用于使微阵列阵列相对于衬底表面调平的装置。 该装置包括一列微镜笔; 具有基板表面的基板; 一个可控臂，其一端包括一个球形球; 力传感器，其构造成测量在所述多个位置中的每一个处施加在所述阵列或所述基板表面上的力; 一个或多个致动器被配置为驱动阵列和/或基板以改变阵列和基板表面之间的相对距离和相对倾斜; 以及控制器，被配置为确定阵列相对于衬底的平面偏移，并基于平面偏移启动相对于衬底的阵列的调平。 还提供了方法。
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公开(公告)号：US08261662B1
公开(公告)日：2012-09-11
申请号：US11268740
申请日：2005-11-08
申请人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
发明人： Raymond Roger Shile , Terrisa Duenas , John Edward Bussan , Gregory J. Athas , Joseph S. Fragala , Jason R. Haaheim , Sylvain Cruchon-Dupeyrat , Jeffrey R. Rendlen
IPC分类号： H01L21/02
CPC分类号： G02B21/0008 , G02B21/002
摘要： Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that comprises low-temperature wafer bonding, such as (gold) thermocompressive bonding, eutectic or adhesive bonding. Also provided is a flexcircuit that electrically interconnects the actuated probes to external circuitry and mechanically couples them to the instrument actuator. An improved scanning probe lithography instrument, hardware and software, can be built around the actuated cantilevers and the flexcircuit. Finally, provided is an improved microfluidic circuit to deliver chemical compounds to the tips of (actuated) probes and a fabrication method for tall, high-aspect-ratio tips.
摘要翻译： 改进的适用于扫描探针光刻或显微镜的致动探针，特别是直写式纳米光刻及其制造方法。 在一个实施例中，通过包括低温晶片接合（例如（金））热压接合，共晶或粘合粘合的方法廉价地制造具有氧化物锐化的微型天线的热机械致动悬臂。 还提供了将致动的探针电连接到外部电路并将它们机械耦合到仪器致动器的挠性电路。 可以围绕致动的悬臂和柔性电路构建改进的扫描探针光刻仪器，硬件和软件。 最后，提供了一种改进的微流体电路，用于将化学化合物递送到（致动的）探针的尖端，以及用于高，高纵横比尖端的制造方法。
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公开(公告)号：US08261368B2
公开(公告)日：2012-09-04
申请号：US12465621
申请日：2009-05-13
申请人： John Edward Bussan , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
发明人： John Edward Bussan , Michael R. Nelson , Joseph S. Fragala , Albert K. Henning , Jeffrey R. Rendlen
摘要： Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.
摘要翻译： 提供用于进行纳米制造的装置，其提供小体积的反应空间和高反应多功能性。 装置可以包括适于对基底进行纳米尺寸改性的反应室和真空条件; 包围在反应室内的扫描探针头组件; 耦合到所述反应室的用于输送气体的第一端口; 耦合到所述反应室的第二端口，用于施加真空; 以及插入安装到反应室的基板组件。 反应室可以包括具有一个或多个柔性壁和一个或多个支撑物的主体，以防止反应室在真空下塌缩。 该装置还可以包括用于将扫描探针头组件的尖端耦合到反应室外部的电气部件的电导管。 还提供了结合装置的装置和使用装置和装置的方法。
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公开(公告)号：US08235302B2
公开(公告)日：2012-08-07
申请号：US11109877
申请日：2005-04-20
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US20090023607A1
公开(公告)日：2009-01-22
申请号：US12116908
申请日：2008-05-07
申请人： Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
发明人： Sergey V. Rozhok , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
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公开(公告)号：US20100294844A1
公开(公告)日：2010-11-25
申请号：US11109877
申请日：2005-04-20
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US20110195850A1
公开(公告)日：2011-08-11
申请号：US13088284
申请日：2011-04-15
申请人： Sergey V. ROZHOK , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
发明人： Sergey V. ROZHOK , Michael Nelson , Nabil A. Amro , Joseph S. Fragala , Raymond Roger Shile , John Edward Bussan , Dirk N. vanMerkestyn
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译： 一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。 适用于小规模制造和纳米光刻。 该仪器可以紧凑，并在实验台或台式机上使用。 一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底 通过多轴组件，至少一个观察组件，至少一个控制器。 通过压电方法和装置和电动机的定位是特别有用的。 该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。 观察组件可以是具有长工作距离的显微镜。 特别适用于制造生物芯片或微阵列。 多轴组件可以是五轴组件。 软件可以促进有效的使用。
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公开(公告)号：US20100297190A1
公开(公告)日：2010-11-25
申请号：US12536465
申请日：2009-08-05
申请人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
发明人： Cedric Loiret-Bernal , Linette Demers , Bjoern Rosner , Michael Nelson , Ray Eby , Joseph S. Fragala , Raymond Roger Shile , Hua Zhang , John Edward Bussan , Sylvain Cruchon-Dupeyrat
CPC分类号： B30B15/065 , B30B15/34 , G06K19/06028
摘要： Methods for providing pharmaceutical compositions and objects with identification regions and identification features which are difficult to detect. Microlithography, nanolithography, and stamping methods are used. The identification features can be positive protrusions or negative indentations with respect to the surface. The identification regions can comprise bar codes and holograms. DPN printing or other lithographies such as electron beam lithography, optical lithography, or nanoimprint lithography can be used to prepare stamps, which are then used to prepare the identification features. Redundant patterns can be formed. The invention is useful for counterfeit prevention. An apparatus for stamping the identification features is also described.
摘要翻译： 用于提供药物组合物和物体具有难以检测的识别区域和识别特征的方法。 使用微光刻，纳米光刻和冲压方法。 识别特征可以是相对于表面的正突起或负凹痕。 识别区域可以包括条形码和全息图。 可以使用DPN印刷或诸如电子束光刻，光刻或纳米压印光刻的其它平版印刷术来制备标记，然后将其用于制备识别特征。 可以形成冗余图案。 本发明可用于防伪。 还描述了用于冲压识别特征的装置。
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公开(公告)号：US6001005A
公开(公告)日：1999-12-14
申请号：US71442
申请日：1998-05-01
摘要： A polishing machine includes a platform assembly mounted within three support columns. The platform assembly includes fluidically pressurized bladders for urging the upper polish plate toward and away from the lower polish plate. In one embodiment a movable support column is suspended from an overlying frame. The support column is engaged with the upper polish plate so as to selectively raise and lower the platform assembly. In another embodiment, the platform is raised and lowered by threaded shafts so as to engage and thereby displace the upper polish plate.
摘要翻译： 抛光机包括安装在三个支撑柱内的平台组件。 平台组件包括用于将上部抛光板朝向和远离下部抛光板推动的流体加压的气囊。 在一个实施例中，可移动支撑柱从上覆框架悬挂。 支撑柱与上抛光板接合，以便选择性地升高和降低平台组件。 在另一个实施例中，平台通过螺纹轴升高和降低，从而接合并从而使上抛光板移位。
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