公开(公告)号：US4874497A

公开(公告)日：1989-10-17

申请号：US210511

申请日：1988-06-08

申请人： Morito Matsuoka ,  Ken'ichi Ono

发明人： Morito Matsuoka ,  Ken'ichi Ono

IPC分类号： H01L21/31 ,  C23C14/34 ,  C23C14/35 ,  H01J37/32 ,  H01L21/203 ,  H01L21/285 ,  H05H1/46

CPC分类号： H01J37/32623 ,  C23C14/352 ,  C23C14/357 ,  H01J37/32357 ,  H01J37/3266 ,  H01J37/32678

摘要： Plasma is generated by electron cyclotron resonance utilizing microwave energy and is confined within a plasma generation chamber by a mirror magnetic field, whereby high density plasma is obtained. Targets are disposed within the plasma generation chamber in the direction perpendicular to the magnetic flux and sputtered by the ions in the high density plasma, whereby a large amount of ions are sputtered and neutral particles produced. The ions and neutral particles are extracted in the direction perpendicular to the magnetic flux and deposited over the surface of a substrate so that it is possible to form a thin film at a high deposition rate without the bombardment of high-energy particles upon the substrate. Furthermore, the ions and neutral particles can be extracted through a slit-like opening formed through the cylindrical wall of the plasma generation chamber, so that a thin film is continuously formed on the surface of a tape-like substrate.

摘要翻译： PCT No.PCT / JP87 / 00759 Sec。 371日期：1988年6月8日 102（e）日期1988年6月8日PCT提交1987年10月8日PCT公布。 出版物WO88 / 02791 日期：1988年04月21日。通过使用微波能量的电子回旋共振产生波片，并通过镜面磁场限制在等离子体发生室内，由此获得高密度等离子体。 目标在垂直于磁通的方向设置在等离子体发生室内，并由高密度等离子体中的离子溅射，由此大量的离子被溅射并产生中性粒子。 离子和中性粒子在与磁通垂直的方向上被提取并沉积在基片的表面上，使得可以以高沉积速率形成薄膜而不会在基底上轰击高能粒子。 此外，离子和中性粒子可以通过通过等离子体产生室的圆筒壁形成的狭缝状开口被提取，从而在带状基底的表面上连续地形成薄膜。

公开(公告)号：US4672465A

公开(公告)日：1987-06-09

申请号：US753340

申请日：1985-07-09

申请人： Ken'ichi Ono

发明人： Ken'ichi Ono

IPC分类号： B41J2/355 ,  B41J13/26 ,  B41J21/00 ,  B41J29/38 ,  B41J29/50 ,  B65H3/00 ,  B65H7/02 ,  H04N1/23 ,  H04N1/29 ,  H04N1/21 ,  G03G15/00

CPC分类号： B65H3/00 ,  B41J13/26 ,  B65H7/02

摘要： In an image forming apparatus in which an image is formed on a paper sheet in accordance with image information, the feeding path to which paper sheets are supplied is provided with a shape detecting unit to detect the shape of the paper sheets. In accordance with the shape of the sheet detected by the detection unit, the heat transfer unit forms an image within the confines of the sheet.

摘要翻译： 在根据图像信息在纸张上形成图像的图像形成装置中，供给纸张的供给路径设置有检测纸张的形状的形状检测单元。 根据由检测单元检测到的片材的形状，传热单元在片材的范围内形成图像。

公开(公告)号：US4598300A

公开(公告)日：1986-07-01

申请号：US735434

申请日：1985-05-17

申请人： Ken'ichi Ono

发明人： Ken'ichi Ono

IPC分类号： B41J13/10 ,  B41J13/16 ,  G03G15/16 ,  G01D15/10

CPC分类号： G03G15/167 ,  B41J13/10 ,  B41J13/16

摘要： An improved image building apparatus for building color image on paper by transfering thereto a plurality of coloring agents on thermal transfer ribbon by means of a thermal head while reciprocably conveying paper by rotating a platen is disclosed. To assure that paper is firmly held on the surface of the platen the apparatus includes two groups of thrust rollers and a printing head actuating mechanism for displacing the printing head toward and away from the platen. Thus, reciprocably movable paper is brought in close contact with the surface of the platen at least at two points under the effect of thrust force given by the thrust rollers and the printing head without occurrence of dislocation of color transference and the area where no image is built at both the leading and tail ends of paper can be minimized. Further, to assure that paper is smoothly conveyed while it is wound partially about the platen the apparatus is provided with a pair of paper guide members at the position located in the proximity of the thrust rollers while a properly determined distance is maintained between the platen and the paper guide members. A pair of thermal transfer ribbon guide members are formed integral with the printing head so as to allow thermal transfer ribbon to extend therebetween in the stretched state.

摘要翻译： 公开了一种改进的图像构建装置，用于通过在热转印带上传送多个着色剂，通过热敏头在纸张上构建彩色图像，同时通过旋转压盘可往复传送纸张。 为了确保纸张牢固地保持在压板的表面上，该装置包括两组推力辊和用于将打印头朝向和远离压板移位的打印头致动机构。 因此，可往复移动的纸张至少在两个点处由推力辊和打印头给出的推力的作用下紧密接触，而不会发生颜色偏移的位错和没有图像的区域 在纸张的前端和尾端都可以最小化。 此外，为了确保纸张被部分地围绕压板卷绕而平滑地输送纸张，该装置在位于推力辊附近的位置处设置有一对纸引导构件，同时在压板和压板之间保持适当确定的距离 导纸件。 一对热转印带引导构件与打印头一体地形成，以便在拉伸状态下允许热转印带在它们之间延伸。

公开(公告)号：US4941915A

公开(公告)日：1990-07-17

申请号：US307342

申请日：1989-02-07

申请人： Morito Matsuoka ,  Ken'ichi Ono

发明人： Morito Matsuoka ,  Ken'ichi Ono

IPC分类号： C23C14/32 ,  C23C14/35 ,  H01J37/08

CPC分类号： C23C14/352 ,  C23C14/32 ,  H01J37/08

摘要： A thin film forming apparatus comprising a plasma generating chamber into which is introduced a gas to generate plasma; a first target and a second target which are made of a material to be sputtered and are disposed in the vicinity of both end portions of interior of the plasma generating chamber, respectively, at least one of the first and second targets having the form of a cylinder; at least one power supply for applying a negative potential to the first and second targets; an electromagnet adapted to establish the magnetic field within the plasma generating chamber and inducing the magnetic flux leaving one of the first and second targets and entering the other; and a specimen chamber which incorporates therein a substrate holder and is communicated to one end of the plasma generating chamber on the side of the cylindrical target. High density plasma generated in the plasma generating chamber sputters the targets so that sputtered substances which constituted the targets are deposited over the surface of a substrate, thereby forming a thin film.