END POINT DETECTION ELECTRODE SYSTEM AND ETCH STATION
    1.
    发明申请
    END POINT DETECTION ELECTRODE SYSTEM AND ETCH STATION 审中-公开
    端点检测电极系统和蚀刻站

    公开(公告)号:US20080289764A1

    公开(公告)日:2008-11-27

    申请号:US11753650

    申请日:2007-05-25

    IPC分类号: C23F1/00

    CPC分类号: H01L21/67253 H01L21/67086

    摘要: An end point detection electrode system and an etch station including the electrode system are disclosed. In one embodiment, the electrode system includes: an insulative mount; a first Mu-metal electrode coupled to the insulative mount; and a second Mu-metal electrode coupled to the insulative mount, the second electrode surrounding the first electrode.

    摘要翻译: 公开了一种端点检测电极系统和包括该电极系统的蚀刻站。 在一个实施例中,电极系统包括:绝缘安装座; 耦合到绝缘支架的第一个Mu金属电极; 以及耦合到所述绝缘安装件的第二Mu-metal电极,所述第二电极围绕所述第一电极。

    Vertical paddle plating cell
    3.
    发明授权
    Vertical paddle plating cell 失效
    垂直板式电镀槽

    公开(公告)号:US5516412A

    公开(公告)日:1996-05-14

    申请号:US441853

    申请日:1995-05-16

    摘要: An electroplating cell includes a floor, ceiling, front wall, and back wall forming a box having first and second opposite open ends. A rack for supporting an article to be electroplated is removably positioned vertically to close the first open end and includes a thief laterally surrounding the article to define a cathode. An anode is positioned vertically to close the second open end, with the assembly defining a substantially closed, six-sided inner chamber for receiving an electrolyte therein for electroplating the article. The article and surrounding thief are coextensively aligned with the anode, with the floor, ceiling, front and back walls being effective for guiding electrical current flux between the cathode and the anode. In a preferred embodiment, the cell is disposed as an inner cell inside an outer cell substantially filled with the electrolyte, and a paddle is disposed inside the inner cell for agitating the electrolyte therein. The rack is removable and installable vertically upwardly which allows for automated handling thereof.

    摘要翻译: 电镀电池包括形成具有第一和第二相对开口端的盒子的地板,天花板,前壁和后壁。 用于支撑待电镀的物品的支架可移除地垂直地定位以闭合第一开口端,并且包括围绕物品的小偷以限定阴极。 阳极被垂直定位以闭合第二开口端,其中组件限定了基本封闭的六面内腔,用于在其中容纳用于电镀物品的电解质。 物品和周围的小偷与阳极共同对准,地板,天花板,前壁和后壁对于引导阴极和阳极之间的电流通量是有效的。 在一个优选的实施方式中,将电池作为内部电池设置在基本上充满电解质的外部电池中,并且在内部电池内设置有用于搅拌电解质的电极。 机架是可拆卸的,可垂直向上安装,允许其自动处理。

    Electroplating workpiece fixture
    4.
    发明授权
    Electroplating workpiece fixture 失效
    电镀工件夹具

    公开(公告)号:US5522975A

    公开(公告)日:1996-06-04

    申请号:US441852

    申请日:1995-05-16

    IPC分类号: C25D17/06

    CPC分类号: C25D17/06

    摘要: A fixture for supporting a workpiece in a processing cell includes a frame and cooperating workpiece holder. The frame includes a head having a hole therein which receives an integral plateau of the holder. The holder plateau includes an annular seal adjacent a perimeter thereof with a vacuum port disposed therein. The workpiece rests on the seal so that vacuum drawn in the vacuum port fixedly holds the workpiece against the plateau. Assembly of the holder plateau and workpiece thereon through the frame-head hole positions the workpiece coplanar with a front side of the frame. In exemplary embodiments, independent electrical current paths are provided to the workpiece and a surrounding auxiliary electrode.

    摘要翻译: 用于在处理室中支撑工件的夹具包括框架和配合的工件保持器。 框架包括其中具有孔的头部,其接收保持器的整体平台。 保持架平台包括邻近其周边的环形密封件,其中布置有真空口。 工件放在密封件上,使真空吸入的真空固定地保持工件抵抗平台。 通过框架头孔将支架平台和其上的工件组装在一起,使工件与框架的前侧共面。 在示例性实施例中,独立的电流路径被提供给工件和周围的辅助电极。