公开(公告)号：US20230282466A1

公开(公告)日：2023-09-07

申请号：US17687673

申请日：2022-03-06

申请人： LI QIN ZHOU

发明人： LI QIN ZHOU

IPC分类号： H01J37/34 ,  C23C14/34 ,  C23C14/35

CPC分类号： H01J37/3405 ,  H01J37/3441 ,  C23C14/3442 ,  H01J37/3461 ,  H01J37/3452 ,  C23C14/351 ,  H01J2237/332

摘要： A sputtering magnetron apparatus is provided. Another aspect employs a set of magnet assembly that forms a magnetic field over the target surface to confine electrons. A further aspect of a sputtering magnetron includes a side dark space shield that is made of magnetic metal which shunts the magnetic flux leaking from the side to prevent the formation of a secondary plasma around the dark space shield when it operates simultaneously with another plasma source.

公开(公告)号：US09847470B2

公开(公告)日：2017-12-19

申请号：US13548395

申请日：2012-07-13

申请人： Michael Paul Rowe ,  Li Qin Zhou ,  Minjuan Zhang ,  Debasish Banerjee

发明人： Michael Paul Rowe ,  Li Qin Zhou ,  Minjuan Zhang ,  Debasish Banerjee

IPC分类号： H01L35/26 ,  H01L35/16 ,  H01L35/18 ,  B82Y30/00

CPC分类号： H01L35/26 ,  B82Y30/00 ,  H01L35/16 ,  H01L35/18 ,  Y10S977/779 ,  Y10S977/833

摘要： A thermoelectric material is provided. The material can be a grain boundary modified nanocomposite that has a plurality of bismuth antimony telluride matrix grains and a plurality of zinc oxide nanoparticles within the plurality of bismuth antimony telluride matrix grains. In addition, the material has zinc antimony modified grain boundaries between the plurality of bismuth antimony telluride matrix grains.

公开(公告)号：US20160056362A9

公开(公告)日：2016-02-25

申请号：US13548395

申请日：2012-07-13

申请人： Michael Paul Rowe ,  Li Qin Zhou ,  Minjuan Zhang ,  Debasish Banerjee

发明人： Michael Paul Rowe ,  Li Qin Zhou ,  Minjuan Zhang ,  Debasish Banerjee

IPC分类号： H01L35/26 ,  H01L35/16 ,  H01L35/18 ,  B82Y30/00

CPC分类号： H01L35/26 ,  B82Y30/00 ,  H01L35/16 ,  H01L35/18 ,  Y10S977/779 ,  Y10S977/833

摘要： A thermoelectric material is provided. The material can be a grain boundary modified nanocomposite that has a plurality of bismuth antimony telluride matrix grains and a plurality of zinc oxide nanoparticles within the plurality of bismuth antimony telluride matrix grains. In addition, the material has zinc antimony modified grain boundaries between the plurality of bismuth antimony telluride matrix grains.

摘要翻译： 提供热电材料。 该材料可以是在多个铋碲化铋基体晶粒内具有多个铋碲化锑基体晶粒和多个氧化锌纳米粒子的晶界改性纳米复合材料。 此外，该材料在多个铋锑碲化物基质颗粒之间具有锌锑改性的晶界。

公开(公告)号：US20130140505A1

公开(公告)日：2013-06-06

申请号：US13309321

申请日：2011-12-01

申请人： Michael P. ROWE ,  Li Qin ZHOU

发明人： Michael P. ROWE ,  Li Qin ZHOU

IPC分类号： H01B1/00 ,  C04B35/01 ,  H01B1/06 ,  B82Y30/00

CPC分类号： B82Y30/00 ,  C04B35/547 ,  C04B2235/3284 ,  C04B2235/441 ,  C04B2235/444 ,  C04B2235/449 ,  C04B2235/80 ,  H01L35/16

摘要： A thermoelectric material that comprises a binary main group matrix material and nano-particles and/or nano-inclusions of metal oxide dispersed therein, and has electrical properties of ternary doped materials. A process for making the thermoelectric material that includes reacting a reduced metal precursor with an oxidized metal precursor in the presence of nanoparticles.

摘要翻译： 包含二元主体基体材料和分散在其中的金属氧化物的纳米颗粒和/或纳米夹杂物的热电材料，并且具有三元掺杂材料的电学性质。 一种用于制造所述热电材料的方法，包括在纳米颗粒存在下使还原的金属前体与氧化的金属前体反应。

公开(公告)号：US08834736B2

公开(公告)日：2014-09-16

申请号：US13309294

申请日：2011-12-01

申请人： Michael Paul Rowe ,  Li Qin Zhou

发明人： Michael Paul Rowe ,  Li Qin Zhou

IPC分类号： H01L35/16

CPC分类号： C01B19/007 ,  B82Y30/00 ,  C01P2002/72 ,  C01P2006/40 ,  C04B35/547 ,  C04B35/645 ,  C04B2235/3284 ,  C04B2235/3298 ,  C04B2235/449 ,  H01L35/16 ,  H01L35/32

摘要： A thermoelectric material that comprises a ternary main group matrix material and nano-particles and/or nano-inclusions of a Group 2 or Group 12 metal oxide dispersed therein. A process for making the thermoelectric material that includes reacting a reduced metal precursor with an oxidized metal precursor in the presence of nanoparticles.

公开(公告)号：US08419980B2

公开(公告)日：2013-04-16

申请号：US13094479

申请日：2011-04-26

申请人： Michael Paul Rowe ,  Li Qin Zhou

发明人： Michael Paul Rowe ,  Li Qin Zhou

IPC分类号： H01B1/02

CPC分类号： H01L35/18 ,  B82Y30/00 ,  C04B35/547 ,  C04B2235/3205 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3284 ,  C04B2235/3294 ,  C04B2235/3298 ,  C04B2235/449 ,  C04B2235/528 ,  C04B2235/5296 ,  C04B2235/5445 ,  C04B2235/5454

摘要： A thermoelectric material that comprises a ternary main group matrix material and nano-particles and/or nano-inclusions of a Group 2 or Group 12 metal oxide dispersed therein. A process for making the thermoelectric material that includes reacting a reduced metal precursor with an oxidized metal precursor in the presence of nanoparticles.

摘要翻译： 包含分散在其中的第2族或第12族金属氧化物的三元主体基质材料和纳米颗粒和/或纳米夹杂物的热电材料。 一种用于制造所述热电材料的方法，包括在纳米颗粒存在下使还原的金属前体与氧化的金属前体反应。

公开(公告)号：US20120138873A1

公开(公告)日：2012-06-07

申请号：US12961815

申请日：2010-12-07

申请人： Li Qin Zhou ,  Michael Paul Rowe

发明人： Li Qin Zhou ,  Michael Paul Rowe

IPC分类号： H01B1/08

CPC分类号： C04B35/453 ,  C04B35/547 ,  C04B35/6262 ,  C04B35/645 ,  C04B2235/3284 ,  C04B2235/3294 ,  C04B2235/3298 ,  C04B2235/446 ,  C04B2235/77 ,  H01L35/16 ,  H01L35/22

摘要： A process for densifying a composite material is provided. In some instances, the process can reduce stress in a sintered component such that improved densification and/or properties of the component is provided. The process includes providing a mixture of a first material particles and second material particles, pre-sintering the mixture at a first pressure and a first temperature in order to form a pre-sintered component, and then crushing, grinding, and sieving the pre-sintered component in order to form or obtain a generally uniform composite powder. The uniform composite powder is then sintered at a second pressure and a second temperature to form a sintered component, the second pressure being greater than the second pressure.

摘要翻译： 提供了一种致密化复合材料的方法。 在一些情况下，该方法可以减少烧结组分中的应力，从而提供组分的改进的致密化和/或性质。 该方法包括提供第一材料颗粒和第二材料颗粒的混合物，在第一压力和第一温度下预烧结混合物以形成预烧结组分，然后粉碎，研磨和筛分预烧结组分， 烧结组分以形成或获得大致均匀的复合粉末。 然后将均匀的复合粉末在第二压力和第二温度下烧结以形成烧结组分，第二压力大于第二压力。

公开(公告)号：US09028725B2

公开(公告)日：2015-05-12

申请号：US12961815

申请日：2010-12-07

申请人： Li Qin Zhou ,  Michael Paul Rowe

发明人： Li Qin Zhou ,  Michael Paul Rowe

IPC分类号： C04B35/453 ,  H01L35/16 ,  H01L35/22 ,  C04B35/547 ,  C04B35/626 ,  C04B35/645

CPC分类号： C04B35/453 ,  C04B35/547 ,  C04B35/6262 ,  C04B35/645 ,  C04B2235/3284 ,  C04B2235/3294 ,  C04B2235/3298 ,  C04B2235/446 ,  C04B2235/77 ,  H01L35/16 ,  H01L35/22

摘要： A process for densifying a composite material is provided. In some instances, the process can reduce stress in a sintered component such that improved densification and/or properties of the component is provided. The process includes providing a mixture of a first material particles and second material particles, pre-sintering the mixture at a first pressure and a first temperature in order to form a pre-sintered component, and then crushing, grinding, and sieving the pre-sintered component in order to form or obtain a generally uniform composite powder. The uniform composite powder is then sintered at a second pressure and a second temperature to form a sintered component, the second pressure being greater than the second pressure.

摘要翻译： 提供了一种致密化复合材料的方法。 在一些情况下，该方法可以减少烧结组分中的应力，从而提供组分的改进的致密化和/或性质。 该方法包括提供第一材料颗粒和第二材料颗粒的混合物，在第一压力和第一温度下预烧结混合物以形成预烧结组分，然后粉碎，研磨和筛分预烧结组分， 烧结组分以形成或获得大致均匀的复合粉末。 然后将均匀的复合粉末在第二压力和第二温度下烧结以形成烧结组分，第二压力大于第二压力。

公开(公告)号：US20130140504A1

公开(公告)日：2013-06-06

申请号：US13309294

申请日：2011-12-01

申请人： Michael Paul Rowe ,  Li Qin Zhou

发明人： Michael Paul Rowe ,  Li Qin Zhou

IPC分类号： H01B1/02 ,  H01B1/08 ,  B82Y99/00 ,  B82B3/00

CPC分类号： C01B19/007 ,  B82Y30/00 ,  C01P2002/72 ,  C01P2006/40 ,  C04B35/547 ,  C04B35/645 ,  C04B2235/3284 ,  C04B2235/3298 ,  C04B2235/449 ,  H01L35/16 ,  H01L35/32

摘要： A thermoelectric material that comprises a ternary main group matrix material and nano-particles and/or nano-inclusions of a Group 2 or Group 12 metal oxide dispersed therein. A process for making the thermoelectric material that includes reacting a reduced metal precursor with an oxidized metal precursor in the presence of nanoparticles.

公开(公告)号：US06740212B2

公开(公告)日：2004-05-25

申请号：US10273083

申请日：2002-10-18

申请人： Qi Hua Fan ,  Li Qin Zhou

发明人： Qi Hua Fan ,  Li Qin Zhou

IPC分类号： C23C1435

CPC分类号： H01J37/3497 ,  C23C14/3407

摘要： The present invention discloses a novel rectangular sputtering magnetron cathode that significantly improves target utilization and sputtering efficiency. Different from conventional magnatron design that considers only magnetic field distribution and is, therefore, qualitive or empirical, the present magnetron cathode is developed through computer-aided simulation of plasma discharge. The magnetic and electric fields are optimized in a combined manner by quantitatively simulating electron trajectories, electron/Ar collisions, space charge distribution, and target erosion profile. Sputtering tests with Cu target show a target utilization of 55%˜65%, much higher than conventional target utilization which is about 40%. Meanwhile, high sputtering efficiency is achieved by maintaining a relatively strong magnetic field over the surface of the target, which can be thicker than 12 mm, as a result of effective confinement of high-energy electrons.

摘要翻译： 本发明公开了一种显着提高目标利用率和溅射效率的新型矩形溅射磁控管阴极。 与仅考虑磁场分布的常规磁电轮设计不同，因此具有定性或经验性，本发明的磁控管阴极是通过计算机辅助的等离子体放电模拟而开发的。 通过定量模拟电子轨迹，电子/ Ar碰撞，空间电荷分布和目标侵蚀曲线，以组合的方式优化磁场和电场。 铜靶溅射试验显示，目标利用率为55％〜65％，远高于传统目标利用率的40％左右。 同时，由于有效地限制了高能电子，所以通过在目标表面上保持比较强的磁场可以获得高的溅射效率，其可以比12mm厚。