公开(公告)号：US20160290804A1

公开(公告)日：2016-10-06

申请号：US15035869

申请日：2013-11-22

Applicant: Thierry CASSAGNES ,  Hugues BEAULATON ,  Laurent CORNIBERT ,  Yean Ling TEO

Inventor： Thierry Cassagnes ,  Hugues Beaulaton ,  Laurent Cornibert ,  Yean Ling Teo

IPC: G01C19/5726 ,  H04L7/033 ,  G06F1/08

CPC classification number: G01C19/5726 ,  G01C19/04 ,  G06F1/08 ,  G06F1/1694 ,  H04L7/033 ,  H04L7/06

Abstract: A vibration gyroscope circuitry (VCIRC) connectable to a vibrating MEMS gyroscope (VMEMS). The circuitry comprises drive circuitry (DRIVE) arranged to drive, when the circuitry is connected, the vibration MEMS gyroscope (VMEMS) and a measurement unit (DMU) which provides a drive measurement voltage signal (DMV) forming a measure of a displacement of a mass along a drive axis. A sense circuitry (SENSE) is arranged to process a sense measurement signal of the vibration MEMS gyroscope (VMEMS) forming a measure for a displacement of the mass along a sense axis. A digital sample clock generator (SCG) is arranged to generate a sample clock signal (SCLK) from an input signal (FDxy) derivable from a drive measurement voltage signal (DMV). The sample clock generator (SCG) comprises an oscillator (HFOSC) arranged to generate a master clock (MOSC), and a counter unit (OSCCNTR) arranged to count master clock periods during one period of the input signal. The clock generator also comprises a number count monitor (NCM) arranged to determine during how many input signal periods the number count stays constant, and to compare the number of constant periods (Ncp) with a critical number of constant periods (Ncp_crit). A frequency shifter (FSH) will trigger the oscillator to shift the master clock frequency whenever the number count monitor (NCM) has determined that the number of constant periods (Ncp) exceeds the critical number of constant periods (Ncp_crit).

Abstract translation: 振动陀螺仪电路（VCIRC）可连接到振动MEMS陀螺仪（VMEMS）。 电路包括驱动电路（DRIVE），驱动电路（DRIVE）被布置成在电路连接时驱动振动MEMS陀螺仪（VMEMS）和测量单元（DMU），其提供驱动测量电压信号（DMV），其形成一个 沿驱动轴的质量。 感测电路（SENSE）被布置为处理振动MEMS陀螺仪（VMEMS）的感测测量信号，其形成沿着感测轴的质量位移的测量。 数字采样时钟发生器（SCG）被布置成从可从驱动测量电压信号（DMV）导出的输入信号（FDxy）产生采样时钟信号（SCLK）。 采样时钟发生器（SCG）包括布置成产生主时钟（MOSC）的振荡器（HFOSC）和被配置为在输入信号的一个周期期间对主时钟周期进行计数的计数器单元（OSCCNTR）。 时钟发生器还包括一个数字计数监视器（NCM），用于确定在数量保持不变的多少个输入信号周期内，以及将常数周期数（Ncp）与临界数量的恒定周期（Ncp_crit）进行比较。 每当数字监视（NCM）确定恒定周期数（Ncp）超过常数周期（Ncp_crit）的临界数时，移频器（FSH）将触发振荡器来移动主时钟频率。

公开(公告)号：US20160102979A1

公开(公告)日：2016-04-14

申请号：US14642202

申请日：2015-03-09

Applicant: HUGUES BEAULATON ,  THIERRY CASSAGNES ,  LAURENT CORNIBERT ,  VOLKER WAHL

Inventor： HUGUES BEAULATON ,  THIERRY CASSAGNES ,  LAURENT CORNIBERT ,  VOLKER WAHL

IPC: G01C19/5712 ,  H01L41/04

CPC classification number: G01C19/5776 ,  G01C19/5726 ,  H03B2200/0094

Abstract: A system comprises a mechanical resonator; an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator.

Abstract translation: 一种系统包括机械谐振器; 可操作地耦合到所述机械谐振器的模拟电路; 所述模拟电路被布置成接收机械谐振器测量信号并将机械谐振器致动信号输出到所述机械谐振器; 以及数字致动器，其可操作地耦合到所述模拟电路并且被配置为向所述模拟电路提供信号的频率扫描，所述模拟电路引起所述机械谐振器的移动。

公开(公告)号：US09823074B2

公开(公告)日：2017-11-21

申请号：US14416727

申请日：2012-08-08

Applicant: Hugues Beaulaton ,  Laurent Cornibert ,  Gerhard Trauth

Inventor： Hugues Beaulaton ,  Laurent Cornibert ,  Gerhard Trauth

IPC: G01C19/5712 ,  G01C19/5776 ,  H03B28/00

CPC classification number: G01C19/5712 ,  G01C19/5776 ,  H03B28/00 ,  H03B2200/0082

Abstract: A drive-mode oscillator module for use within a micro-electro-mechanical system (MEMS) device is described. The drive-mode oscillator module is arranged to receive a proof-mass measurement signal from a proof-mass of the MEMS device and to output a proof-mass actuation signal to the proof-mass of the MEMS device. The drive-mode oscillator module comprises a first, higher gain accuracy drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during an active mode of the MEMS device, and a second, lower power consumption drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during a standby mode of the MEMS device.

公开(公告)号：US20150280949A1

公开(公告)日：2015-10-01

申请号：US14440187

申请日：2012-11-06

Applicant: Laurent CORNIBERT ,  Hugues BEAULATON ,  Thierry SAGNES ,  Gerhard TRAUTH

Inventor： Laurent Cornibert ,  Hugues Beaulaton ,  Thierry Cassagnes ,  Gerhard Trauth

IPC: H04L27/04 ,  H04L27/12

CPC classification number: H04L27/04 ,  G01C19/5726 ,  H04L27/125

Abstract: A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and at least one modulation component arranged to receive the digital amplitude modulation control signal, and to output at least one proof-mass drive signal. The at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital amplitude modulation control signal.

Abstract translation: 驱动模式振荡器模块产生至少一个用于微机电系统（MEMS）装置内的校验质量驱动信号。 所述驱动模式振荡器模块包括布置成接收至少一个校验质量运动测量信号的至少一个增益控制部件，并且至少部分地基于所述至少一个校验质量运动测量信号产生数字调制控制信号， 以及至少一个调制分量，被布置成接收数字幅度调制控制信号，并输出至少一个校验质量驱动信号。 所述至少一个调制部件被布置成至少部分地基于所接收的数字幅度调制控制信号对所述至少一个校验质量驱动信号进行数字调制。

公开(公告)号：US06903435B2

公开(公告)日：2005-06-07

申请号：US10346444

申请日：2003-01-17

Applicant: Gérard Auriel ,  Laurent Cornibert

Inventor： Gérard Auriel ,  Laurent Cornibert

IPC: H01L29/74 ,  H01L21/225 ,  H01L21/331 ,  H01L21/332 ,  H01L21/76 ,  H01L21/761 ,  H01L21/763 ,  H01L29/06 ,  H01L29/739 ,  H01L29/78 ,  H01L29/00

CPC classification number: H01L29/74 ,  H01L21/2257 ,  H01L21/761 ,  H01L21/763 ,  H01L29/0619 ,  H01L29/66333 ,  H01L29/66393

Abstract: A vertical power component on a silicon wafer, including a lightly-doped epitaxial layer of a second conductivity type on the upper surface of a heavily-doped substrate of a first conductivity type, the epitaxial layer having a thickness adapted to withstanding the maximum voltage likely to be applied to the power component during its operation; and an isolating wall formed by etching a trench through the epitaxial layer and diffusing from this trench a dopant of the first conductivity type of high doping level.

Abstract translation: 在硅晶片上的垂直功率分量，包括第一导电类型的重掺杂衬底的上表面上的第二导电类型的轻掺杂外延层，所述外延层具有适于承受最大电压的厚度 在运行期间应用于功率部件; 以及通过蚀刻通过所述外延层的沟槽并从所述沟槽扩散所述第一导电类型的高掺杂水平的掺杂剂形成的隔离壁。

公开(公告)号：US20150185011A1

公开(公告)日：2015-07-02

申请号：US14416727

申请日：2012-08-08

Applicant: Hugues Beaulaton ,  Laurent Cornibert ,  Gerhard Trauth

Inventor： Hugues Beaulaton ,  Laurent Cornibert ,  Gerhard Trauth

IPC: G01C19/5712 ,  H03B28/00

CPC classification number: G01C19/5712 ,  G01C19/5776 ,  H03B28/00 ,  H03B2200/0082

Abstract: A drive-mode oscillator module for use within a micro-electro-mechanical system (MEMS) device is described. The drive-mode oscillator module is arranged to receive a proof-mass measurement signal from a proof-mass of the MEMS device and to output a proof-mass actuation signal to the proof-mass of the MEMS device. The drive-mode oscillator module comprises a first, higher gain accuracy drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during an active mode of the MEMS device, and a second, lower power consumption drive-mode component for generating an actuation signal to be output by the drive-mode oscillator module during a standby mode of the MEMS device.

Abstract translation: 描述了一种在微机电系统（MEMS）装置内使用的驱动模式振荡器模块。 驱动模式振荡器模块被布置成从MEMS器件的校验质量接收校验质量测量信号，并将校验质量致动信号输出到MEMS器件的校准质量。 所述驱动模式振荡器模块包括第一较高增益精度的驱动模式组件，用于在所述MEMS装置的有源模式期间产生由所述驱动模式振荡器模块输出的致动信号，以及第二低功耗驱动模式组件， 模式分量，用于在MEMS装置的待机模式期间产生由驱动模式振荡器模块输出的致动信号。

公开(公告)号：US06551868B1

公开(公告)日：2003-04-22

申请号：US09705292

申请日：2000-11-02

Applicant: Gérard Auriel ,  Laurent Cornibert

Inventor： Gérard Auriel ,  Laurent Cornibert

IPC: H01L21337

CPC classification number: H01L29/74 ,  H01L21/2257 ,  H01L21/761 ,  H01L21/763 ,  H01L29/0619 ,  H01L29/66333 ,  H01L29/66393

Abstract: A method for manufacturing a vertical power component on a silicon wafer, including the steps of growing a lightly-doped epitaxial layer of a second conductivity type on the upper surface of a heavily-doped substrate of a first conductivity type, the epitaxial layer having a thickness adapted to withstanding the maximum voltage likely to be applied to the power component during its operation; and delimiting in the wafer an area corresponding to at least one power component by an isolating wall formed by etching a trench through the epitaxial layer and diffusing from this trench a dopant of the first conductivity type of high doping level.

Abstract translation: 一种用于在硅晶片上制造垂直功率分量的方法，包括以下步骤：在第一导电类型的重掺杂衬底的上表面上生长具有第二导电类型的轻掺杂外延层，所述外延层具有 适于在其操作期间承受可能施加到功率部件的最大电压的厚度; 以及通过隔离壁在所述晶片中限定对应于至少一个功率分量的区域，所述隔离壁通过蚀刻通过所述外延层的沟槽并从所述沟槽扩散所述第一导电类型的高掺杂水平的掺杂剂。

公开(公告)号：US10119822B2

公开(公告)日：2018-11-06

申请号：US15035869

申请日：2013-11-22

Applicant: Thierry Cassagnes ,  Hugues Beaulaton ,  Laurent Cornibert ,  Yean Ling Teo

Inventor： Thierry Cassagnes ,  Hugues Beaulaton ,  Laurent Cornibert ,  Yean Ling Teo

IPC: G01C19/5726 ,  G01C19/04 ,  G01F1/08 ,  H04L7/033 ,  H04L7/06 ,  G06F1/08 ,  G06F1/16

Abstract: Vibration gyroscope circuitry, connectable to a vibrating MEMS gyroscope, includes drive circuitry for driving the gyroscope and a measurement circuit for providing a drive measurement signal indicating displacement of a mass along a drive axis. Sense circuitry processes a sense measurement signal of the gyroscope indicating displacement of the mass along a sense axis. A digital sample clock generator includes an oscillator for generating a master clock, a counter for counting master clock periods during one period of an input signal derived from the drive measurement signal, and a number count monitor for determining during how many input signal periods the number count stays constant and for comparing a number of constant periods with a critical number of constant periods. A frequency shifter triggers the oscillator to shift the master clock frequency whenever the monitor determines that the number of constant periods exceeds the critical number of constant periods.

公开(公告)号：US09644965B2

公开(公告)日：2017-05-09

申请号：US14642202

申请日：2015-03-09

Applicant: Hugues Beaulaton ,  Thierry Cassagnes ,  Laurent Cornibert ,  Volker Wahl

Inventor： Hugues Beaulaton ,  Thierry Cassagnes ,  Laurent Cornibert ,  Volker Wahl

IPC: G01C19/5776 ,  G01C19/5726

CPC classification number: G01C19/5776 ,  G01C19/5726 ,  H03B2200/0094

Abstract: A system comprises a mechanical resonator; an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator.

公开(公告)号：US09503295B2

公开(公告)日：2016-11-22

申请号：US14440187

申请日：2012-11-06

Applicant: Laurent Cornibert ,  Hugues Beaulaton ,  Thierry Cassagnes ,  Gerhard Trauth

Inventor： Laurent Cornibert ,  Hugues Beaulaton ,  Thierry Cassagnes ,  Gerhard Trauth

IPC: G06F13/42 ,  H04L27/04 ,  G01C19/5726 ,  H04L27/12

CPC classification number: H04L27/04 ,  G01C19/5726 ,  H04L27/125

Abstract: A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and at least one modulation component arranged to receive the digital amplitude modulation control signal, and to output at least one proof-mass drive signal. The at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital amplitude modulation control signal.

Abstract translation: 驱动模式振荡器模块产生至少一个用于微机电系统（MEMS）装置内的校验质量驱动信号。 所述驱动模式振荡器模块包括布置成接收至少一个校验质量运动测量信号的至少一个增益控制部件，并且至少部分地基于所述至少一个校验质量运动测量信号产生数字调制控制信号， 以及至少一个调制分量，被布置成接收数字幅度调制控制信号，并输出至少一个校验质量驱动信号。 所述至少一个调制部件被布置成至少部分地基于所接收的数字幅度调制控制信号对所述至少一个校验质量驱动信号进行数字调制。