公开(公告)号：US09558974B2

公开(公告)日：2017-01-31

申请号：US13629498

申请日：2012-09-27

申请人： Mao-Lin Kao ,  Hsu-Shui Liu ,  Tien-Chen Hu ,  Li-Jen Ko ,  Hsiang-Yin Shen ,  Jiun-Rong Pai

发明人： Mao-Lin Kao ,  Hsu-Shui Liu ,  Tien-Chen Hu ,  Li-Jen Ko ,  Hsiang-Yin Shen ,  Jiun-Rong Pai

IPC分类号： H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67184 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/68707

摘要： A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

摘要翻译： 提供半导体处理站。 半导体处理站包括第一平台，第二平台和真空隧道，其中第一平台具有第一负载锁和第一多个室，并且第二平台具有第二负载锁和第二多个室，以及 真空隧道连接第一和第二加载锁。

公开(公告)号：US20130230375A1

公开(公告)日：2013-09-05

申请号：US13409540

申请日：2012-03-01

申请人： Chi-Feng TUNG ,  Mao-Lin Kao ,  Hsiang-Yin Shen ,  Chin-Hsiang Lin

发明人： Chi-Feng TUNG ,  Mao-Lin Kao ,  Hsiang-Yin Shen ,  Chin-Hsiang Lin

IPC分类号： B66F11/00

CPC分类号： H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： A rail transport system and method for a semiconductor fabrication facility (FAB). In one embodiment, the system includes a network of stationary rails and a wheeled vehicle movable on the rails via rolling movement. The vehicle is operable to hold a wafer carrier that stores a plurality of wafers. A cross-floor transport system is provided that may include a vehicle lifter positioned near the network of rails that extends between a first elevation and a second elevation in the FAB. The lifter is configured and operable to receive the vehicle from rails at the first elevation and vertically transport the vehicle to rails at the second elevation without removing the wafer carrier from the wheeled vehicle. In one embodiment, the lifter is configured so that the vehicle may be rolled directly onto and off of the lifter for vertical transport.

摘要翻译： 一种用于半导体制造设备（FAB）的轨道运输系统和方法。 在一个实施例中，该系统包括固定轨道网络和通过滚动运动可在轨道上移动的轮式车辆。 车辆可操作地保持存储多个晶片的晶片载体。 提供了一种十字架传送系统，其可以包括定位在轨道网络附近的车辆升降机，其在FAB中在第一高度和第二高度之间延伸。 提升器被构造和操作以在第一高度处从轨道接收车辆，并且在第二高度处将车辆垂直地运输到轨道，而不从轮式车辆移除晶片载体。 在一个实施例中，升降机被构造成使得车辆可以直接滚动到升降机上并且用于垂直运输。

公开(公告)号：US09048274B2

公开(公告)日：2015-06-02

申请号：US12329664

申请日：2008-12-08

申请人： Wei-Cheng Wang ,  Feng-Ning Lee ,  Chi-Feng Tung ,  Mao-Lin Kao ,  Li-Jen Ko

发明人： Wei-Cheng Wang ,  Feng-Ning Lee ,  Chi-Feng Tung ,  Mao-Lin Kao ,  Li-Jen Ko

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67766

摘要： A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT.

摘要翻译： 一种包括输送机的系统。 半导体处理工具具有升降器端口。 该工具位于输送机附近，使得升降器端口构造成在输送机和升降器端口之间输送前开口统一荚（FOUP）。 上游储料器和下游储料器与输送机和工具共处。 上游和下游储存器各自具有用于FOUP的相应存储空间以及被配置为在其各自的存储空间和输送机之间运输FOUP的相应机器人装置。 上游储料器被配置为从架空运输（OHT）接收FOUP并将FOUP输送到输送机。 下游储料器配置为从输送机接收FOUP，并将FOUP运送到OHT。

公开(公告)号：US20140086720A1

公开(公告)日：2014-03-27

申请号：US13629498

申请日：2012-09-27

申请人： Mao-Lin KAO ,  Hsu-Shui Liu ,  Tien-Chen Hu ,  Li-Jen Ko ,  Hsiang-Yin Shen ,  Jiun-Rong Pai

发明人： Mao-Lin KAO ,  Hsu-Shui Liu ,  Tien-Chen Hu ,  Li-Jen Ko ,  Hsiang-Yin Shen ,  Jiun-Rong Pai

IPC分类号： H01L21/677 ,  H01L21/203 ,  H01L21/306

CPC分类号： H01L21/67184 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/68707

摘要： A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

摘要翻译： 提供半导体处理站。 半导体处理站包括第一平台，第二平台和真空隧道，其中第一平台具有第一负载锁和第一多个室，并且第二平台具有第二负载锁和第二多个室，以及 真空隧道连接第一和第二加载锁。

公开(公告)号：US20100143082A1

公开(公告)日：2010-06-10

申请号：US12329664

申请日：2008-12-08

申请人： Wei-Cheng Wang ,  Feng-Ning Lee ,  Chi-Feng Tung ,  Mao-Lin Kao ,  Li-Jen Ko

发明人： Wei-Cheng Wang ,  Feng-Ning Lee ,  Chi-Feng Tung ,  Mao-Lin Kao ,  Li-Jen Ko

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67766

摘要： A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT.

摘要翻译： 一种包括输送机的系统。 半导体处理工具具有升降器端口。 该工具位于输送机附近，使得升降器端口构造成在输送机和升降器端口之间输送前开口统一荚（FOUP）。 上游储料器和下游储料器与输送机和工具共处。 上游和下游储存器各自具有用于FOUP的相应存储空间以及被配置为在其各自的存储空间和输送机之间运输FOUP的相应机器人装置。 上游储料器被配置为从架空运输（OHT）接收FOUP并将FOUP输送到输送机。 下游储料器配置为从输送机接收FOUP，并将FOUP运送到OHT。

公开(公告)号：US09305815B2

公开(公告)日：2016-04-05

申请号：US13409540

申请日：2012-03-01

申请人： Chi-Feng Tung ,  Mao-Lin Kao ,  Hsiang-Yin Shen ,  Chin-Hsiang Lin

发明人： Chi-Feng Tung ,  Mao-Lin Kao ,  Hsiang-Yin Shen ,  Chin-Hsiang Lin

IPC分类号： H01L21/677

CPC分类号： H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： A rail transport system and method for a semiconductor fabrication facility (FAB). In one embodiment, the system includes a network of stationary rails and a wheeled vehicle movable on the rails via rolling movement. The vehicle is operable to hold a wafer carrier that stores a plurality of wafers. A cross-floor transport system is provided that may include a vehicle lifter positioned near the network of rails that extends between a first elevation and a second elevation in the FAB. The lifter is configured and operable to receive the vehicle from rails at the first elevation and vertically transport the vehicle to rails at the second elevation without removing the wafer carrier from the wheeled vehicle. In one embodiment, the lifter is configured so that the vehicle may be rolled directly onto and off of the lifter for vertical transport.

摘要翻译： 一种用于半导体制造设备（FAB）的轨道运输系统和方法。 在一个实施例中，该系统包括固定轨道网络和通过滚动运动可在轨道上移动的轮式车辆。 车辆可操作地保持存储多个晶片的晶片载体。 提供了一种十字架传送系统，其可以包括定位在轨道网络附近的车辆升降机，其在FAB中在第一高度和第二高度之间延伸。 提升器被构造和操作以在第一高度处从轨道接收车辆，并且在第二高度处将车辆垂直地运输到轨道，而不从轮式车辆移除晶片载体。 在一个实施例中，升降机被构造成使得车辆可以直接滚动到升降机上并且用于垂直运输。