Minute particle loading method and apparatus
    1.
    发明授权
    Minute particle loading method and apparatus 失效
    分粒子加载方法和装置

    公开(公告)号:US5279045A

    公开(公告)日:1994-01-18

    申请号:US649847

    申请日:1991-01-31

    IPC分类号: B23P19/00 H01L21/60 F26B3/08

    摘要: The present invention is to define an enclosed space by covering a holder which can hold numerous minute particles, and introduce a fluid into the enclosed space to stir up the numerous minute particles within the enclosed space with a turbulent flow of the fluid so that the minute particles are placed in and held by the holder After stirring up and loading the minute particles in the holder, the fluid is introduced into the enclosed space again to recover the remaining minute particles which have not been held by the holder. The number of minute particles required for one cycle of the loading operation are taken out by moving a particle push-up shaft vertically, having a recess at the distal end thereof, within a stocker which stores a large number of minute particles, and then delivered to the enclosed space with the fluid.

    摘要翻译: 本发明是通过覆盖能够容纳许多微小颗粒的保持器来限定封闭空间,并且将流体引入封闭空间中以在流体的湍流中将封闭空间内的许多微小颗粒搅动,使得分钟 颗粒放置在保持器中并保持器在搅拌并将微小颗粒装载在保持器中之后,再次将流体引入封闭空间中以回收未被保持器保持的剩余的微小颗粒。 通过在储存有大量微小颗粒的储料器内移动具有在其远端具有凹部的垂直方向的颗粒上推轴来取出装载操作的一个循环所需的微小颗粒数,然后传送 到流体的封闭空间。