LOW TEMPERATURE CO-FIRED CERAMIC SUBSTRATE HAVING DIFFUSION BARRIER LAYER AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    LOW TEMPERATURE CO-FIRED CERAMIC SUBSTRATE HAVING DIFFUSION BARRIER LAYER AND METHOD OF MANUFACTURING THE SAME 审中-公开
    具有扩散阻挡层的低温共烧陶瓷基板及其制造方法

    公开(公告)号:US20090214881A1

    公开(公告)日:2009-08-27

    申请号:US12388849

    申请日:2009-02-19

    IPC分类号: B32B18/00 C03B29/00

    摘要: There is provided a low temperature co-fired ceramic substrate having a diffusion barrier layer to prevent diffusion occurring in a heterojunction during firing and a method of manufacturing the same. A low temperature co-fired ceramic substrate according to an aspect of the invention may include: a first ceramic layer formed of a material having a first dielectric constant; a second ceramic layer formed of a material having a second dielectric constant lower than the first dielectric constant; and a diffusion barrier layer interposed between the first ceramic layer and the second ceramic layer and formed of the first ceramic layer material, the second ceramic layer material, and a barium (Ba) compound, wherein inter-diffusion between the first ceramic layer material and the second ceramic layer material is prevented by using the diffusion barrier layer.

    摘要翻译: 提供了具有扩散阻挡层的低温共烧陶瓷基板及其制造方法,以防止在烧成期间发生异质结的扩散。 根据本发明的一个方面的低温共烧陶瓷衬底可以包括:由具有第一介电常数的材料形成的第一陶瓷层; 由具有低于第一介电常数的第二介电常数的材料形成的第二陶瓷层; 以及介于所述第一陶瓷层和所述第二陶瓷层之间并且由所述第一陶瓷层材料,所述第二陶瓷层材料和钡(Ba)化合物形成的扩散阻挡层,其中所述第一陶瓷层材料和 通过使用扩散阻挡层来防止第二陶瓷层材料。