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公开(公告)号：US08541325B2
公开(公告)日：2013-09-24
申请号：US13028472
申请日：2011-02-16
IPC分类号： C03C3/06
CPC分类号： C03C3/06 , B82Y10/00 , B82Y40/00 , C03B19/1407 , C03B19/1415 , C03B19/1453 , C03B2201/21 , C03B2201/23 , C03B2201/42 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/42 , C03C2203/40 , C03C2203/52 , G03F1/60 , G03F7/0002 , G03F7/70958
摘要： In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of >90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is >93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is >95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is >84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is >86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is >88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.
摘要翻译： 在一个实施方案中，本公开涉及在340nm至840nm的波长下具有> 90％/ cm 3的内透射率的二氧化硅 - 二氧化钛玻璃。 在另一个实施例中，在340nm至840nm的波长下，内透射率> 93％/ cm。 在另一个实施方案中，在340nm至840nm的波长下，内透射率> 95％/ cm。 在另一个实施方案中，本发明涉及一种二氧化硅 - 二氧化钛玻璃，其透射率通过玻璃制成的光学透镜在340nm至840nm的波长处> 84％。 在另一个实施例中，通过由玻璃制成的光学器件的整个透射在340nm至840nm的波长处为> 86％。 在另一实施例中，通过由玻璃制成的光学器件的整体透射在330nm至840nm的波长处为> 88％。 在另一个实施方案中，二氧化硅 - 二氧化钛玻璃具有小于3ppm重量的Ti + 3浓度水平[Ti 3+]。
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公开(公告)号：US20110209503A1
公开(公告)日：2011-09-01
申请号：US13106165
申请日：2011-05-12
CPC分类号： C03C3/06 , C03C4/0085 , C03C2201/22 , C03C2201/23 , C03C2203/54 , G03F7/70958
摘要： A method of making a fused silica article having a combined concentration of protium and deuterium in a range from about 1×1016 molecules/cm3 up to about 6×1019 molecules/cm3. In some embodiments, deuterium is present in an amount greater than its natural isotopic abundance. The method includes the steps of providing a fused silica boule, diffusing at least one of protium and deuterium into the boule, and annealing the boule to form the fused silica article. A method of diffusing hydrogen into fused silica and a fused silica article loaded with hydrogen formed by the method are also described.
摘要翻译： 制备具有约1×10 16分子/ cm 3至多约6×10 19分子/ cm 3范围内的ium和氘的组合浓度的熔融二氧化硅制品的方法。 在一些实施方案中，氘的存在量大于其天然同位素丰度。 该方法包括以下步骤：提供熔融二氧化硅焦耳，将钚和氘中的至少一种扩散到该原子核中，以及对该坯进行退火以形成熔融二氧化硅制品。 还描述了将氢扩散到熔融二氧化硅中的方法和通过该方法形成的负载有氢的熔融二氧化硅制品。
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公开(公告)号：US06817814B2
公开(公告)日：2004-11-16
申请号：US10254668
申请日：2002-09-26
申请人： Michael A. Mueller
发明人： Michael A. Mueller
IPC分类号： B23C106
CPC分类号： B44B3/06 , Y10S29/059 , Y10T408/561 , Y10T409/300896 , Y10T409/30112 , Y10T409/303808 , Y10T409/30392 , Y10T409/30532 , Y10T409/305768 , Y10T409/30616 , Y10T409/308288 , Y10T409/309016
摘要： A system and method for inscribing an item is provided. The system includes a housing having a door, an inscriber, and a support. The inscriber is disposed in the housing and is operable to inscribe the surface of an item secured in an item carrier. The support has a positioning structure that is configured to engage the item carrier and establish a reference point so that the location of the surface of the item with respect to the support is determinable. The support moves between a loading position and an inscribing position to position the item for inscribing. There is also provided a controller that governs the movements of the inscriber and includes an input device. The input device is moveable between a first position to receive characteristics about the item to be inscribed and a second position to receive a message to be inscribed on the surface of the item. There is further provided an item carrier that is configured to securely hold an item to be inscribed and includes a second positioning structure. The second positioning structure is engageable with the first positioning structure of the inscribing device to position the item carrier and item on the support of the inscribing device so that an inscription inscribed on the item will be correctly orientated on the item.
摘要翻译： 提供了一种用于刻录物品的系统和方法。 该系统包括具有门，刻录机和支架的壳体。 刻印机设置在壳体中并且可操作以将固定在物品托架中的物品的表面刻印。 支撑件具有定位结构，其被配置为接合物品承载件并建立参考点，使得物品的表面相对于支撑件的位置是可确定的。 支撑件在装载位置和刻印位置之间移动以定位用于刻印的物品。 还提供了一种控制记录器运动的控制器，并且包括输入装置。 输入装置可在第一位置之间移动，以接收关于待刻录的物品的特性，以及第二位置，以接收要刻在物品的表面上的信息。 还提供了一种物品托架，其构造成牢固地保持要被内接的物品，并且包括第二定位结构。 第二定位结构能够与刻印装置的第一定位结构接合，以将物品托架和物品定位在刻印装置的支撑上，使得刻在物品上的铭文将被正确地定向在物品上。
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公开(公告)号：US6082580A
公开(公告)日：2000-07-04
申请号：US13648
申请日：1998-01-26
CPC分类号： G07F11/42
摘要： An apparatus for dispensing unpackaged articles includes a guide shaft to carry the articles, a pushing element that advances the plurality of articles along the guide shaft, and a feed screw engagable with the pushing element and driven by a motor. While the articles to be dispensed are moved collectively as a group, the apparatus provides for the controlled dispensing of individual articles. A sensor is provided to identify when an article has been dispensed and to subsequently stop movement of the plurality of articles. Also, an iris including a yieldable opening sized to allow passage therethrough of an article in a staggered manner is provided to facilitate the individual dispensing of articles and to prevent the inadvertent dispensing of articles.
摘要翻译： 用于分配未包装物品的装置包括用于携带物品的引导轴，沿着引导轴使多个物品前进的推动元件，以及可与推动元件接合并由电动机驱动的进给螺杆。 当要分配的物品作为一个集体移动时，该装置提供单独物品的受控分配。 提供传感器以识别物品何时被分配并随后停止多个物品的移动。 此外，提供一种虹膜，其包括尺寸适于允许以交错方式穿过物品的可屈服开口，以便于单独分配物品并防止物品的无意分配。
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公开(公告)号：US08496551B2
公开(公告)日：2013-07-30
申请号：US12722919
申请日：2010-03-12
申请人： Michael A. Mueller , Brandon J. Engen , Brandon R. Bonham , Shane C. Okeson , Stephen James Molde
发明人： Michael A. Mueller , Brandon J. Engen , Brandon R. Bonham , Shane C. Okeson , Stephen James Molde
CPC分类号： B23B35/00 , F16H7/02 , F16H55/56 , F16H61/66272 , F16H63/067 , Y10T29/49764 , Y10T408/03
摘要： A continuous variable clutch is provided. The continuous variable clutch includes a first sheave member and a second sheave member. The first sheave member includes a first central hub and a first conical-faced surface extending radially from the first central hub. The second sheave member includes a second central hub and a second conical-faced surface that extends radially from the second central hub. The second central hub of the second sheave member is received in a cavity of the first central hub such that the first conical-faced surface of the first sheave member facing the second conical-faced surface of the second sheave portion. The second central hub moving axially within the first central hub based on an amount of torque on the continuous variable clutch. The first sheave member and the second sheave member further forming a central passage to receive an input shaft of a transmission.
摘要翻译： 提供连续可变离合器。 连续可变离合器包括第一滑轮构件和第二滑轮构件。 第一滑轮构件包括第一中心轮毂和从第一中心轮毂径向延伸的第一锥形面。 第二滑轮构件包括第二中心毂和从第二中心轮毂径向延伸的第二锥形面。 第二滑轮构件的第二中心毂被容纳在第一中心毂的空腔中，使得第一滑轮构件的第一圆锥面面向第二滑轮部分的第二锥形面。 基于连续可变离合器上的扭矩量，第二中心轮毂在第一中心毂内轴向移动。 第一滑轮构件和第二滑轮构件进一步形成中心通道以接收变速器的输入轴。
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公开(公告)号：US08261578B2
公开(公告)日：2012-09-11
申请号：US12258703
申请日：2008-10-27
IPC分类号： C03C15/00 , C03C3/06 , C03B19/06 , C03B37/018
CPC分类号： C03B19/1453 , C03B32/00 , C03B2201/21 , C03C3/06 , C03C2201/21 , Y10T428/249921
摘要： A method of making a fused silica article that is loaded with hydrogen. A fused silica glass near net shape part is provided and is loaded with a molecular hydrogen in a range from about 0.1×1017 molecules/cm3 up to about 1×1019 molecules/cm3. The thinner shape of the near net shape part enables the shape to be loaded more quickly than previous methods. A fused silica article loaded with hydrogen using the method is also described.
摘要翻译： 制备负载氢的熔融二氧化硅制品的方法。 提供了近净形状部分的熔融二氧化硅玻璃，并加载了约0.1×10 17分子/ cm 3至约1×10 19分子/ cm 3范围内的分子氢。 近净形状部分的形状更薄，能够使形状比以前的方法更快地加载。 还描述了使用该方法加载氢的熔融二氧化硅制品。
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公开(公告)号：US08021755B2
公开(公告)日：2011-09-20
申请号：US12862965
申请日：2010-08-25
IPC分类号： B32B17/06
CPC分类号： C03C3/076 , C03C4/0085 , C03C17/02 , C03C23/007 , Y10T428/24355 , Y10T428/2495
摘要： A low thermal expansion glass includes a base glass material having a front surface, a back surface, and a thickness and a glass coating material applied on at least the front surface of the base glass material. The base glass material consists essentially 10 wt % to 20 wt % titania and 80 wt % to 90 wt % silica. The glass coating material also consists essentially of titania and silica, but the total amount of titania in the glass coating material is lower than the total amount of titania in the base glass material. A silica-titania glass element suitable for extreme ultraviolet lithography applications consists of 12 wt % to 20 wt % titania and 80 wt % to 88 wt % silica and has a coefficient of thermal expansion of essentially 0 ΔL/L in a temperature range of −20° C. to +100° C.
摘要翻译： 低热膨胀玻璃包括具有前表面，后表面和厚度的基底玻璃材料，以及施加在基底玻璃材料的至少前表面上的玻璃涂层材料。 基础玻璃材料基本上由10重量％至20重量％的二氧化钛和80重量％至90重量％的二氧化硅组成。 玻璃涂层材料也基本上由二氧化钛和二氧化硅组成，但玻璃涂层材料中二氧化钛的总量低于基础玻璃材料中二氧化钛的总量。 适用于极紫外光刻应用的二氧化硅 - 二氧化钛玻璃元件由12重量％至20重量％的二氧化钛和80重量％至88重量％的二氧化硅组成，并且在温度范围内的热膨胀系数基本为0＆Dgr; L / L -20°C至+ 100°C
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公开(公告)号：US20110207592A1
公开(公告)日：2011-08-25
申请号：US13028472
申请日：2011-02-16
IPC分类号： C03C3/06
CPC分类号： C03C3/06 , B82Y10/00 , B82Y40/00 , C03B19/1407 , C03B19/1415 , C03B19/1453 , C03B2201/21 , C03B2201/23 , C03B2201/42 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/42 , C03C2203/40 , C03C2203/52 , G03F1/60 , G03F7/0002 , G03F7/70958
摘要： In one embodiment the present disclosure is directed to a silica-titania glass with an internal transmission of >90%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the internal transmission is >93%/cm at wavelengths from 340 nm to 840 nm. In a further embodiment the internal transmission is >95%/cm at wavelengths from 340 nm to 840 nm. In another embodiment the disclosure is directed to a silica-titania glass with an overall transmission through an optic made of the glass is >84% at wavelengths from 340 nm to 840 nm. In another embodiment overall transmission through an optic made of the glass is >86% at wavelengths from 340 nm to 840 nm. In a further embodiment the overall transmission through an optic made of the glass is >88% at wavelengths from 330 nm to 840 nm. In a further embodiment the silica-titania glass has a Ti+3 concentration level [Ti3+] less than 3 ppm by weight.
摘要翻译： 在一个实施方案中，本公开涉及在340nm至840nm的波长下具有> 90％/ cm 3的内透射率的二氧化硅 - 二氧化钛玻璃。 在另一个实施例中，在340nm至840nm的波长下，内透射率> 93％/ cm。 在另一个实施方案中，在340nm至840nm的波长下，内透射率> 95％/ cm。 在另一个实施方案中，本公开涉及一种二氧化硅 - 二氧化钛玻璃，其透射率通过玻璃制成的光学器件在340nm至840nm的波长处为> 84％。 在另一个实施例中，通过由玻璃制成的光学器件的整个透射在340nm至840nm的波长处为> 86％。 在另一实施例中，通过由玻璃制成的光学器件的整体透射在330nm至840nm的波长处为> 88％。 在另一个实施方案中，二氧化硅 - 二氧化钛玻璃具有小于3ppm重量的Ti + 3浓度水平[Ti 3+]。
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公开(公告)号：US20090110899A1
公开(公告)日：2009-04-30
申请号：US12258703
申请日：2008-10-27
CPC分类号： C03B19/1453 , C03B32/00 , C03B2201/21 , C03C3/06 , C03C2201/21 , Y10T428/249921
摘要： A method of making a fused silica article that is loaded with hydrogen. A fused silica glass near net shape part is provided and is loaded with a molecular hydrogen in a range from about 0.1×1017 molecules/cm3 up to about 1×1019 molecules/cm3. The thinner shape of the near net shape part enables the shape to be loaded more quickly than previous methods. A fused silica article loaded with hydrogen using the method is also described.
摘要翻译： 制备负载氢的熔融二氧化硅制品的方法。 提供靠近净形状部分的熔融石英玻璃，并加载约0.1×10 17分子/ cm 3至多约1×1019分子/ cm 3的分子氢。 近净形状部分的形状更薄，能够使形状比以前的方法更快地加载。 还描述了使用该方法加载氢的熔融二氧化硅制品。
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公开(公告)号：US06478515B1
公开(公告)日：2002-11-12
申请号：US09373507
申请日：1999-08-13
申请人： Michael A. Mueller
发明人： Michael A. Mueller
IPC分类号： B23C106
CPC分类号： B44B3/06 , Y10S29/059 , Y10T408/561 , Y10T409/300896 , Y10T409/30112 , Y10T409/303808 , Y10T409/30392 , Y10T409/30532 , Y10T409/305768 , Y10T409/30616 , Y10T409/308288 , Y10T409/309016
摘要： A system and method for inscribing an item is provided. The system includes a housing having a door, an inscriber, and a support. The inscriber is disposed in the housing and is operable to inscribe the surface of an item secured in an item carrier. The support has a positioning structure that is configured to engage the item carrier and establish a reference point so that the location of the surface of the item with respect to the support is determinable. The support moves between a loading position and an inscribing position to position the item for inscribing. There is also provided a controller that governs the movements of the inscriber and includes an input device. The input device is moveable between a first position to receive characteristics about the item to be inscribed and a second position to receive a message to be inscribed on the surface of the item. There is further provided an item carrier that is configured to securely hold an item to be inscribed and includes a second positioning structure. The second positioning structure is engageable with the first positioning structure of the inscribing device to position the item carrier and item on the support of the inscribing device so that an inscription inscribed on the item will be correctly orientated on the item.
摘要翻译： 提供了一种用于刻录物品的系统和方法。 该系统包括具有门，刻录机和支架的壳体。 刻印机设置在壳体中并且可操作以将固定在物品托架中的物品的表面刻印。 支撑件具有定位结构，其被配置为接合物品承载件并建立参考点，使得物品的表面相对于支撑件的位置是可确定的。 支撑件在装载位置和刻印位置之间移动以定位用于刻印的物品。 还提供了一种控制记录器运动的控制器，并且包括输入装置。 输入装置可在第一位置之间移动，以接收关于待刻录的物品的特性，以及第二位置，以接收要刻在物品的表面上的信息。 还提供了一种物品托架，其构造成牢固地保持要被内接的物品，并且包括第二定位结构。 第二定位结构能够与刻印装置的第一定位结构接合，以将物品托架和物品定位在刻印装置的支撑上，使得刻在物品上的铭文将被正确地定向在物品上。
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