-
公开(公告)号：US6151349A
公开(公告)日：2000-11-21
申请号：US368208
申请日：1999-08-04
CPC分类号： H01S3/03 , G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/134 , H01S3/225 , H01S3/036 , H01S3/08009 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F.sub.2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines .DELTA.E/.DELTA.V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on .DELTA.E/.DELTA.V without the need to actually measure the fluorine concentration.
摘要翻译： 一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。 这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTA E / DELTA V，脉冲能量随电压的变化，并根据DELTA E / DELTA V自动精确控制氟浓度，而无需实际测量 氟浓度。
-
公开(公告)号：US6028880A
公开(公告)日：2000-02-22
申请号：US109596
申请日：1998-07-02
申请人： Jason R. Carlesi , Shahryar Rokni , Mengxiong Gong , Tom A. Watson , Palash P. Das , Michael C. Binder , Muljadi Tantra , David J. Tammadge , Daniel G. Patterson
发明人： Jason R. Carlesi , Shahryar Rokni , Mengxiong Gong , Tom A. Watson , Palash P. Das , Michael C. Binder , Muljadi Tantra , David J. Tammadge , Daniel G. Patterson
CPC分类号： G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/225
摘要： An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.
摘要翻译： 具有氟控制的准分子激光系统具有固定体积的注射瓶，其中在注入氟注入激光室之前注入氟。 提供歧管和反馈控制系统以允许以接近连续氟注入的速率进行精确喷射。 该系统允许激光器在小范围的充电电压测量的小甜点中操作。
-
搜索结果
2 条记录 (耗时 0.015 秒)
