-
公开(公告)号：US10388462B2
公开(公告)日：2019-08-20
申请号：US15204247
申请日：2016-07-07
申请人： Michael J. Dueweke
发明人： Michael J. Dueweke
摘要： A tunable reactance device and methods of manufacturing and using the same are disclosed. The tunable reactance device includes a substrate, a microelectromechanical (MEM) structure supported on the substrate and comprising a conductive material, and a driver configured to move the MEM structure with respect to the substrate upon application of an electrostatic force to the driver. A gap between the MEM structure and the substrate is maintained when the driver moves the MEM structure. The tunable reactance device has (i) a first reactance and a first electromagnetic field topology when the electrostatic force is applied to the driver and (ii) a different reactance and a different electromagnetic field topology when a different electrostatic force is applied to the driver.
-
公开(公告)号：US20170019086A1
公开(公告)日：2017-01-19
申请号：US15204247
申请日：2016-07-07
申请人： Michael J. DUEWEKE
发明人： Michael J. DUEWEKE
摘要： A tunable reactance device and methods of manufacturing and using the same are disclosed. The tunable reactance device includes a substrate, a microelectromechanical (MEM) structure supported on the substrate and comprising a conductive material, and a driver configured to move the MEM structure with respect to the substrate upon application of an electrostatic force to the driver. A gap between the MEM structure and the substrate is maintained when the driver moves the MEM structure. The tunable reactance device has (i) a first reactance and a first electromagnetic field topology when the electrostatic force is applied to the driver and (ii) a different reactance and a different electromagnetic field topology when a different electrostatic force is applied to the driver.
摘要翻译： 公开了一种可调电抗装置及其制造和使用方法。 可调电抗装置包括基板，支撑在基板上并包括导电材料的微机电（MEM）结构，以及驱动器，其构造成在向驱动器施加静电力时使MEM结构相对于基板移动。 当驱动器移动MEM结构时，保持MEM结构和衬底之间的间隙。 当将静电力施加到驾驶员时，可调电抗装置具有（i）第一电抗和第一电磁场拓扑，以及（ii）当向驾驶员施加不同的静电力时，具有不同的电抗和不同的电磁场拓扑。
-
3.发明申请公开(公告)号：US20180069507A1
公开(公告)日：2018-03-08
申请号：US15691948
申请日：2017-08-31
申请人： Michael J. DUEWEKE
发明人： Michael J. DUEWEKE
CPC分类号： H03B5/364 , B81B3/0051 , B81B3/0086 , B81C99/003 , G01C19/5755 , H01L23/642 , H01L28/60 , H03H7/38 , H03H7/40
摘要： A self-tuning impedance-matching microelectromechanical (MEMS) circuit, methods for making and using the same, and circuits including the same are disclosed. The MEMS circuit includes a tunable reactance element connected to a first mechanical spring, a separate tunable or fixed reactance element, and an AC signal source configured to provide an AC signal to the tunable reactance element(s). The reactance elements comprise a capacitor and an inductor. The AC signal source creates an electromagnetically energy favorable state for the tunable reactance element(s) at resonance with the AC signal. The method of making generally includes forming a first MEMS structure and a second mechanical or MEMS structure in/on a mechanical layer above an insulating substrate, and coating the first and second structures with a conductor to form a first tunable reactance element and a second tunable or fixed reactance element, as in the MEMS circuit.
-
公开(公告)号：US07502157B1
公开(公告)日：2009-03-10
申请号：US11391932
申请日：2006-03-28
申请人： Michael J. Dueweke
发明人： Michael J. Dueweke
IPC分类号： G02F1/01
CPC分类号： G02B26/0841
摘要： One embodiment relates to a method of independently controlling amplitude and phase modulation by a spatial light modulator. Light is illuminated onto upper layer deflectable planar areas and lower layer deflectable planar areas over a substrate of the spatial light modulator. First active circuitry on the substrate is used to provide amplitude modulation by controlling a relative displacement between upper layer deflectable planar areas and adjacent lower layer deflectable planar areas. Second active circuitry on the substrate is used to provide phase modulation by controlling a displacement between the (upper and lower layer) deflectable planar areas and the substrate. Other embodiments and features are also disclosed.
摘要翻译： 一个实施例涉及通过空间光调制器独立地控制幅度和相位调制的方法。 光照射到空间光调制器的衬底上的上层可偏转平面区域和下层可偏转平面区域上。 衬底上的第一有源电路用于通过控制上层可偏转平面区域和相邻下层可偏转平面区域之间的相对位移来提供振幅调制。 基板上的第二有源电路用于通过控制（上层和下层）可偏转平面区域和衬底之间的位移来提供相位调制。 还公开了其它实施例和特征。
-
5.发明授权Circuit and method for snapdown prevention in voltage controlled MEMS devices 有权电压控制MEMS器件防止掉电的电路和方法公开(公告)号：US07529017B1
公开(公告)日：2009-05-05
申请号：US11448302
申请日：2006-06-07
IPC分类号： G02B26/00
CPC分类号： G02B26/0808 , B81C1/00976
摘要： A circuit and method are provided for preventing snapdown in a voltage controlled Micro-Electromechanical System device having a movable actuator with an actuator electrode coupled to a first potential, the actuator suspended over a cavity electrode coupled to a second potential. Generally, the circuit includes an in-circuit conductive path between the actuator electrode and the cavity electrode, the conductive path configured to transfer charge therebetween when a voltage between the first and second potential exceeds a predetermined threshold voltage. In one embodiment the conductive path comprises an ESD clamp coupled between the actuator electrode and the cavity electrode. Other embodiments are also disclosed.
摘要翻译： 提供了一种电路和方法，用于防止具有可动致动器的压控微机电系统装置中的卡扣，致动器电极耦合到第一电位，致动器悬挂在耦合到第二电位的腔电极上。 通常，电路包括在致动器电极和腔电极之间的在线导电路径，导电路径被配置为当第一和第二电位之间的电压超过预定阈值电压时在其间传递电荷。 在一个实施例中，导电路径包括耦合在致动器电极和腔电极之间的ESD夹具。 还公开了其他实施例。
-
公开(公告)号：US07405389B2
公开(公告)日：2008-07-29
申请号：US11280830
申请日：2005-11-15
CPC分类号： G06F3/0317
摘要： The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple linear arrays of photosensitive elements arranged along three or more axes in a space-filling, close-packed multi-axis array. The photosensitive elements are connected to each other in such a way that motion is determinable along each of the axes by measuring differential photocurrents between photosensitive elements along each of the axes. The inventive architecture advantageously increases signal redundancy, and reduces signal drop-out or low signals due to random fluctuations in the incident or absorbed light or in the signals from the photosensitive elements.
摘要翻译： 本公开描述了具有感光元件的致密多轴阵列的光学位移传感器。 通常，传感器包括多个感光元件的二维阵列。 在一个实施例中，阵列包括在空间填充，紧密堆积的多轴阵列中沿着三个或更多个轴布置的多个光敏元件的线性阵列。 感光元件以这样的方式彼此连接，即通过沿着每个轴测量感光元件之间的差分光电流，沿着每个轴可以确定运动。 本发明的架构有利地增加了信号冗余度，并且由于入射或吸收的光线或来自感光元件的信号中的随机波动而减小信号丢失或低信号。
-
公开(公告)号：US07202988B1
公开(公告)日：2007-04-10
申请号：US10811435
申请日：2004-03-25
申请人： Alexander P. Payne , Michael J. Dueweke , Wilhelmus De Groot , David T. Amm , Omar S. Leung , James A. Hunter , Brent D. Lunceford , Gregory Beach
发明人： Alexander P. Payne , Michael J. Dueweke , Wilhelmus De Groot , David T. Amm , Omar S. Leung , James A. Hunter , Brent D. Lunceford , Gregory Beach
CPC分类号： G02B26/0808
摘要： In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.
摘要翻译： 在所公开的一个实施例中，光调制器可以被配置为具有基本平坦的光学有源调制器元件部分，同时偏转。 调制器可以包括基本并行布置的多个调制器元件，每个调制器元件包括在光学活性部分的任一侧上的光学活性部分和支撑部分。 此外，光学活性部分可以具有比支撑部分窄的宽度。 在所公开的另一实施例中，用于光调制的可移动膜包括基本圆形的光学活性部分和围绕圆形光学活性部分的释放膜部分。 基本上圆形的光学活性部分还可以包括被配置为暴露下表面的多个间隙。 此外，基本上圆形的光学活性部分在偏转状态下可以基本上是平坦的。
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.011 秒)
