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    Fluid Deposition Cluster Tool
    4.
    发明申请
    Fluid Deposition Cluster Tool 审中-公开
    流体沉积簇工具

    公开(公告)号：US20070026151A1

    公开(公告)日：2007-02-01

    申请号：US11457078

    申请日：2006-07-12

    申请人： John Higginson ,  Michael Rocchio ,  Jeffrey Birkmeyer ,  Stephen Deming ,  Kevin Von Essen ,  Andreas Bibl ,  Deane Gardner

    发明人： John Higginson ,  Michael Rocchio ,  Jeffrey Birkmeyer ,  Stephen Deming ,  Kevin Von Essen ,  Andreas Bibl ,  Deane Gardner

    IPC分类号： C23C16/00

    CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67207

    摘要： A cluster tool is described including a main chamber, a load chamber, a fluid deposition chamber and an environmental controller. The load chamber is coupled to the main chamber and configured to receive one or more substrates. The fluid deposition chamber is coupled to the main chamber and includes a fluid deposition device configured to deposit fluid onto the one or more substrates. A robot is included in the main chamber, the robot configured to transfer the one or more substrates between the load chamber and the fluid deposition chamber. The environmental controller is configured to maintain a substantially autonomous environment within the cluster tool.

    摘要翻译： 描述了一种集群工具，包括主室，负载室，流体沉积室和环境控制器。 负载室耦合到主室并且被配置为接收一个或多个基板。 流体沉积室联接到主室，并且包括被配置为将流体沉积到一个或多个基底上的流体沉积装置。 机器人被包括在主室中，机器人被配置为在加载室和流体沉积室之间传送一个或多个基板。 环境控制器被配置为在集群工具内维持基本上自主的环境。

    Fluid Deposition Device
    5.
    发明申请
    Fluid Deposition Device 有权
    流体沉积装置

    公开(公告)号：US20070013736A1

    公开(公告)日：2007-01-18

    申请号：US11457022

    申请日：2006-07-12

    申请人： John Higginson ,  Michael Rocchio ,  Jeffrey Birkmeyer ,  Stephen Deming ,  Kevin Von Essen ,  Andreas Bibl ,  Deane Gardner ,  Daniel West

    发明人： John Higginson ,  Michael Rocchio ,  Jeffrey Birkmeyer ,  Stephen Deming ,  Kevin Von Essen ,  Andreas Bibl ,  Deane Gardner ,  Daniel West

    IPC分类号： B41J23/00

    CPC分类号： B41J29/13 ,  B41J2/175 ,  B41J2/1752 ,  B41J2/17526 ,  B41J2/17556 ,  B41J2/17596 ,  B41J29/02

    摘要： A fluid deposition device including a platen and a cartridge mount assembly is described. The platen is configured to support a substrate upon which a fluid will be deposited. The cartridge mount assembly includes a receptacle configured to receive a print cartridge and multiple electrical contacts configured to mate with corresponding electrical contacts on the print cartridge. In one implementation, the cartridge mount assembly further includes a vacuum connector configured to mate with a vacuum inlet included on the print cartridge. When the print cartridge is received in the receptacle, the print cartridge can form connections with the electrical contacts and with the vacuum connector of the receptacle at substantially the same timee.

    摘要翻译： 描述了包括压板和盒安装组件的流体沉积装置。 压板被构造成支撑待沉积流体的基底。 盒安装组件包括被配置为容纳打印盒和被配置为与打印盒上的相应电触点配合的多个电触点的插座。 在一个实施方式中，盒安装组件还包括配置成与包括在打印盒上的真空入口配合的真空连接器。 当打印墨盒被容纳在插座中时，打印墨盒可以与电触点和插座的真空连接器在大致相同的时间形成连接。