公开(公告)号：US20050062389A1

公开(公告)日：2005-03-24

申请号：US10833803

申请日：2004-04-28

Applicant: Jimmy Davidson ,  Wang Kang ,  David Kerns ,  Mickey Howell

Inventor： Jimmy Davidson ,  Wang Kang ,  David Kerns ,  Mickey Howell

IPC: G01L9/00 ,  G01P15/08 ,  H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J19/02 ,  H01J19/24 ,  H01J31/12

CPC classification number: H01J9/025 ,  B82Y10/00 ,  G01L9/0041 ,  G01L9/0047 ,  G01P15/0802 ,  G01P15/0894 ,  G01P2015/0828 ,  H01J1/3042 ,  H01J1/3044 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30407 ,  H01J2201/30457

Abstract: Diamond microtip field emitters are used in triode vacuum microelectronic devices, sensors and displays. Diamond triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.

Abstract translation: 金刚石微尖端场发射器用于三极管真空微电子器件，传感器和显示器。 可以制造具有整体阳极和栅格结构的金刚石三极管器件。 在制造工艺中在发射体上形成超尖尖，其中金刚石以两步沉积顺序沉积到模腔中。 在沉积金刚石期间，仔细控制碳石墨含量以增强排放性能。 尖端或发射器通过后制造处理来进一步提高性能。