摘要:
An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.
摘要:
A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.
摘要:
An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.
摘要:
An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.
摘要:
An actuator having a rotation central axis includes: an insulative frame; movable comb electrodes having first electrode teeth; a movable portion between the movable comb electrodes; supporting portions on the frame supporting the movable comb electrodes and the movable portion; fixed comb electrodes on the frame corresponding to the movable comb electrodes and provided with second electrode teeth; first elastic connecting portions connecting the movable comb electrodes to the supporting portions so each movable comb electrode can rotate around the rotation central axis; and second elastic connecting portions connecting the movable portion to the movable comb electrodes so that the movable portion can rotate around the rotation central axis. Each movable comb electrode is driven by an alternating voltage between each fixed comb electrode and movable comb electrode. Part of the first electrode teeth overlaps part of the second electrode teeth when no alternating voltage is applied.
摘要:
An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
摘要:
An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11; a second mass portion 2 provided between the pair of first mass portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of first mass portions 1, 11 and the second mass portion 2; at least a pair of first elastic connecting portions 4, 4 which respectively connect the first mass portions 1, 11 to the supporting portions 3, 3 so that each of the first mass portions 1, 11 can rotate with respect to the supporting portions 3, 3; and at least a pair of second elastic connecting portions 5, 5 which respectively connect the second mass portion 2 to the first mass portions 1, 11 so that the second mass portion 2 can rotate with respect to the first mass portions 1, 11. Each of the first mass portions 1, 11 is driven by the application of an alternating voltage, causing the second mass portion 2 to rotate.
摘要:
An actuator of the type employing a two-degree-of-freedom vibration system includes a first mass portion, a second mass portion, a pair of supporting portions, as least a pair of first elastic connecting portions which connects the first mass portion to the supporting portion so that the first mass portion can rotate with respect to the supporting portion, and at least a pair of second elastic connecting portions which connects the second mass portion to the first mass portion so that the second mass portion can rotate with respect to the first mass portion. The first mass portion is driven by the application of an alternating voltage, causing the second mass portion to rotate, and the frequency of the alternating voltage is set so as to be substantially the same as a lower resonance frequency of resonance frequencies of the two-degree-of-freedom vibration system at which the first mass portion and the second mass portion resonate. This makes it possible to provide the actuator capable of operating at high speed and at low voltage and achieving a large rotation angle.
摘要:
An optical deflector includes a mirror configured to reflect light; a pair of support portions each having an end connected to the mirror, and configured to support the mirror; first actuators connected to the respective support portions, and configured to deform the support portions so as to cause the mirror to oscillate about a first axis; a movable frame configured to support the first actuators; and second actuators connected to the movable frame and disposed opposite to the first actuators, with the support portions being interposed between the first actuators and the second actuators. The second actuators are not connected to the support portions. The first actuators and the second actuators bend and deform in the same direction.
摘要:
A physical quantity sensor includes a base substrate, a movable part located on the base substrate and provided on a principal surface of the base substrate, a movable electrode part provided in the movable part, and a fixed electrode part provided on the principal surface of the base substrate and located to be opposed to a movable electrode finger, and the fixed electrode part is connected to fixed electrode wiring provided at the principal surface side of the base substrate, the movable electrode part is connected to movable electrode wiring provided at the principal surface side of the base substrate, and a shield part is provided between the fixed electrode wiring and the movable electrode wiring.