PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

    公开(公告)号:US20130042684A1

    公开(公告)日:2013-02-21

    申请号:US13569580

    申请日:2012-08-08

    申请人: Mitsuhiro YODA

    发明人: Mitsuhiro YODA

    IPC分类号: G01P15/02

    CPC分类号: G01P15/125 G01P2015/0831

    摘要: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

    FUNCTIONAL ELEMENT, SENSOR ELEMENT, ELECTRONIC APPARATUS, AND METHOD FOR PRODUCING A FUNCTIONAL ELEMENT
    2.
    发明申请
    FUNCTIONAL ELEMENT, SENSOR ELEMENT, ELECTRONIC APPARATUS, AND METHOD FOR PRODUCING A FUNCTIONAL ELEMENT 有权
    功能元件,传感器元件,电子设备和生产功能元件的方法

    公开(公告)号:US20120267150A1

    公开(公告)日:2012-10-25

    申请号:US13449619

    申请日:2012-04-18

    IPC分类号: H05K1/09 B32B38/00 H05K1/00

    摘要: A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.

    摘要翻译: 一种功能元件,包括具有主表面的基底,设置在主表面上的凹槽部分(第一凹槽部分,第二凹槽部分)和固定电极部分(第一固定电极指,第二固定电极指) 横跨基板上的凹槽部分,其中在凹槽部分中,通过使用基板和固定电极部分中的至少一个形成的凸起部分设置在与固定电极部分重叠的位置,平面图中,凸起 部分具有接合表面(端面),在接合表面上布置布线(第一布线,第二布线),并且基板和固定电极部分与夹在基板之间的布线相连接 和固定电极部。

    Actuator, optical scanner and image forming device
    3.
    发明授权
    Actuator, optical scanner and image forming device 有权
    执行器,光学扫描仪和图像形成装置

    公开(公告)号:US08179583B2

    公开(公告)日:2012-05-15

    申请号:US12712324

    申请日:2010-02-25

    申请人: Mitsuhiro Yoda

    发明人: Mitsuhiro Yoda

    IPC分类号: G02B26/08

    摘要: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.

    摘要翻译: 致动器包括具有板形的可动板,可弹性变形并支撑可旋转的可动板的一对轴向部分,以及张力调节器,调节该对轴向部件的轴向上的张力,并包括扭转轴, 与所述轴向部件中的一个共同地或一体地形成并且与所述轴向部件的轴向方向垂直地设置,以及驱动源,其使所述扭转轴线扭转变形,其中所述扭转轴线通过所述驱动源的作用而扭转变形,并且 通过调整一对轴向部分的张力来调节该对轴向部件的弹簧常数。

    ACTUATOR CAPABLE OF DRIVING WITH LARGE ROTATIONAL ANGLE OR LARGE DEFLECTION ANGLE
    4.
    发明申请
    ACTUATOR CAPABLE OF DRIVING WITH LARGE ROTATIONAL ANGLE OR LARGE DEFLECTION ANGLE 有权
    具有大转角或大偏角的驾驶员

    公开(公告)号:US20100079835A1

    公开(公告)日:2010-04-01

    申请号:US12629957

    申请日:2009-12-03

    IPC分类号: G02B26/08 H02N11/00

    CPC分类号: G02B26/0841 H02N1/006

    摘要: An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving portions 1, 11 and the movable portion 2; a pair of first elastic connecting portions 4, 4 which respectively connect the pair of driving portions 1, 11 to the pair of supporting portions 3, 3 so that each of the driving portions 1, 11 can rotate with respect to the supporting portions 3, 3; and a pair of second elastic connecting portions 5, 5 which respectively connect the movable portion 2 to the pair of driving portions 1, 11 so that the movable portion 2 can rotate in accordance with the rotation of the pair of driving portions 1, 11.

    摘要翻译: 致动器100包括:彼此间隔开的一对驱动部分1,11; 设置在所述一对驱动部1,11之间的可动部2; 一对用于支撑一对驱动部分1,11和可移动部分2的支撑部分3,3; 分别将一对驱动部1,11分别连接到一对支撑部3,3的一对第一弹性连接部4,4,使得各驱动部1,11能够相对于支撑部3旋转, 3; 以及分别将可动部分2连接到一对驱动部分1,11的一对第二弹性连接部分5,5,使得可动部分2能够根据一对驱动部分1,11的旋转而旋转。

    Actuator
    5.
    发明授权
    Actuator 有权
    执行器

    公开(公告)号:US07420315B2

    公开(公告)日:2008-09-02

    申请号:US11300109

    申请日:2005-12-14

    申请人: Mitsuhiro Yoda

    发明人: Mitsuhiro Yoda

    IPC分类号: H02N1/00 G02B26/08

    CPC分类号: H02N1/002 G02B26/0841

    摘要: An actuator having a rotation central axis includes: an insulative frame; movable comb electrodes having first electrode teeth; a movable portion between the movable comb electrodes; supporting portions on the frame supporting the movable comb electrodes and the movable portion; fixed comb electrodes on the frame corresponding to the movable comb electrodes and provided with second electrode teeth; first elastic connecting portions connecting the movable comb electrodes to the supporting portions so each movable comb electrode can rotate around the rotation central axis; and second elastic connecting portions connecting the movable portion to the movable comb electrodes so that the movable portion can rotate around the rotation central axis. Each movable comb electrode is driven by an alternating voltage between each fixed comb electrode and movable comb electrode. Part of the first electrode teeth overlaps part of the second electrode teeth when no alternating voltage is applied.

    摘要翻译: 具有旋转中心轴的致动器包括:绝缘框架; 具有第一电极齿的活动梳状电极; 可动梳状电极之间的可动部分; 在支撑可动梳状电极和可动部分的框架上的支撑部分; 固定梳状电极在与可移动梳状电极相对应的框架上并具有第二电极齿; 第一弹性连接部分将可移动梳状电极连接到支撑部分,使得每个可移动梳状电极可围绕旋转中心轴线旋转; 以及第二弹性连接部分,其将可移动部分连接到可移动梳状电极,使得可移动部分能够围绕旋转中心轴线旋转。 每个可移动梳状电极由每个固定梳状电极和可动梳状电极之间的交流电压驱动。 当不施加交流电压时,第一电极齿的一部分与第二电极齿的一部分重叠。

    Optical tunable filter and method of manufacturing the same
    6.
    发明授权
    Optical tunable filter and method of manufacturing the same 有权
    光可调滤波器及其制造方法

    公开(公告)号:US07304800B2

    公开(公告)日:2007-12-04

    申请号:US11002441

    申请日:2004-12-02

    IPC分类号: H01P1/20

    CPC分类号: G02B26/001 G01J3/26

    摘要: An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.

    摘要翻译: 提供一种光可调谐滤光器,包括具有透光性的第一基板和具有可移动部分和可移动地支撑可移动部分并且具有比可移动部分更小的厚度的支撑部件,具有透光性并且与 第一基板,设置在可动部分和第二基板之间的第一间隙和第二间隙,干涉部分,通过第二间隙引起可动部分和第二基板之间的干涉;以及驱动部件,通过移动来改变第二间隙的间隔 通过利用第一间隙将可动部分移动到第二基板。

    Actuator
    7.
    发明授权
    Actuator 有权
    执行器

    公开(公告)号:US07095156B2

    公开(公告)日:2006-08-22

    申请号:US10976247

    申请日:2004-10-27

    申请人: Mitsuhiro Yoda

    发明人: Mitsuhiro Yoda

    IPC分类号: H02N1/00 G02B26/00

    CPC分类号: H02N1/006 H02K33/16

    摘要: An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11; a second mass portion 2 provided between the pair of first mass portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of first mass portions 1, 11 and the second mass portion 2; at least a pair of first elastic connecting portions 4, 4 which respectively connect the first mass portions 1, 11 to the supporting portions 3, 3 so that each of the first mass portions 1, 11 can rotate with respect to the supporting portions 3, 3; and at least a pair of second elastic connecting portions 5, 5 which respectively connect the second mass portion 2 to the first mass portions 1, 11 so that the second mass portion 2 can rotate with respect to the first mass portions 1, 11. Each of the first mass portions 1, 11 is driven by the application of an alternating voltage, causing the second mass portion 2 to rotate.

    摘要翻译: 采用二自由度振动系统的致动器100包括:一对第一质量部分1,11; 设置在所述一对第一质量部分11,11之间的第二质量部分2; 一对用于支撑一对第一质量部分1,11和第二质量部分2的支撑部分3,3; 至少一对第一弹性连接部分4,4分别将第一质量部分11,11连接到支撑部分3,3,使得第一质量部分1,11可以相对于支撑部分3旋转, 3; 以及至少一对第二弹性连接部5,5,其分别将第二质量部2与第一质量部1,11连接,使得第二质量部2能够相对于第一质量部1,11旋转。 通过施加交流电压驱动第一质量部分11,11中的每一个,使第二质量部分2旋转。

    Actuator
    8.
    发明申请
    Actuator 有权
    执行器

    公开(公告)号:US20050088715A1

    公开(公告)日:2005-04-28

    申请号:US10934331

    申请日:2004-09-03

    申请人: Mitsuhiro Yoda

    发明人: Mitsuhiro Yoda

    摘要: An actuator of the type employing a two-degree-of-freedom vibration system includes a first mass portion, a second mass portion, a pair of supporting portions, as least a pair of first elastic connecting portions which connects the first mass portion to the supporting portion so that the first mass portion can rotate with respect to the supporting portion, and at least a pair of second elastic connecting portions which connects the second mass portion to the first mass portion so that the second mass portion can rotate with respect to the first mass portion. The first mass portion is driven by the application of an alternating voltage, causing the second mass portion to rotate, and the frequency of the alternating voltage is set so as to be substantially the same as a lower resonance frequency of resonance frequencies of the two-degree-of-freedom vibration system at which the first mass portion and the second mass portion resonate. This makes it possible to provide the actuator capable of operating at high speed and at low voltage and achieving a large rotation angle.

    摘要翻译: 采用二自由度振动系统的致动器包括第一质量部分,第二质量部分,一对支撑部分,至少一对第一弹性连接部分,其将第一质量部分连接到 支撑部分,使得第一质量部分可以相对于支撑部分旋转;以及至少一对第二弹性连接部分,其将第二质量部分连接到第一质量部分,使得第二质量部分可相对于第一质量部分旋转 第一质量部分。 通过施加交流电压来驱动第一质量部分,使得第二质量部分旋转,并且将交流电压的频率设定为与二维谐振频率的共振频率的较低共振频率基本相同, 自由度振动系统,其中第一质量部分和第二质量部分共振。 这使得能够提供能够在高速和低电压下操作并且实现大的旋转角度的致动器。

    Physical quantity sensor and electronic apparatus
    10.
    发明授权
    Physical quantity sensor and electronic apparatus 有权
    物理量传感器和电子设备

    公开(公告)号:US09310393B2

    公开(公告)日:2016-04-12

    申请号:US13569493

    申请日:2012-08-08

    申请人: Mitsuhiro Yoda

    发明人: Mitsuhiro Yoda

    摘要: A physical quantity sensor includes a base substrate, a movable part located on the base substrate and provided on a principal surface of the base substrate, a movable electrode part provided in the movable part, and a fixed electrode part provided on the principal surface of the base substrate and located to be opposed to a movable electrode finger, and the fixed electrode part is connected to fixed electrode wiring provided at the principal surface side of the base substrate, the movable electrode part is connected to movable electrode wiring provided at the principal surface side of the base substrate, and a shield part is provided between the fixed electrode wiring and the movable electrode wiring.

    摘要翻译: 物理量传感器包括基底基板,位于基底基板上并设置在基底基板的主表面上的可动部分,设置在可动部分中的可动电极部分和设在该基体基板的主表面上的固定电极部分 并且被定位成与可动电极指相对,并且固定电极部分连接到设置在基底基板的主表面侧的固定电极布线,可动电极部分连接到设在主表面上的可动电极布线 并且在固定电极布线和可动电极布线之间设置有屏蔽部。