公开(公告)号：US09182421B2

公开(公告)日：2015-11-10

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5747 ,  G01C19/574

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。

公开(公告)号：US08683864B2

公开(公告)日：2014-04-01

申请号：US13058862

申请日：2009-08-05

申请人： Munenori Degawa ,  Heewon Jeong

发明人： Munenori Degawa ,  Heewon Jeong

IPC分类号： G01P15/125 ,  G01C19/56

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数 彼此抵消。

公开(公告)号：US20110138912A1

公开(公告)日：2011-06-16

申请号：US13058862

申请日：2009-08-05

申请人： Munenori Degawa ,  Heewon Jeong

发明人： Munenori Degawa ,  Heewon Jeong

IPC分类号： G01C19/56

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数 彼此抵消。

公开(公告)号：US20130098152A1

公开(公告)日：2013-04-25

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。