公开(公告)号：US20130098152A1

公开(公告)日：2013-04-25

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。

公开(公告)号：US09182421B2

公开(公告)日：2015-11-10

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5747 ,  G01C19/574

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。

公开(公告)号：US08683864B2

公开(公告)日：2014-04-01

申请号：US13058862

申请日：2009-08-05

申请人： Munenori Degawa ,  Heewon Jeong

发明人： Munenori Degawa ,  Heewon Jeong

IPC分类号： G01P15/125 ,  G01C19/56

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数 彼此抵消。

公开(公告)号：US20110138912A1

公开(公告)日：2011-06-16

申请号：US13058862

申请日：2009-08-05

申请人： Munenori Degawa ,  Heewon Jeong

发明人： Munenori Degawa ,  Heewon Jeong

IPC分类号： G01C19/56

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数 彼此抵消。

公开(公告)号：US09279827B2

公开(公告)日：2016-03-08

申请号：US13976372

申请日：2011-11-24

申请人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

发明人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P21/00 ,  G01C19/5776 ,  G01C21/16

CPC分类号： G01P21/00 ,  G01C19/5776 ,  G01C21/16

摘要： Reliability and accuracy of a sensor are secured while adjustment cost of a sensor module is suppressed. A signal component analysis part 10 receives a signal output from a signal processing part 7 before passing through a low-pass filter 8, analyzes whether or not application of a fragile frequency with respect to a physical quantity is equal to or more than a threshold level, if the application of the fragile frequency is equal to or more than the threshold level, outputs output stop signals to output signal control parts 9, 16. The output signal control parts 9, 16 receive control signals output from the signal component analysis part 10, and outputs an acceleration signal and a physical quantity signal from which noise has been removed by the low-pass filters 8, 15 through the signal processing parts 7, 14.

摘要翻译： 确保传感器模块的调整成本得到抑制，从而确保传感器的可靠性和精度。 信号分量分析部分10在通过低通滤波器8之前接收从信号处理部分7输出的信号，分析相对于物理量的脆弱频率的施加是否等于或大于阈值水平 如果脆弱频率的应用等于或大于阈值电平，则将输出停止信号输出到输出信号控制部9,16。输出信号控制部9,16接收从信号分量分析部10输出的控制信号 并且通过信号处理部件7,14输出通过低通滤波器8,15除去噪声的加速度信号和物理量信号。

公开(公告)号：US09151776B2

公开(公告)日：2015-10-06

申请号：US13983828

申请日：2012-01-10

申请人： Heewon Jeong ,  Masahide Hayashi

发明人： Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01C19/5719 ,  G01P15/125 ,  G01P15/08 ,  G01C19/5733 ,  G01C19/5726 ,  H01L29/84 ,  G01C19/5769

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5733 ,  G01C19/5769 ,  G01P15/0802 ,  G01P2015/0814 ,  H01L29/84

摘要： An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor.A combined sensor according to the invention includes first and second movable portions and first and second dummy portions provided around the first and second movable portions, which are formed in a layer of a laminated substrate. The first dummy portion and the second dummy portion are electrically separated from each other. A first potential is applied to the first movable portion and the first dummy portion and a second potential is applied to the second movable portion and the second dummy portion (see FIG. 2).

摘要翻译： 本发明的目的是提供一种组合传感器，其能够抑制由电位差产生的静电力的影响，并且防止S / N比的降低或传感器的灵敏度的变化。 根据本发明的组合传感器包括第一和第二可移动部分以及设置在第一和第二可移动部分周围的第一和第二虚拟部分，其形成在层压基板的层中。 第一虚拟部分和第二虚拟部分彼此电分离。 第一电位施加到第一可动部和第一虚拟部，第二电位施加到第二可动部和第二虚拟部（参照图2）。

公开(公告)号：US09229025B2

公开(公告)日：2016-01-05

申请号：US13811950

申请日：2011-08-08

申请人： Kiyoko Yamanaka ,  Heewon Jeong ,  Toshiaki Nakamura ,  Masahide Hayashi

发明人： Kiyoko Yamanaka ,  Heewon Jeong ,  Toshiaki Nakamura ,  Masahide Hayashi

IPC分类号： G01P5/08 ,  G01P3/44 ,  G01P15/125 ,  G01C19/5747 ,  G01P21/00 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01C19/5747 ,  G01P15/0802 ,  G01P21/00 ,  G01P2015/0814

摘要： In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).

摘要翻译： 为了提供一种惯性传感器，即使在出现突发噪声的不利环境下也能够抑制错误的诊断，惯性传感器设置有可动部（105），第一检测单元（C1，C2） 通过施加诊断信号对可动部（105）进行强制振动的强制振动装置（503，C3，C4）;物理量计算部（502），用于计算物理量 来自第一检测单元（C1，C2）的检测信号和用于通过经由第一检测单元（C1，C2）获得的诊断信号来确定物理量的异常的存在或不存在的异常确定单元（504） ，并且在车辆内使用，惯性传感器还包括安装在同一车辆中并连接到异常判定单元（504）的第二传感器（510）。

公开(公告)号：US20140260612A1

公开(公告)日：2014-09-18

申请号：US14353635

申请日：2011-11-28

申请人： Takanori Aono ,  Kengo Suzuki ,  Masahide Hayashi ,  Heewon Jeong

发明人： Takanori Aono ,  Kengo Suzuki ,  Masahide Hayashi ,  Heewon Jeong

IPC分类号： G01C19/5705

CPC分类号： G01C19/5705 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00285 ,  G01C19/5783 ,  G01P15/0802 ,  G01P2015/088

摘要： The disclosure provides a composite sensor with high reliability and a method for manufacturing the same. A moving body of an acceleration sensor and an oscillator of an angular velocity sensor are provided on the same sensor wafer, while being partitioned by a wall, and a cap wafer is formed to have a gap that corresponds to each of the sensors. A through hole and a bump are formed in a sensor sealing portion, the acceleration sensor is sealed in an air atmosphere in a first sealing process, and in a second sealing process, the angular velocity sensor is sealed by bringing the sensors and the cap into contact with each other and joining the sensors and the cap in a vacuum atmosphere. Thereafter, a composite sensor wafer is cut, a circuit board and a wiring board are mounted thereon, and a composite sensor is formed.

摘要翻译： 本公开提供了具有高可靠性的复合传感器及其制造方法。 加速度传感器的移动体和角速度传感器的振荡器设置在相同的传感器晶片上，同时由壁分隔，并且盖晶片形成为具有与每个传感器对应的间隙。 在传感器密封部中形成有贯通孔和凸块，在第一密封工序中将加速度传感器密封在空气气氛中，在第二密封工序中，通过将传感器和盖体 彼此接触并在真空环境中连接传感器和盖子。 此后，将复合传感器晶片切割，电路板和布线板安装在其上，并且形成复合传感器。

公开(公告)号：US20130312517A1

公开(公告)日：2013-11-28

申请号：US13983828

申请日：2012-01-10

申请人： Heewon Jeong ,  Masahide Hayashi

发明人： Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5733 ,  G01C19/5769 ,  G01P15/0802 ,  G01P2015/0814 ,  H01L29/84

摘要： An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor.A combined sensor according to the invention includes first and second movable portions and first and second dummy portions provided around the first and second movable portions, which are formed in a layer of a laminated substrate. The first dummy portion and the second dummy portion are electrically separated from each other. A first potential is applied to the first movable portion and the first dummy portion and a second potential is applied to the second movable portion and the second dummy portion (see FIG. 2).

摘要翻译： 本发明的目的是提供一种组合传感器，其能够抑制由电位差产生的静电力的影响，并且防止S / N比的降低或传感器的灵敏度的变化。 根据本发明的组合传感器包括第一和第二可移动部分以及设置在第一和第二可移动部分周围的第一和第二虚拟部分，其形成在层压基板的层中。 第一虚拟部分和第二虚拟部分彼此电分离。 第一电位施加到第一可动部和第一虚拟部，第二电位施加到第二可动部和第二虚拟部（参照图2）。

公开(公告)号：US08427177B2

公开(公告)日：2013-04-23

申请号：US12912580

申请日：2010-10-26

申请人： Heewon Jeong ,  Kiyoko Yamanaka ,  Yasushi Goto ,  Toshiaki Nakamura ,  Masahide Hayashi

发明人： Heewon Jeong ,  Kiyoko Yamanaka ,  Yasushi Goto ,  Toshiaki Nakamura ,  Masahide Hayashi

IPC分类号： G01R27/26 ,  G01R27/08

CPC分类号： G01P21/00 ,  G01C19/5719 ,  G01P15/125 ,  G01P2015/0814

摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.

摘要翻译： 提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。 构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。 也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。 另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。