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公开(公告)号：US20100117763A1
公开(公告)日：2010-05-13
申请号：US12528070
申请日：2008-02-19
申请人： Atsushi Suwa , Koji Sasabe , Futoshi Nishimura , Yoshiki Hayasaki , Tomoaki Matsushima , Sibei Xiong , Takaaki Yoshihara , Norihiro Yamauchi , Takeo Shirai
发明人： Atsushi Suwa , Koji Sasabe , Futoshi Nishimura , Yoshiki Hayasaki , Tomoaki Matsushima , Sibei Xiong , Takaaki Yoshihara , Norihiro Yamauchi , Takeo Shirai
摘要： A bandpass filter includes a combination of a BAW filter and a patterned planar filter with stubs. The BAW filter is composed of a plurality of piezoelectric resonators to give a specific frequency bandpass, while the planer filter is configured to attenuate frequencies near and outside the bandpass. The resonators are connected in a ladder configuration between a first signal transmission path and a ground. The planar filter includes a strip line formed on a dielectric layer to define a second signal transmission path. The BAW filter and the planar filter are formed on a common substrate with the first and second transmission paths connected to each other. The BAW filter, in combination with the patterned planar filter added with the stub, can improve a deep near-band rejection inherent to the BAW filter, exhibiting an excellent out-of-band rejection over certain adjacent frequency ranges outside of the bandpass, and therefore give a sharp and wide bandpass.
摘要翻译： 带通滤波器包括BAW滤波器和具有短截线的图案化平面滤波器的组合。 BAW滤波器由多个压电谐振器组成，以提供特定的频带通量，而平面滤波器被配置为衰减带通附近和外的频率。 谐振器以第一信号传输路径和地之间的梯形结构连接。 平面滤波器包括形成在电介质层上以限定第二信号传输路径的带状线。 BAW滤波器和平面滤波器形成在公共基板上，其中第一和第二传输路径彼此连接。 BAW滤波器与添加有短截线的图形平面滤波器组合可以改善BAW滤波器固有的深近带阻抗，在带通外的某些相邻频率范围内表现出优异的带外抑制，以及 因此给出一个清晰而宽广的带通。
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2.发明申请VIBRATION POWER GENERATION ELEMENT AND VIBRATION POWER GENERATION DEVICE INCLUDING SAME 审中-公开振动发电元件和振动发电装置，包括它们公开(公告)号：US20130162106A1
公开(公告)日：2013-06-27
申请号：US13820849
申请日：2011-09-28
IPC分类号： H02N2/18
CPC分类号： H01L41/1136 , H02N2/181 , H02N2/186
摘要： A vibration power generation element includes a base substrate having a support portion and a cantilever portion, and a power generation unit for generating alternating current power in response to vibration of the cantilever portion. The power generation unit includes: a lower electrode formed on one surface side of the base substrate so as to overlap the cantilever portion; a first piezoelectric layer formed on an opposite side of the lower electrode from the cantilever portion; an intermediate electrode formed on an opposite side of the first piezoelectric layer from the lower electrode; a second piezoelectric layer formed on an opposite side of the intermediate electrode from the first piezoelectric layer; and an upper electrode formed on an opposite side of the second piezoelectric layer from the intermediate electrode.
摘要翻译： 振动发电元件包括具有支撑部分和悬臂部分的基底基板，以及用于响应于悬臂部分的振动产生交流电力的发电单元。 所述发电单元包括：形成在所述基底基板的一个表面侧上以与所述悬臂部分重叠的下电极; 第一压电层，形成在所述下电极的与所述悬臂部分相反的一侧; 中间电极，形成在与所述下电极的所述第一压电层相反的一侧上; 第二压电层，形成在所述中间电极与所述第一压电层相反的一侧上; 以及形成在所述第二压电层的与所述中间电极相反的一侧的上电极。
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公开(公告)号：US20130032906A1
公开(公告)日：2013-02-07
申请号：US13642208
申请日：2011-04-18
IPC分类号： H01L29/84
CPC分类号： H01L41/1136 , B81B2201/032 , B81C1/00658 , G01J5/04 , G01J5/046 , G01J5/34 , G01P15/09 , G01P2015/0828 , H01L37/02 , H01L41/0815 , H02N2/186
摘要： A ferroelectric device comprises: a silicon substrate (a first substrate); a lower electrode (a first electrode) formed on one surface side of first substrate; a ferroelectric film formed on a surface of lower electrode opposite to first substrate side; and an upper electrode (a second electrode) formed on a surface of ferroelectric film opposite to lower electrode side. The ferroelectric film is formed of a ferroelectric material with a lattice constant difference from silicon. The ferroelectric device further comprises a shock absorbing layer formed of a material with better lattice matching with ferroelectric film than silicon and provided directly below the lower electrode. The first substrate is provided with a cavity that exposes a surface of shock absorbing layer opposite to lower electrode side.
摘要翻译： 铁电体器件包括：硅衬底（第一衬底）; 形成在第一基板的一个表面侧的下电极（第一电极） 形成在与第一基板侧相反的下电极的表面上的铁电体膜; 以及形成在与下电极侧相反的铁电体膜的表面上的上电极（第二电极）。 铁电体膜由与硅形成的晶格常数不等的铁电体形成。 所述铁电体元件还包括由比铁强电介质膜更好的晶格匹配的材料形成的冲击吸收层，并且直接设置在下电极的下方。 第一基板设置有暴露与下电极侧相对的减震层的表面的空腔。
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公开(公告)号：US08551863B2
公开(公告)日：2013-10-08
申请号：US13638129
申请日：2011-03-30
CPC分类号： G01J5/34 , H01L28/56 , H01L37/02 , H01L41/1136 , H01L41/313 , H01L41/319
摘要： A seed layer having a predetermined pattern is formed on a side of one surface of a second substrate, and a ferroelectric layer is formed on the side of the one surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded via a bonding layer. A laser beam with a predetermined wavelength is irradiated from a side of other surface of the second substrate to transfer a ferroelectric film, which overlaps with the seed layer, of the ferroelectric layer and the seed layer onto the side of said one surface of the first substrate. The laser beam passes through the second substrate, is reflected by the seed layer, and is absorbed by a second portion of the ferroelectric layer. The second portion does not overlap with the seed layer.
摘要翻译： 在第二基板的一个表面的一侧形成具有预定图案的种子层，并且在第二基板的一个表面侧形成铁电层。 在铁电层上形成下电极，通过接合层将下电极和第一基板接合。 从第二基板的另一面的一侧照射具有预定波长的激光束，以将强电介质层和种子层与种子层重叠的强电介质膜与第一基板的所述一个表面的一侧 基质。 激光束通过第二基板，被种子层反射，并被铁电层的第二部分吸收。 第二部分不与种子层重叠。
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公开(公告)号：US20130155631A1
公开(公告)日：2013-06-20
申请号：US13819069
申请日：2012-01-31
CPC分类号： H05K1/18 , H01L41/042 , H01L41/1136 , H02N2/181 , H02N2/186
摘要： The power generating device has a power generating section including a piezoelectric body; and a plurality of electrode pairs each constituted by a pair of electrodes placed on opposite sides of the piezoelectric body with regard to a thickness direction thereof to define a functional section therebetween, each of the functional sections is cooperated with the related electrode pair to define a power generating element. A plurality of the power generating elements includes a first and second power generating elements that give a polarization orientation opposite to each other in the thickness direction. The first and second power generating elements have the corresponding electrodes that are connected to each other by means of a wiring member on the same surface of the piezoelectric body with regard to the thickness direction thereof, such that all of the plurality of the power generating elements are connected in series.
摘要翻译： 发电装置具有包括压电体的发电部， 以及多个电极对，每个电极对由相对于压电体的厚度方向设置在压电体的相对侧上的一对电极构成，以在其间限定功能部分，每个功能部分与相关电极对配合，以限定一个 发电元件。 多个发电元件包括在厚度方向上给出彼此相反的偏振方向的第一和第二发电元件。 第一和第二发电元件具有通过相对于压电体的厚度方向在压电体的相同表面上的布线构件彼此连接的相应电极，使得所有多个发电元件 串联连接。
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公开(公告)号：US20130038175A1
公开(公告)日：2013-02-14
申请号：US13642331
申请日：2011-04-28
IPC分类号： H02N2/18 , H01L41/113
CPC分类号： H02N2/188 , B81B3/0078 , H01L41/1136
摘要： A vibration power generation device comprising: a frame section; a weight section, a flexure section; and a power generation section. The weight section is provided inside the frame section. The flexure section is joined between the frame section and the weight section, and is configured to bend in response to a vibration of the weight section. The power generation section is composed of a laminate on one surface of the flexure section. The laminate has a lower electrode, a piezoelectric layer and an upper electrode which are laminated in this order from the abovementioned one surface. The power generation section is configured to generate an alternating-current voltage in response to an oscillation of the weight section. A resonance frequency adjustment means is provided between the frame section and the weight section.
摘要翻译： 一种振动发电装置，包括：框架部分; 重物部分，弯曲部分; 和发电部。 重量部分设置在框架部分内。 挠曲部分连接在框架部分和重物部分之间，并被构造成响应于重量部分的振动而弯曲。 发电部由挠曲部的一个面上的层叠体构成。 层压体具有从上述一个表面依次层叠的下电极，压电层和上电极。 发电部被配置为响应于重量部的振动而产生交流电压。 在框架部分和重量部分之间设置共振频率调节装置。
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公开(公告)号：US08098118B2
公开(公告)日：2012-01-17
申请号：US12528070
申请日：2008-02-19
申请人： Atsushi Suwa , Koji Sasabe , Futoshi Nishimura , Yoshiki Hayasaki , Tomoaki Matsushima , Sibei Xiong , Takaaki Yoshihara , Norihiro Yamauchi , Takeo Shirai
发明人： Atsushi Suwa , Koji Sasabe , Futoshi Nishimura , Yoshiki Hayasaki , Tomoaki Matsushima , Sibei Xiong , Takaaki Yoshihara , Norihiro Yamauchi , Takeo Shirai
摘要： A bandpass filter includes a combination of a BAW filter and a patterned planar filter with stubs. The BAW filter is composed of a plurality of piezoelectric resonators to give a specific frequency bandpass, while the planer filter is configured to attenuate frequencies near and outside the bandpass. The resonators are connected in a ladder configuration between a first signal transmission path and a ground. The planar filter includes a strip line formed on a dielectric layer to define a second signal transmission path. The BAW filter and the planar filter are formed on a common substrate with the first and second transmission paths connected to each other. The BAW filter, in combination with the patterned planar filter added with the stub, can improve a deep near-band rejection inherent to the BAW filter, exhibiting an excellent out-of-band rejection over certain adjacent frequency ranges outside of the bandpass, and therefore give a sharp and wide bandpass.
摘要翻译： 带通滤波器包括BAW滤波器和具有短截线的图案化平面滤波器的组合。 BAW滤波器由多个压电谐振器组成，以提供特定的频带通量，而平面滤波器被配置为衰减带通附近和外的频率。 谐振器以第一信号传输路径和地之间的梯形结构连接。 平面滤波器包括形成在电介质层上以限定第二信号传输路径的带状线。 BAW滤波器和平面滤波器形成在公共基板上，其中第一和第二传输路径彼此连接。 BAW滤波器与添加有短截线的图形平面滤波器组合可以改善BAW滤波器固有的深近带阻抗，在带通外的某些相邻频率范围内表现出优异的带外抑制，以及 因此给出一个清晰而宽广的带通。
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8.发明申请VIBRATION POWER GENERATING ELEMENT AND VIBRATION POWER GENERATING DEVICE USING SAME 审中-公开振动发电元件和使用相同的振动发电装置公开(公告)号：US20130285507A1
公开(公告)日：2013-10-31
申请号：US13818483
申请日：2011-08-23
IPC分类号： H01L41/113
CPC分类号： H01L41/1136 , H02N2/186
摘要： A vibration power generating element comprises: a substrate provided with a supporting part and a cantilever that is swingably supported by the supporting part; and a power generation part formed at the cantilever and generating AC power in response to swing of the cantilever. The power generation part is provided with first and second piezoelectric converters apposed at a region that overlaps the cantilever at one surface side of the substrate. The vibration power generating element is further provided with a common electrode and individual electrodes. The common electrode is electrically connected to a lower electrode shared by the first and second piezoelectric converters. The individual electrodes are individually connected to upper electrodes of the first and second piezoelectric converters, respectively.
摘要翻译： 振动发电元件包括：基板，设置有由所述支撑部可摆动地支撑的支撑部和悬臂; 以及形成在悬臂处并响应于悬臂的摆动而产生AC电力的发电部。 发电部分设置有第一和第二压电转换器，其位于与衬底的一个表面侧处的悬臂重叠的区域。 振动发电元件还设置有公共电极和单独的电极。 公共电极电连接到由第一和第二压电转换器共享的下电极。 各个电极分别分别连接到第一和第二压电转换器的上电极。
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公开(公告)号：US20130023063A1
公开(公告)日：2013-01-24
申请号：US13638129
申请日：2011-03-30
IPC分类号： H01L21/30
CPC分类号： G01J5/34 , H01L28/56 , H01L37/02 , H01L41/1136 , H01L41/313 , H01L41/319
摘要： A seed layer having a predetermined pattern is formed on a side of one surface of a second substrate, and a ferroelectric layer is formed on the side of the one surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded via a bonding layer. A laser beam with a predetermined wavelength is irradiated from a side of other surface of the second substrate to transfer a ferroelectric film, which overlaps with the seed layer, of the ferroelectric layer and the seed layer onto the side of said one surface of the first substrate. The laser beam passes through the second substrate, is reflected by the seed layer, and is absorbed by a second portion of the ferroelectric layer. The second portion does not overlap with the seed layer.
摘要翻译： 在第二基板的一个表面的一侧形成具有预定图案的种子层，并且在第二基板的一个表面侧形成铁电层。 在铁电层上形成下电极，通过接合层将下电极和第一基板接合。 从第二基板的另一面的一侧照射具有预定波长的激光束，以将强电介质层和种子层与种子层重叠的强电介质膜与第一基板的所述一个表面的一侧 基质。 激光束通过第二基板，被种子层反射，并被铁电层的第二部分吸收。 第二部分不与种子层重叠。
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公开(公告)号：US20130020910A1
公开(公告)日：2013-01-24
申请号：US13639027
申请日：2011-04-28
CPC分类号： H01L41/1136
摘要： Disclosed is a vibration power generation device which is provided with: a frame section; a weight section provided inside the frame section; a flexure section that is joined between the frame section and the weight section and is configured to bend in response to a displacement of the weight section; and a power generation section that is located at least at the flexure section and configured to generate an alternating-current voltage in response to a vibration of the weight section. The frame section and the weight section are formed of a silicon substrate. The power generation section comprises, at its own surface, an elastic film formed of a resin material. The flexure section comprises the elastic film formed of the resin material having a Young's modulus smaller than that of silicon forming the frame section and the weight section.
摘要翻译： 公开了一种振动发电装置，其具备：框架部; 设置在所述框架部分内的重物部分; 弯曲部，其连接在所述框架部和所述配重部之间，并且构造成响应于所述重物部的位移而弯曲; 以及发电部，其至少位于所述挠曲部，并且被配置为响应于所述重量部的振动而产生交流电压。 框架部分和重量部分由硅衬底形成。 发电部在其自身的表面上包括由树脂材料形成的弹性膜。 弯曲部包括由树脂材料形成的弹性膜，其杨氏模量小于形成框架部分的硅的杨氏模量和重量部分。
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