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    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
    1.
    发明申请
    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD 审中-公开
    照明光学系统，曝光装置和曝光方法

    公开(公告)号：US20120236285A1

    公开(公告)日：2012-09-20

    申请号：US13482491

    申请日：2012-05-29

    申请人： Osamu TANITSU ,  Hirohisa TANAKA ,  Kenichi MURAMATSU ,  Norio KOMINE ,  Hisashi NISHINAGA ,  Tomoyuki MATSUYAMA ,  Takehito KUDO

    发明人： Osamu TANITSU ,  Hirohisa TANAKA ,  Kenichi MURAMATSU ,  Norio KOMINE ,  Hisashi NISHINAGA ,  Tomoyuki MATSUYAMA ,  Takehito KUDO

    IPC分类号： G03F7/20 ,  G03B27/72 ,  F21V9/14

    CPC分类号： G03F7/70566 ,  G03B27/42 ,  G03F7/70091

    摘要： An illumination optical system illuminates an irradiated surface with light supplied from a light source. The illumination optical system includes a diffractive optical element disposed in an optical path of linearly polarized light supplied from the light source. The diffractive optical element forms a multipole illumination field. including a plurality of illumination fields. The illumination optical system also includes an optical integrator that forms a multipole light source including a plurality of planar light sources with light that has passed through the multipole illumination field. The illumination optical system also includes a polarization optical member disposed in an illumination optical path and that sets a polarization direction of light that has passed through the multipole light source to a predetermined polarization direction.

    摘要翻译： 照明光学系统用从光源提供的光照射被照射的表面。 照明光学系统包括设置在从光源提供的线偏振光的光路中的衍射光学元件。 衍射光学元件形成多极照明场。 包括多个照明场。 照明光学系统还包括光学积分器，其形成包括已经穿过多极照明场的光的多个平面光源的多极光源。 照明光学系统还包括设置在照明光路中并将已经通过多极光源的光的偏振方向设定为预定偏振方向的偏振光学构件。

    Synthetic quartz glass member and method for producing the same
    4.
    发明申请
    Synthetic quartz glass member and method for producing the same 审中-公开
    合成石英玻璃构件及其制造方法

    公开(公告)号：US20050047986A1

    公开(公告)日：2005-03-03

    申请号：US10947366

    申请日：2004-09-23

    申请人： Masafumi Mizuguchi ,  Seishi Fujiwara ,  Norio Komine

    发明人： Masafumi Mizuguchi ,  Seishi Fujiwara ,  Norio Komine

    IPC分类号： C03B19/14 ,  C03C3/06 ,  C03C23/00 ,  C01B33/12

    CPC分类号： C03C3/06 ,  C03B19/1469 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C23/002 ,  C03C23/0025 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

    摘要： In a method for producing a quartz glass member, an F2 laser is radiated onto a sample obtained from a quartz glass base material under a predetermined condition to judge whether or not a peak intensity of H2 Raman scattering light is decreased by not less than 80% as compared with a peak intensity of H2 Raman scattering light obtained for a sample not irradiated with the F2 laser. If the peak intensity of H2 Raman scattering light is decreased by less than 80%, then it is judged that the laser resistance of the quartz glass base material is sufficient, and the synthetic quartz glass member is processed from the base material. The compaction of the sample is also measured.

    摘要翻译： 在石英玻璃构件的制造方法中，在预定条件下将F2激光照射到由石英玻璃基材获得的样品上，以判断H2拉曼散射光的峰值强度是否降低不小于80％ 与未用F2激光照射的样品获得的H2拉曼散射光的峰值强度相比。 如果H2拉曼散射光的峰强度降低小于80％，则判断石英玻璃基材的激光电阻是足够的，并且合成石英玻璃构件从基材加工。 也测量样品的压实度。

    Forming method of silica glass and forming apparatus thereof
    6.
    发明授权
    Forming method of silica glass and forming apparatus thereof 有权
    石英玻璃的成型方法及其成型装置

    公开(公告)号：US06505484B1

    公开(公告)日：2003-01-14

    申请号：US09671337

    申请日：2000-09-27

    申请人： Seishi Fujiwara ,  Norio Komine ,  Hiroki Jinbo

    发明人： Seishi Fujiwara ,  Norio Komine ,  Hiroki Jinbo

    IPC分类号： C03B1100

    CPC分类号： C03B32/00 ,  C03B11/08 ,  C03B19/1453 ,  C03B19/1469 ,  C03B20/00 ,  C03B2201/03

    摘要： A silica glass forming method is a method of pressing a synthetic silica bulk having at least a set of opposed surfaces, on the surfaces under a high temperature condition by a presser, wherein an elastic member with permeability is placed between the presser and the surfaces of the synthetic silica bulk pressed by the presser and wherein the synthetic silica bulk is pressed through the elastic member by the presser. This method is able to reduce bubbles remaining inside the synthetic glass formed product after the forming to a sufficiently small amount. Therefore, it becomes feasible to provide the method that permits high-yield production of silica glasses with excellent optical characteristics.

    摘要翻译： 二氧化硅玻璃的形成方法是通过压机在高温条件下的表面上压制具有至少一组相对面的合成二氧化硅体的方法，其中具有渗透性的弹性构件设置在压脚与表面之间 由压制机压制的合成二氧化硅体，并且其中合成二氧化硅体通过压机压靠弹性构件。 该方法能够将形成后的合成玻璃成形体中残留的气泡减少至足够小的量。 因此，提供允许高产量生产具有优异光学特性的二氧化硅玻璃的方法变得可行。

    Illumination optical system, exposure apparatus, and exposure method
    10.
    发明申请
    Illumination optical system, exposure apparatus, and exposure method 审中-公开
    照明光学系统，曝光装置和曝光方法

    公开(公告)号：US20100149511A1

    公开(公告)日：2010-06-17

    申请号：US12656822

    申请日：2010-02-17

    申请人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    发明人： Osamu Tanitsu ,  Hirohisa Tanaka ,  Kenichi Muramatsu ,  Norio Komine ,  Hisashi Nishinaga ,  Tomoyuki Matsuyama ,  Takehito Kudo

    IPC分类号： G03B27/72

    CPC分类号： G03F7/70566 ,  G03B27/42 ,  G03F7/70091

    摘要： An illumination optical system illuminates an irradiated surface with light supplied from a light source. The illumination optical system includes a diffractive optical element disposed in an optical path of linearly polarized light supplied from the light source. The diffractive optical element forms a multipole illumination field including a plurality of illumination fields. The illumination optical system also includes an optical integrator that forms a multipole light source including a plurality of planar light sources with light that has passed through the multipole illumination field. The illumination optical system also includes a polarization optical member disposed in an illumination optical path and that sets a polarization direction of light that has passed through the multipole light source to a predetermined polarization direction.

    摘要翻译： 照明光学系统用从光源提供的光照射被照射的表面。 照明光学系统包括设置在从光源提供的线偏振光的光路中的衍射光学元件。 衍射光学元件形成包括多个照明场的多极照明场。 照明光学系统还包括光学积分器，其形成包括已经穿过多极照明场的光的多个平面光源的多极光源。 照明光学系统还包括设置在照明光路中并将已经通过多极光源的光的偏振方向设定为预定偏振方向的偏振光学构件。