THREE-DIMENSIONAL FLASH MEMORY AIMED AT INTEGRATION, AND METHOD FOR MANUFACTURING SAME

    公开(公告)号:US20220319600A1

    公开(公告)日:2022-10-06

    申请号:US17636910

    申请日:2020-06-26

    摘要: Disclosed are a three-dimensional flash memory aimed at integration, and a method for manufacturing same. According to an embodiment, a three-dimensional flash memory comprises: multiple memory cell strings formed on a substrate so as to extend in a direction, each of the multiple memory cell strings comprising a channel layer and an electric charge storage layer surrounding the channel layer; multiple word lines connected perpendicularly to the multiple memory cell strings; and at least one intermediate wire layer formed at an intermediate point with regard to the direction in which the multiple memory cell strings are formed to extend, the at least one intermediate wire layer being selectively available as a source electrode or as a drain electrode with regard to each of the multiple memory cell strings. At least one of the multiple memory cell strings is formed in a free area secured among the multiple word lines as a result of inclusion of the at least one intermediate wire layer in the three-dimensional flash memory.