公开(公告)号：US09915522B1

公开(公告)日：2018-03-13

申请号：US14294540

申请日：2014-06-03

申请人： Peilin Jiang ,  Leonid Poslavsky

发明人： Peilin Jiang ,  Leonid Poslavsky

IPC分类号： G06F7/60 ,  G06F17/10 ,  G01B11/02 ,  G06F17/50

CPC分类号： G01B11/02 ,  G01B2210/56 ,  G06F17/5009 ,  H01L22/00

摘要： Provided are scatterometry techniques for evaluating a 3D diffracting structure. In one embodiment, a method involves providing a 3D spatial model of the diffracting structure and discretizing the model into a 3D spatial mesh. The method includes approximating 3D fields for each element of the 3D mesh using 3D spatial basis functions and generating a matrix including coefficients of the 3D spatial basis functions approximating the fields. The coefficients of the 3D spatial basis functions are computed and used in computing spectral information for the model. The computed spectral information for the model is compared with measured spectral information for the diffracting structure. If the model is a good model fit, the method involves determining a physical characteristic of the diffracting structure based on the model of the diffracting structure.

公开(公告)号：US08670948B2

公开(公告)日：2014-03-11

申请号：US13656487

申请日：2012-10-19

申请人： Hanyou Chu ,  Peilin Jiang

发明人： Hanyou Chu ,  Peilin Jiang

IPC分类号： G01N37/00

CPC分类号： G01N21/00 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/9501 ,  G03F7/705 ,  G03F7/70625

摘要： Provided are techniques for numerically integrating an intensity distribution function over a numerical aperture in a manner dependent on a determination of whether the numerical aperture spans a Rayleigh singularity. Where a singularity exists, Gaussian quadrature (cubature) is performed using a set of weights and points (nodes) that account for the effect of the Wood anomaly present within the aperture space. The numerical aperture may be divided into subregions separated by curves where the Wood anomaly condition is satisfied. Each subregion is then numerically integrated and a weighted sum of the subregion contributions is the estimate of the integral. Alternatively, generalized Gaussian quadrature (cubature) is performed where an analytical polynomial function which accounts for the effect of the Wood anomaly present within the aperture space is integrated. Points and nodes generated from a fit of the analytical polynomial function are then used for integration of the intensity distribution function.

摘要翻译： 提供了用于以取决于数值孔径是否跨越瑞利奇点的确定的方式将数值孔径上的强度分布函数数值积分的技术。 在存在奇异点的情况下，使用一组权重和点（节点）来执行高斯正交（立方体），这些权重和点（节点）表示存在于孔径空间内的木材异常的影响。 数值孔径可以分为由木材异常条件满足的曲线分开的子区域。 然后每个次区域数值整合，次区域会费的加权和是积分的估计。 或者，执行广义高斯正交（立方体），其中综合考虑了在孔隙空间内存在木材异常的影响的分析多项式函数。 然后将从分析多项式函数的拟合生成的点和节点用于强度分布函数的积分。

公开(公告)号：US20160135383A1

公开(公告)日：2016-05-19

申请号：US14901095

申请日：2013-11-22

申请人： Peilin JIANG

发明人： Peilin Jiang

IPC分类号： A01G1/06 ,  A01G1/00

CPC分类号： A01G2/30 ,  A01G9/022

摘要： Disclosed is a method for manufacturing an artificial plant, comprising: manufacturing a three-dimensional fixation frame, and burying a part of the three-dimensional fixation frame into the ground; providing a plurality of temporary annular growing zones, in a bottom-up manner, on an outer peripheral surface of a part of the three-dimensional fixation frame which is out of ground; grafting saplings in a preset shape, to form a grafted sapling unit; planting a plurality of the grafted sapling units in each of the plurality of temporary annular growing zones, and fixing the grafted sapling units onto the three-dimensional fixation frame; forming a re-grafted sapling unit by grafting the grafted sapling units of the adjacent temporary annular growing zones; and forming an artificial plant when the re-grafted sapling units mature after a preset period of time.

摘要翻译： 公开了一种制造人造植物的方法，包括：制造三维固定框架，并将一部分三维固定框架埋入地下; 在自下而上的多个临时环形生长区域中，在离开地面的三维固定框架的一部分的外周表面上; 以预设的形状移植树苗，形成嫁接树苗单元; 在多个临时环形生长区域的每一个中种植多个移植树苗单元，并将移植的树苗单元固定到三维固定框架上; 通过移植相邻的临时环形生长区的接枝树苗单元形成一个重新移植的树苗单元; 并且在重新移植的树苗单元在预设的时间段之后成熟时形成人造植物。

公开(公告)号：US08762100B1

公开(公告)日：2014-06-24

申请号：US13371317

申请日：2012-02-10

申请人： Hanyou Chu ,  Peilin Jiang ,  Joerg Bischoff

发明人： Hanyou Chu ,  Peilin Jiang ,  Joerg Bischoff

IPC分类号： G01B7/00 ,  G01N21/00

CPC分类号： G01N21/00 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/9501 ,  G03F7/705 ,  G03F7/70625

摘要： Provided are techniques for numerically integrating an intensity distribution function over a numerical aperture in a manner dependent on a determination of whether the numerical aperture spans a Rayleigh singularity. Where a singularity exists, Gaussian quadrature (cubature) is performed using a set of weights and points (nodes) that account for the effect of the Wood anomaly present within the aperture space. The numerical aperture may be divided into subregions separated by curves where the Wood anomaly condition is satisfied. Each subregion is then numerically integrated and a weighted sum of the subregion contributions is the estimate of the integral. Alternatively, generalized Gaussian quadrature (cubature) is performed where an analytical polynomial function which accounts for the effect of the Wood anomaly present within the aperture space is integrated. Points and nodes generated from a fit of the analytical polynomial function are then used for integration of the intensity distribution function.

公开(公告)号：US20130211760A1

公开(公告)日：2013-08-15

申请号：US13656487

申请日：2012-10-19

申请人： Hanyou CHU ,  Peilin JIANG

发明人： Hanyou CHU ,  Peilin JIANG

IPC分类号： G06F19/00

CPC分类号： G01N21/00 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/9501 ,  G03F7/705 ,  G03F7/70625

摘要： Provided are techniques for numerically integrating an intensity distribution function over a numerical aperture in a manner dependent on a determination of whether the numerical aperture spans a Rayleigh singularity. Where a singularity exists, Gaussian quadrature (cubature) is performed using a set of weights and points (nodes) that account for the effect of the Wood anomaly present within the aperture space. The numerical aperture may be divided into subregions separated by curves where the Wood anomaly condition is satisfied. Each subregion is then numerically integrated and a weighted sum of the subregion contributions is the estimate of the integral. Alternatively, generalized Gaussian quadrature (cubature) is performed where an analytical polynomial function which accounts for the effect of the Wood anomaly present within the aperture space is integrated. Points and nodes generated from a fit of the analytical polynomial function are then used for integration of the intensity distribution function.

摘要翻译： 提供了用于以取决于数值孔径是否跨越瑞利奇点的确定的方式将数值孔径上的强度分布函数数值积分的技术。 在存在奇异点的情况下，使用一组权重和点（节点）来执行高斯正交（立方体），这些权重和点（节点）表示存在于孔径空间内的木材异常的影响。 数值孔径可以分为由木材异常条件满足的曲线分开的子区域。 然后每个次区域数值整合，次区域会费的加权和是积分的估计。 或者，执行广义高斯正交（立方体），其中综合考虑了在孔隙空间内存在木材异常的影响的分析多项式函数。 然后将从分析多项式函数的拟合生成的点和节点用于强度分布函数的积分。

公开(公告)号：US20130158948A1

公开(公告)日：2013-06-20

申请号：US13712734

申请日：2012-12-12

申请人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Phillip D. Flanner, III

发明人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Phillip D. Flanner, III

IPC分类号： G01B11/00 ,  G06F17/16

CPC分类号： G01B11/00 ,  G01B11/24 ,  G01B11/30 ,  G01B2210/56 ,  G03F7/70625 ,  G06F7/00 ,  G06F17/16 ,  G06F17/40 ,  G06F19/00 ,  H01L22/12

摘要： Provided are optimized scatterometry techniques for evaluating a diffracting structure. In one embodiment, a method includes computing a finite-difference derivative of a field matrix with respect to first parameters (including a geometric parameter of the diffracting structure), computing an analytic derivative of the Jones matrix with respect to the field matrix, computing a derivative of the Jones matrix with respect to the first parameters, and computing a finite-difference derivative of the Jones matrix with respect to second parameters (including a non-geometric parameter). In one embodiment, a method includes generating a transfer matrix having Taylor Series approximations for elements, and decomposing the field matrix into two or more smaller matrices based on symmetry between the incident light and the diffracting structure.

摘要翻译： 提供了用于评估衍射结构的优化散射测量技术。 在一个实施例中，一种方法包括相对于第一参数（包括衍射结构的几何参数）计算场矩阵的有限差分导数，计算相对于场矩阵的Jones矩阵的分析导数，计算 相对于第一参数的Jones矩阵的导数，以及相对于第二参数（包括非几何参数）计算Jones矩阵的有限差分导数。 在一个实施例中，一种方法包括生成对于元素具有泰勒级数逼近的传递矩阵，并且基于入射光和衍射结构之间的对称性将场矩阵分解为两个或更多个较小的矩阵。

公开(公告)号：US09127927B2

公开(公告)日：2015-09-08

申请号：US13712734

申请日：2012-12-12

申请人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Philip D. Flanner, III

发明人： Jonathan Iloreta ,  Paul Aoyagi ,  Hanyou Chu ,  Jeffrey Chard ,  Peilin Jiang ,  Mikhail Sushchik ,  Leonid Poslavsky ,  Philip D. Flanner, III

IPC分类号： G06F17/16 ,  G01B11/30 ,  G06F7/00 ,  G06F17/40 ,  G06F19/00 ,  G01B11/00 ,  H01L21/66 ,  G01B11/24 ,  G03F7/20

CPC分类号： G01B11/00 ,  G01B11/24 ,  G01B11/30 ,  G01B2210/56 ,  G03F7/70625 ,  G06F7/00 ,  G06F17/16 ,  G06F17/40 ,  G06F19/00 ,  H01L22/12

摘要： Provided are optimized scatterometry techniques for evaluating a diffracting structure. In one embodiment, a method includes computing a finite-difference derivative of a field matrix with respect to first parameters (including a geometric parameter of the diffracting structure), computing an analytic derivative of the Jones matrix with respect to the field matrix, computing a derivative of the Jones matrix with respect to the first parameters, and computing a finite-difference derivative of the Jones matrix with respect to second parameters (including a non-geometric parameter). In one embodiment, a method includes generating a transfer matrix having Taylor Series approximations for elements, and decomposing the field matrix into two or more smaller matrices based on symmetry between the incident light and the diffracting structure.

摘要翻译： 提供了用于评估衍射结构的优化散射测量技术。 在一个实施例中，一种方法包括相对于第一参数（包括衍射结构的几何参数）计算场矩阵的有限差分导数，计算相对于场矩阵的Jones矩阵的分析导数，计算 相对于第一参数的Jones矩阵的导数，以及相对于第二参数（包括非几何参数）计算Jones矩阵的有限差分导数。 在一个实施例中，一种方法包括生成对于元素具有泰勒级数逼近的传递矩阵，并且基于入射光和衍射结构之间的对称性将场矩阵分解为两个或更多个较小的矩阵。