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公开(公告)号：US11697213B2
公开(公告)日：2023-07-11
申请号：US16788880
申请日：2020-02-12
发明人： Scott Wilkas
CPC分类号： B25J19/021 , B25J11/0095 , B25J19/026 , G01S13/881 , H01L21/67259
摘要： An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.
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公开(公告)号：US11562921B2
公开(公告)日：2023-01-24
申请号：US16246944
申请日：2019-01-14
摘要： A method including: locating a shaft of a rotor relative to a stator of a motor, locating a robot arm mount on the shaft, temporarily stationarily fixing the robot arm mount relative to the stator at a predetermined rotational location relative to the stator, and while the robot arm mount is temporarily stationarily fixed relative to the stator at the predetermined rotational location, stationarily fixing the robot arm mount to the shaft by a connection, where the connection allows the robot arm mount to be stationarily fixed to the shaft at one of a plurality of angular orientations.
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公开(公告)号：US11370305B2
公开(公告)日：2022-06-28
申请号：US15844826
申请日：2017-12-18
发明人： Martin Hosek , Sripati Sah
摘要： An apparatus comprises a first induction section comprising a first core and a first coil on the first core. A second induction section comprises a second core and a second coil on the second core. The first core comprises rail extensions, where at least two of the rail extensions extend from opposite ends of the first core. The second core comprises shoe portions located at respective ones of the rail extensions, where a gap is provided between each of the rail extensions and respective ones of the shoe portion. The second induction section is configured to move relative to the first induction section in a path along the extensions. The first induction section is configured to induce current in the second induction section, including when the second core moves relative to the first core along the extensions, to provide a contactless induction coupling between the first induction section and the second induction section.
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公开(公告)号：US11268630B2
公开(公告)日：2022-03-08
申请号：US16533119
申请日：2019-08-06
发明人： Martin Hosek
摘要： A valve including a first member including a fluid flow aperture therethrough; a second member movably connected to the first member between an open position and a closed position relative to the fluid flow aperture; at least one electromagnetic actuator connected between the first member and the second member, where the at least one electromagnetic actuator is configured to move the second member between the open position and the closed position, where the at least one electromagnetic actuator includes a first electromagnetic actuator having a stationary portion connected to the first member and a movable portion connected to the second member; and at least one mechanical flexure connected between the first member and the movable member of the actuator, where the at least one mechanical flexure constrains motion of the movable member to along a substantially straight line.
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公开(公告)号：US10882194B2
公开(公告)日：2021-01-05
申请号：US15294099
申请日：2016-10-14
发明人： Martin Hosek , Tuan Ha , Christopher Hofmeister
IPC分类号： H01L21/677 , B25J19/00 , B25J9/04 , H05K7/20 , B25J11/00
摘要： An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.
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公开(公告)号：US10800050B2
公开(公告)日：2020-10-13
申请号：US15841675
申请日：2017-12-14
发明人： Martin Hosek , Tuan Ha , Christopher Hofmeister
IPC分类号： H01L21/677 , B25J19/00 , B25J9/04 , H05K7/20 , B25J11/00
摘要： An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.
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公开(公告)号：US10593579B2
公开(公告)日：2020-03-17
申请号：US15841614
申请日：2017-12-14
IPC分类号： H01L21/677 , B25J9/04
摘要： A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
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公开(公告)号：US10543596B2
公开(公告)日：2020-01-28
申请号：US15803966
申请日：2017-11-06
IPC分类号： B25J9/04 , B25J18/04 , B25J15/00 , H01L21/677 , B25J9/10
摘要： An apparatus including a robot drive, a first arm having a first upper arm, a first forearm and a first end effector, where the first end effector comprises a first and second substrate support sections and a leg located between the first and second support sections which connects the substrate support sections to a wrist joint with the first forearm, and where a connection of the leg to the wrist joint is offset unequal distances relative to respective centerlines of the first and second substrate support sections, and a second arm having a second upper arm connected to the robot drive, where the first and second upper arms are connected to a first shaft of the robot drive to be rotated in unison, and where the wrist joint does not intersect the drive axis while the first arm is being extended and retracted.
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公开(公告)号：US10269606B2
公开(公告)日：2019-04-23
申请号：US14703216
申请日：2015-05-04
发明人： Martin Hosek
IPC分类号： H01L21/677 , B25J18/00 , B25J11/00 , B25J9/16 , H01L21/687 , B25J9/04
摘要： Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector.
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公开(公告)号：US10020704B2
公开(公告)日：2018-07-10
申请号：US15789382
申请日：2017-10-20
发明人： Martin Hosek , Tuan Ha , Christopher Hofmeister , Dennis Poole
IPC分类号： H02K11/00 , H02K5/128 , H02K5/22 , H02K21/44 , H02K41/03 , H02K5/00 , H02K9/22 , H02K3/30 , H02K3/44 , H02K15/12
CPC分类号： H02K5/128 , H02K3/30 , H02K3/44 , H02K5/00 , H02K5/225 , H02K9/22 , H02K15/12 , H02K21/44 , H02K41/033 , Y10S901/23
摘要： An apparatus including a motor housing which includes a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors which include a projecting pin section; a plurality of second electrical connectors which include a socket section configured to receive a respective projecting pin section; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures. The first electrical connectors project through the respective seals. The projecting pin sections are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.
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