-
公开(公告)号：US11697213B2
公开(公告)日：2023-07-11
申请号：US16788880
申请日：2020-02-12
发明人： Scott Wilkas
CPC分类号： B25J19/021 , B25J11/0095 , B25J19/026 , G01S13/881 , H01L21/67259
摘要： An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.
-
公开(公告)号：US20180233397A1
公开(公告)日：2018-08-16
申请号：US15897374
申请日：2018-02-15
发明人： Martin Hosek , Scott Wilkas , Jacob Lipcon
IPC分类号： H01L21/687 , B25J9/04 , B25J11/00 , B25J17/02 , B25J9/10
摘要： An apparatus including a robot drive having motors and coaxial drive shafts connected to the motors; and a robot arm connected to the robot drive. The robot arm includes two upper arms, a first set of forearms connected to a first one of the upper arms, a second set of forearms connected to a second one of the upper arms and end effectors connected to respective ones of the forearms. The first and second upper arms are connected to respective first and second ones of the coaxial drive shafts. The first set of the forearms is mounted on the first upper arm and connected to a third one of the coaxial drive shafts by respective first and second drive belt assemblies. The second set of the forearms is mounted to the second upper arm and connected to a fourth one of the coaxial drive shafts by respective third and fourth drive belt assemblies.
-
公开(公告)号：US20180229361A1
公开(公告)日：2018-08-16
申请号：US15897525
申请日：2018-02-15
发明人： Martin Hosek , Scott Wilkas , Jacob Lipcon
CPC分类号： H01L21/68707 , B25J9/0021 , B25J9/0084 , B25J9/042 , B25J9/043 , B25J9/046 , B25J9/104 , B25J9/1664 , B25J11/0095 , B25J17/02 , H01L21/67742 , H01L21/67766 , Y10S901/02 , Y10S901/15 , Y10S901/16 , Y10S901/19 , Y10S901/29 , Y10S901/30
摘要： A method including, based upon a desired path of a reference point from a start position to an end position, where the reference point is on an end effector on a robot arm, determine an included angle that corresponds to the start position and the end position, calculating a trajectory in radial coordinates of the reference point on the end effector at least partially based upon the included angles; calculating corresponding angular coordinates of the reference point on the end effector, based on the calculated radial coordinates, so that the reference point follows the desired path; using a modified formulation of inverse kinematics, converting the radial and angular coordinates supplemented with the included angles of the trajectory and corresponding angular velocity and acceleration of the end effector to form motion setpoints for the robot arm; and controlling the motors of the robot drive.
-
公开(公告)号：US12103176B2
公开(公告)日：2024-10-01
申请号：US16788941
申请日：2020-02-12
发明人： Scott Wilkas
CPC分类号： B25J9/123 , B65G47/905
摘要： An apparatus including a linear transport configured to move in a transport chamber along a straight path; a robot connected to the linear transport, where the robot includes a robot drive and a robot arm connected to the robot drive, where the robot arm is a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear transport and to the robot drive, where the controller is configured to provide movement of the linear transport along the straight path at a same time as extension and retraction of the dual-link arm to thereby move the end effector into or out of a substrate process chamber or a substrate holding area while both the linear transport and the dual-link arm are moving.
-
公开(公告)号：US10580682B2
公开(公告)日：2020-03-03
申请号：US15897374
申请日：2018-02-15
发明人： Martin Hosek , Scott Wilkas , Jacob Lipcon
IPC分类号： H01L21/67 , H01L21/687 , B25J9/04 , B25J11/00 , B25J17/02 , B25J9/10 , H01L21/677 , B25J9/00 , B25J9/16
摘要： An apparatus including a robot drive having motors and coaxial drive shafts connected to the motors; and a robot arm connected to the robot drive. The robot arm includes two upper arms, a first set of forearms connected to a first one of the upper arms, a second set of forearms connected to a second one of the upper arms and end effectors connected to respective ones of the forearms. The first and second upper arms are connected to respective first and second ones of the coaxial drive shafts. The first set of the forearms is mounted on the first upper arm and connected to a third one of the coaxial drive shafts by respective first and second drive belt assemblies. The second set of the forearms is mounted to the second upper arm and connected to a fourth one of the coaxial drive shafts by respective third and fourth drive belt assemblies.
-
6.发明申请Robot Arm With Unequal Link Lengths And Variable Non-Linear Wrist Orientation 审中-公开机器人手臂具有不等长的链接长度和可变的非线性手腕方向公开(公告)号：US20170028546A1
公开(公告)日：2017-02-02
申请号：US15212441
申请日：2016-07-18
发明人： Scott Wilkas , Martin Hosek , Jacob Lipcon
IPC分类号： B25J9/04 , H01L21/677 , B25J17/02 , B25J18/04 , B25J9/10
CPC分类号： B25J9/042 , B25J9/104 , B25J11/0095 , H01L21/67742
摘要： A substrate transport arm including a first link; a second link rotatably connected to the first link; a third link rotatably connected to the second link at a wrist joint; and a mechanical transmission having a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is connected to the third link to control rotation of the third link on the second link. The mechanical transmission is configured to control rotation of the third link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion, and where a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion.
摘要翻译： 一种基板传送臂，包括第一连杆; 可旋转地连接到第一连杆的第二连杆; 在腕关节处可旋转地连接到第二连杆的第三连杆; 和具有滑轮的机械变速器。 第三连杆包括构造成在其上支撑基板的末端执行器。 机械传动被连接到第三连杆以控制第二连杆上的第三连杆的旋转。 机械传动装置被配置为根据第一和第二连杆之间的角度来控制第三连杆的旋转，使得当第一和第二连杆相对于彼此旋转时，腕关节沿着包括一个 弯曲部分，并且当腕关节跟随弯曲部分时，支撑在端部执行器上的基板的中心沿着基本上直的基板路径移动。
-
公开(公告)号：US11633854B2
公开(公告)日：2023-04-25
申请号：US16455909
申请日：2019-06-28
发明人： Martin Hosek , Scott Wilkas , Sripati Sah , Itsui Yamayoshi
IPC分类号： B25J9/16
摘要： Disclosed herein is a method. The method includes moving a payload through a motion path proximate at least one sensor. Detecting edges of the payload such that at least three points on at least two edges are detected. Capturing a position when the at least one sensor detects at least one edge of the payload.
-
公开(公告)号：US11584000B2
公开(公告)日：2023-02-21
申请号：US15212441
申请日：2016-07-18
发明人： Martin Hosek , Scott Wilkas , Jacob Lipcon
IPC分类号： H01L21/677 , B25J9/04 , B25J9/10 , B25J11/00
摘要： A substrate transport arm including a first link; a second link rotatably connected to the first link; a third link rotatably connected to the second link at a wrist joint; and a mechanical transmission having a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is connected to the third link to control rotation of the third link on the second link. The mechanical transmission is configured to control rotation of the third link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion, and where a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion.
-
公开(公告)号：US20200262059A1
公开(公告)日：2020-08-20
申请号：US16788941
申请日：2020-02-12
发明人： Scott Wilkas
摘要： An apparatus including a linear transport configured to move in a transport chamber along a straight path; a robot connected to the linear transport, where the robot includes a robot drive and a robot arm connected to the robot drive, where the robot arm is a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear transport and to the robot drive, where the controller is configured to provide movement of the linear transport along the straight path at a same time as extension and retraction of the dual-link arm to thereby move the end effector into or out of a substrate process chamber or a substrate holding area while both the linear transport and the dual-link arm are moving.
-
公开(公告)号：US20190057893A1
公开(公告)日：2019-02-21
申请号：US16104529
申请日：2018-08-17
发明人： Martin Hosek , Scott Wilkas
IPC分类号： H01L21/687 , B25J9/04 , B25J15/00 , B25J18/04
摘要： An apparatus including a controller; a robot drive; a robot arm connected to the robot drive, where the robot arm has links including an upper arm, a first forearm connected to a first end of the upper arm, a second forearm connected to a second opposite end of the upper arm, a first end effector connected to the first forearm and a second end effector connected to the second forearm; and a transmission connecting the robot drive to the first and second forearms and the first and second end effectors. The transmission is configured to rotate the first and second forearms relative to the upper arm and rotate the first and second end effectors on their respective first and second forearms. The upper arm is substantially rigid and movement of the upper arm by the robot drive moves both the first and second forearms in opposite directions.
-
-
-
-
-
-
-
-
-
搜索结果
10 条记录 (耗时 0.015 秒)
