公开(公告)号：US07015609B2

公开(公告)日：2006-03-21

申请号：US10369901

申请日：2003-02-20

申请人： Peter Fahrenbach

发明人： Peter Fahrenbach

IPC分类号： H02K5/00

CPC分类号： F04D19/04 ,  F04D29/522 ,  F04D29/601 ,  H02K5/00 ,  H02K5/15 ,  H02K5/1732 ,  H02K7/14

摘要： A machine, having a high-speed rotor, and stationary components having connection surfaces for connecting the machine with external components and/or the stationary components with each other and provided with outer surface layers having a high friction coefficient.

公开(公告)号：US06454525B2

公开(公告)日：2002-09-24

申请号：US09792442

申请日：2001-02-23

申请人： Armin Blecker ,  Wolfgang Bremer ,  Peter Fahrenbach

发明人： Armin Blecker ,  Wolfgang Bremer ,  Peter Fahrenbach

IPC分类号： F03B500

CPC分类号： F04D19/042

摘要： A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.

摘要翻译： 一种涡轮分子泵，包括彼此交替排列的多个转子和定子盘，用于将定子盘彼此间隔开的多个间隔环，以及布置在至少两个间隔环之间的至少一个可弹性变形的金属构件，定子 盘，间隔环和可形成定子叠层的可弹性变形的金属构件。

公开(公告)号：US07033142B2

公开(公告)日：2006-04-25

申请号：US10350935

申请日：2003-01-24

申请人： Armin Conrad ,  Peter Fahrenbach ,  Matthias Mädler

发明人： Armin Conrad ,  Peter Fahrenbach ,  Matthias Mädler

IPC分类号： F04B23/08

CPC分类号： F04D19/04 ,  F04D25/00 ,  F04D27/00

摘要： A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.

摘要翻译： 真空泵系统包括至少一个高真空泵，前真空泵和至少一个中间泵，其布置在至少一个高真空泵和前级真空泵之间，并且其入口直接和专门地连接 与高真空泵的出口。

公开(公告)号：US20130228005A1

公开(公告)日：2013-09-05

申请号：US13821651

申请日：2011-09-06

申请人： Matthias Suedel ,  Peter Fahrenbach ,  Bernd Porath

发明人： Matthias Suedel ,  Peter Fahrenbach ,  Bernd Porath

IPC分类号： G01N33/00

CPC分类号： G01N33/00 ,  F16K1/446 ,  F16K37/0083 ,  G01B5/30 ,  G01B7/18

摘要： The invention relates to diagnostic methods according to the preamble of the equivalent claims 1 and 2, with which the state of a poppet valve in the course of the switching cycles and/or events thereof, such as the occurrence of pressure shocks or surges during continuous operation is/are monitored continuously, the measured signals are stored and the stored measured signals are interpreted in a targeted manner and early indication of cases of damage is carried out. According to a preferred variant of the diagnostic method, said aim is achieved in that at the same time as the force-time curve of the actuating force or the reaction force (F1(t); F2(t)), a displacement-time curve (h(t)) of the displacement (h) of the at least one closing element (8*) is measured, in that the force-time curve of the actuating force or of the reaction force (F1(t); F2(t)) and the displacement-time curve (h(t)) are combined with each other and used to determine a force-displacement curve of the actuating force or the reaction force (F1(h); F2(h)), in that the current force-displacement curve of the actuating force (F1(h)) or the reaction force (F2(h)) of a switching cycle, in each case determined over the operating period or lifetime of the poppet valve (100), is compared with an earlier, stored curve, in that deviations are determined from the comparison, in that, within a predefined tolerance range for said deviations, the latter are accepted, and in that, when said deviations exceed the predefined tolerance range, a message and/or a control signal is/are generated.

摘要翻译： 本发明涉及根据等同权利要求1和2的前序部分的诊断方法，其中在开关循环和/或其事件过程中提升阀的状态，例如在连续期间发生压力冲击或浪涌 操作被连续监视，所测量的信号被存储并且存储的测量信号以目标方式被解释并且进行损坏的情况的早期指示。 根据诊断方法的优选方案，所述目的的实现方式在于与作动力或反作用力（F1（t）; F2（t））的力 - 时间曲线同时，位移时间 测量至少一个关闭元件（8 *）的位移（h）的曲线（h（t）），其中驱动力或反作用力的力 - 时间曲线（F1（t）; F2 （t））和位移时间曲线（h（t））彼此组合并用于确定致动力或反作用力（F1（h）; F2（h））的力 - 位移曲线， 由于当前在提升阀（100）的运行周期或使用寿命中确定开关循环的当前力 - 位移曲线（F1（h））或反作用力（F2（h））， 与先前存储的曲线进行比较，因为从比较中确定偏差，因为在所述偏差的预定公差范围内，后者被接受，并且因此当所述 偏差超过预定义的公差范围，生成消息和/或控制信号。

公开(公告)号：US20050207884A1

公开(公告)日：2005-09-22

申请号：US11079649

申请日：2005-03-14

申请人： Armin Conrad ,  Peter Fahrenbach

发明人： Armin Conrad ,  Peter Fahrenbach

IPC分类号： F04D19/04 ,  F01D1/36

CPC分类号： F04D19/042 ,  F04D29/324 ,  F04D29/544

摘要： A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side (2) having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side (3), and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

摘要翻译： 涡轮分子泵包括多个备选地轴向布置的另一个，设置有叶片（10）的转子和定子盘（8,9），其中叶片（10）位于高真空侧（2）附近，具有叶片 角度（α）比位于真空侧（3）附近的叶片（10）的叶片角（α）更陡，并且叶片（10）的叶片角度（α）位于 真空侧（3）小于8°。

公开(公告)号：US20050058554A1

公开(公告)日：2005-03-17

申请号：US10939055

申请日：2004-09-10

申请人： Peter Fahrenbach ,  Robert Watz

发明人： Peter Fahrenbach ,  Robert Watz

IPC分类号： F04D19/04 ,  F04D29/60 ,  F04B49/00 ,  F04B23/00

CPC分类号： F04D19/042 ,  F04D29/601 ,  F16B2/12 ,  F16B33/06 ,  F16L23/036

摘要： A connection element for connecting two parts, in particular, an external component with a vacuum pump, includes a first member engageable with the external component, and a second member engageable with the connection component provided on the pump housing, with the first and second members being slidable relative to each other during connection of the external component with the vacuum pump and having slidable relative to each other surfaces having a predetermined and unchangeable frictional resistance.

摘要翻译： 用于连接两个部件，特别是具有真空泵的外部部件的连接元件包括可与外部部件接合的第一部件和可与设置在泵壳体上的连接部件接合的第二部件，第一和第二部件 在外部部件与真空泵的连接期间可相对于彼此滑动并且能够相对于彼此具有可预定且不变的摩擦阻力的表面滑动。

公开(公告)号：US06540475B2

公开(公告)日：2003-04-01

申请号：US09855074

申请日：2001-05-14

申请人： Armin Conrad ,  Peter Fahrenbach

发明人： Armin Conrad ,  Peter Fahrenbach

IPC分类号： F04D1904

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/324 ,  F04D29/4213

摘要： A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.

摘要翻译： 一种气体摩擦泵，包括多个泵送主动转子和定子部件，其布置在泵壳体中用于输送气体并用于产生压缩比，其直径大于形成在壳体中的吸入口的直径，以及修改的转子 该部件位于吸入口附近并且具有从抽吸有源转子和定子部件的径向范围的方向上从吸入开口增加的径向范围。

公开(公告)号：US09488626B2

公开(公告)日：2016-11-08

申请号：US13821651

申请日：2011-09-06

申请人： Matthias Suedel ,  Peter Fahrenbach ,  Bernd Porath

发明人： Matthias Suedel ,  Peter Fahrenbach ,  Bernd Porath

IPC分类号： G01N33/00 ,  F16K1/44 ,  G01B5/30 ,  G01B7/16 ,  F16K37/00

CPC分类号： G01N33/00 ,  F16K1/446 ,  F16K37/0083 ,  G01B5/30 ,  G01B7/18

摘要： The invention relates to diagnostic methods according to the preamble of the equivalent claims 1 and 2, with which the state of a poppet valve in the course of the switching cycles and/or events thereof, such as the occurrence of pressure shocks or surges during continuous operation is/are monitored continuously, the measured signals are stored and the stored measured signals are interpreted in a targeted manner and early indication of cases of damage is carried out. According to a preferred variant of the diagnostic method, said aim is achieved in that at the same time as the force-time curve of the actuating force or the reaction force (F1(t); F2(t)), a displacement-time curve (h(t)) of the displacement (h) of the at least one closing element (8*) is measured, in that the force-time curve of the actuating force or of the reaction force (F1(t); F2(t)) and the displacement-time curve (h(t)) are combined with each other and used to determine a force-displacement curve of the actuating force or the reaction force (F1(h); F2(h)), in that the current force-displacement curve of the actuating force (F1(h)) or the reaction force (F2(h)) of a switching cycle, in each case determined over the operating period or lifetime of the poppet valve (100), is compared with an earlier, stored curve, in that deviations are determined from the comparison, in that, within a predefined tolerance range for said deviations, the latter are accepted, and in that, when said deviations exceed the predefined tolerance range, a message and/or a control signal is/are generated.

摘要翻译： 本发明涉及根据等同权利要求1和2的前序部分的诊断方法，其中在开关循环和/或其事件过程中提升阀的状态，例如在连续期间发生压力冲击或浪涌 操作被连续监视，所测量的信号被存储并且存储的测量信号以目标方式被解释并且进行损坏的情况的早期指示。 根据诊断方法的优选方案，所述目的的实现方式在于与作动力或反作用力（F1（t）; F2（t））的力 - 时间曲线同时，位移时间 测量至少一个关闭元件（8 *）的位移（h）的曲线（h（t）），其中驱动力或反作用力的力 - 时间曲线（F1（t）; F2 （t））和位移时间曲线（h（t））彼此组合并用于确定致动力或反作用力（F1（h）; F2（h））的力 - 位移曲线， 由于当前在提升阀（100）的运行周期或使用寿命中确定开关循环的当前力 - 位移曲线（F1（h））或反作用力（F2（h））， 与先前存储的曲线进行比较，因为从比较中确定偏差，因为在所述偏差的预定公差范围内，后者被接受，并且因此当所述 偏差超过预定义的公差范围，生成消息和/或控制信号。

公开(公告)号：US08398362B2

公开(公告)日：2013-03-19

申请号：US11079649

申请日：2005-03-14

申请人： Armin Conrad ,  Peter Fahrenbach

发明人： Armin Conrad ,  Peter Fahrenbach

IPC分类号： F01D1/36

CPC分类号： F04D19/042 ,  F04D29/324 ,  F04D29/544

摘要： A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

摘要翻译： 涡轮分子泵包括多个备选地轴向布置的另一个，设置有叶片（10）的转子和定子盘（8,9），其中叶片（10）位于高真空侧附近，具有叶片角度（α ）比位于真空侧附近的叶片（10）的叶片角（α）更陡，并且位于真空侧（3）附近的叶片（10）的叶片角（α）等于 小于8°。

公开(公告)号：US06699009B2

公开(公告)日：2004-03-02

申请号：US10075409

申请日：2002-02-13

申请人： Peter Fahrenbach

发明人： Peter Fahrenbach

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D29/584 ,  F04D29/5853 ,  F05D2260/607

摘要： A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.

摘要翻译： 一种真空泵，包括在其高真空区域中具有吸入口的壳体，其高压区域中的气体出口，泵主动配合转子和布置在壳体中的定子部件，用于将气体从吸入口抽出到出口 其中邻近高压区域的泵活性部件的端部经由中间室与气体出口开口连接;加热装置，设置在中间室中，并与位于高压区域的定子部件相连，通过 具有高导热性的连接和用于将加热装置与壳体分离的热阻元件。