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公开(公告)号:US07033142B2
公开(公告)日:2006-04-25
申请号:US10350935
申请日:2003-01-24
申请人: Armin Conrad , Peter Fahrenbach , Matthias Mädler
发明人: Armin Conrad , Peter Fahrenbach , Matthias Mädler
IPC分类号: F04B23/08
摘要: A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.
摘要翻译: 真空泵系统包括至少一个高真空泵,前真空泵和至少一个中间泵,其布置在至少一个高真空泵和前级真空泵之间,并且其入口直接和专门地连接 与高真空泵的出口。
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公开(公告)号:US08398362B2
公开(公告)日:2013-03-19
申请号:US11079649
申请日:2005-03-14
申请人: Armin Conrad , Peter Fahrenbach
发明人: Armin Conrad , Peter Fahrenbach
IPC分类号: F01D1/36
CPC分类号: F04D19/042 , F04D29/324 , F04D29/544
摘要: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.
摘要翻译: 涡轮分子泵包括多个备选地轴向布置的另一个,设置有叶片(10)的转子和定子盘(8,9),其中叶片(10)位于高真空侧附近,具有叶片角度(α )比位于真空侧附近的叶片(10)的叶片角(α)更陡,并且位于真空侧(3)附近的叶片(10)的叶片角(α)等于 小于8°。
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公开(公告)号:US20050207884A1
公开(公告)日:2005-09-22
申请号:US11079649
申请日:2005-03-14
申请人: Armin Conrad , Peter Fahrenbach
发明人: Armin Conrad , Peter Fahrenbach
CPC分类号: F04D19/042 , F04D29/324 , F04D29/544
摘要: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side (2) having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side (3), and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.
摘要翻译: 涡轮分子泵包括多个备选地轴向布置的另一个,设置有叶片(10)的转子和定子盘(8,9),其中叶片(10)位于高真空侧(2)附近,具有叶片 角度(α)比位于真空侧(3)附近的叶片(10)的叶片角(α)更陡,并且叶片(10)的叶片角度(α)位于 真空侧(3)小于8°。
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公开(公告)号:US06540475B2
公开(公告)日:2003-04-01
申请号:US09855074
申请日:2001-05-14
申请人: Armin Conrad , Peter Fahrenbach
发明人: Armin Conrad , Peter Fahrenbach
IPC分类号: F04D1904
CPC分类号: F04D19/042 , F04D19/04 , F04D29/324 , F04D29/4213
摘要: A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.
摘要翻译: 一种气体摩擦泵,包括多个泵送主动转子和定子部件,其布置在泵壳体中用于输送气体并用于产生压缩比,其直径大于形成在壳体中的吸入口的直径,以及修改的转子 该部件位于吸入口附近并且具有从抽吸有源转子和定子部件的径向范围的方向上从吸入开口增加的径向范围。
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公开(公告)号:US20100021324A1
公开(公告)日:2010-01-28
申请号:US12460738
申请日:2009-07-22
申请人: Armin Conrad
发明人: Armin Conrad
IPC分类号: F04D29/046
CPC分类号: F04D19/044 , F04D29/057
摘要: A vacuum pump includes shaft, two spaced from each other, dynamic gas bearings for supporting the shaft for rotation, and a pumping system arranged on the shaft between the two gas bearings and having two pumping sections which are so formed that compressed gas from each section is delivered in a direction of a gas bearing adjacent to this pumping section.
摘要翻译: 真空泵包括彼此间隔开的轴,用于支撑轴以旋转的动态气体轴承,以及布置在两个气体轴承之间的轴上的泵送系统,并且具有两个泵送部分,其形成为来自每个部分的压缩气体 沿邻近该泵送段的气体轴承的方向输送。
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公开(公告)号:US06644912B2
公开(公告)日:2003-11-11
申请号:US10086679
申请日:2002-03-01
申请人: Armin Conrad
发明人: Armin Conrad
IPC分类号: F04D1904
CPC分类号: F04D19/042
摘要: A gas friction pump, including a housing having a suction opening, a gas outlet opening, and a plurality of rotatable and stationary components arranged in the housing and having a pump-active structure for pumping gases and maintaining a pressure ratio, and an additional gas inlet formed as a longitudinal opening extending, in a longitudinal direction thereof, over a portion of an outer edge of a rotatable component.
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公开(公告)号:US5733104A
公开(公告)日:1998-03-31
申请号:US516244
申请日:1995-08-17
申请人: Armin Conrad , Otto Ganschow
发明人: Armin Conrad , Otto Ganschow
CPC分类号: F04D19/046 , F04D25/00
摘要: A vacuum pump system for multi-stage gas inlet systems and including a pumping unit formed of a turbomolecular pump and one or several further pumps arranged downstream of the turbomolecular pump and the rotors of which are located on the same shaft as the rotor of the turbomolecular pump, and an additional intermittently operated dry running pump, which discharges against atmospheric pressure.
摘要翻译: 一种用于多级气体入口系统的真空泵系统,包括由涡轮分子泵形成的泵送单元和布置在涡轮分子泵下游的一个或多个另外的泵,其转子位于与涡轮分子泵的转子相同的轴上 泵和另外间歇运行的干运行泵,其排放大气压力。
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公开(公告)号:US20050260082A1
公开(公告)日:2005-11-24
申请号:US11130574
申请日:2005-05-17
申请人: Armin Conrad , Wolfang Losch
发明人: Armin Conrad , Wolfang Losch
IPC分类号: F04C18/344 , F04C29/00 , H02K1/27 , F04B17/00 , F04B35/04
CPC分类号: F04C18/3442 , F04C29/0085 , F04C2270/701
摘要: An oil-sealed vane rotary vacuum pump includes at least one pump stage arranged in the housing and having a cylindrical chamber, a shaft excentrically arranged in the cylindrical chamber and provided with vanes, and a drive for driving the shaft and having a plurality of permanent magnets arranged on the shaft and stationary electrical coils surrounding the permanent magnets and producing a rotatable magnetic field, and control electronics for controlling the coils and arranged in a removable housing part of the pump.
摘要翻译: 油封叶片旋转真空泵包括至少一个设置在壳体中的泵级,并具有圆柱形腔室,轴向偏心地布置在圆柱形腔室中并设置有叶片,以及用于驱动轴并具有多个永久 布置在轴上的磁体和围绕永磁体并产生可旋转磁场的固定电线圈,以及用于控制线圈并且布置在泵的可移除壳体部分中的控制电子装置。
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公开(公告)号:US06464451B1
公开(公告)日:2002-10-15
申请号:US09655981
申请日:2000-09-06
申请人: Armin Conrad , Wolfgang Eberl
发明人: Armin Conrad , Wolfgang Eberl
IPC分类号: F04D500
CPC分类号: F04D17/168 , F04D19/046
摘要: A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational and stationary gas delivery components with the rotational components being supported on the shaft and the stationary components being connected with the housing, at least one of the pumping units consisting of a plurality of connected parallel to each other and arranged one after another in an axial direction, molecular pumping stages with each pumping stage being formed based on Gaede principle; with the molecular pumping stages being connected with each other in common connection channels.
摘要翻译: 一种真空泵,包括具有入口和出口的壳体; 布置在壳体中的轴和设置在壳体中的支撑轴承,用于使轴旋转的驱动; 以及布置在所述壳体中并且形成旋转和静止的气体输送部件中的每一个的多个泵送单元,所述旋转部件被支撑在所述轴上,并且所述固定部件与所述壳体连接,所述泵送单元中的至少一个由多个 彼此平行连接并沿轴向依次布置,基于Gaede原理形成具有每个泵送阶段的分子泵送阶段; 其中分子泵送级在公共连接通道中彼此连接。
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公开(公告)号:US5707213A
公开(公告)日:1998-01-13
申请号:US596018
申请日:1996-02-06
申请人: Armin Conrad
发明人: Armin Conrad
CPC分类号: F04D19/04 , F04D19/044 , F04D29/5846
摘要: A method of cooling rotor elements of a molecular vacuum pump having stator and rotor elements, a suction flange defining a gas inlet, and a gas outlet spaced from the suction flange, the method including providing additional gas inlet between the suction flange and the gas outlet and admitting through the additional gas inlet a cooling gas having a thermal conductivity larger than that of the compressible gas.
摘要翻译: 一种冷却分子真空泵的转子元件的方法,该分子真空泵具有定子和转子元件,限定气体入口的吸入凸缘和与吸入凸缘间隔开的气体出口,该方法包括在吸力凸缘和气体出口之间提供附加气体入口 并且通过另外的气体入口允许具有大于可压缩气体的热导率的热导率的冷却气体。
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