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1.发明授权Apparatus for measuring surface movement of an object that is subjected to external vibrations 失效用于测量受到外部振动的物体的表面运动的装置
公开(公告)号：US5623307A
公开(公告)日：1997-04-22
申请号：US381201
申请日：1995-01-31
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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2.发明授权Laser ultrasonics-based material analysis system and method using matched filter processing 失效激光超声波材料分析系统和方法采用匹配滤波处理
公开(公告)号：US5604592A
公开(公告)日：1997-02-18
申请号：US482782
申请日：1995-06-07
申请人： Petros A. Kotidis , James F. Cunningham , Paul F. Gozewski , Charles Borsody , Daniel E. Klimek , Jaime A. Woodroffe
发明人： Petros A. Kotidis , James F. Cunningham , Paul F. Gozewski , Charles Borsody , Daniel E. Klimek , Jaime A. Woodroffe
IPC分类号： G01N29/00 , G01N21/17 , G01N21/45 , G01N29/04 , G01N29/07 , G01N29/22 , G01N29/24 , G01N29/32 , G01N29/34 , G01N29/44 , H01S5/022 , H01S5/14 , G01B9/02 , G01N21/00
CPC分类号： G01N21/1717 , G01N29/041 , G01N29/07 , G01N29/228 , G01N29/2418 , G01N29/2456 , G01N29/326 , G01N29/348 , G01N29/4427 , H01S5/141 , G01N2291/011 , G01N2291/015 , G01N2291/0237 , G01N2291/0251 , G01N2291/02827 , G01N2291/02854 , G01N2291/0421 , G01N2291/0422 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/045 , G01N2291/102 , G01N2291/2697 , H01S3/08004 , H01S3/106 , H01S5/02208 , H01S5/02292
摘要： Disclosed herein is an interferometric-based materials analysis system (10) that employs a novel combination of laser beam shaping and pointing techniques, the use of a low cost, rugged, and compact diode laser (22) as a detection laser, and the use of signal processing techniques that compensate for inherent instabilities and short-term drift in the diode laser. A matched filter processing technique is disclosed for processing interferometrically-obtained data points from a target being analyzed. The matched filter technique is shown to be especially useful for detecting and analyzing Lamb modes within thin targets, such as a silicon wafer undergoing a rapid thermal processing cycle. Also disclosed is a method and apparatus for interferometrically monitoring a target to determine, in accordance with predetermined criteria, an occurrence of a period of time that is optimum for obtaining a data point. In response to detecting such a period an impulse source, such as an impulse laser (14), is triggered to launch an elastic wave within the target so that a data point can be obtained. A plurality of data points so obtained are subsequently processed, such as by the matched filter technique, to determine a property of interest of the target. The property of interest may be, by example, the temperature of the target or the metallurgical status of the target.
摘要翻译： 本文公开了一种基于干涉测量的材料分析系统（10），其采用激光束成形和指向技术的新颖组合，使用低成本，坚固和紧凑的二极管激光器（22）作为检测激光器，以及使用 的信号处理技术，补偿二极管激光器的固有不稳定性和短期漂移。 公开了一种用于从被分析的目标处理干涉测量获得的数据点的匹配滤波处理技术。 显示匹配滤波器技术特别适用于检测和分析薄目标（如经历快速热处理循环的硅晶片）中的兰姆模式。 还公开了一种用于对目标进行干涉测量的方法和装置，以根据预定标准确定对于获得数据点是最佳的一段时间的出现。 响应于检测到这样的周期，触发诸如脉冲激光器（14）的脉冲源来在目标内发射弹性波，从而可以获得数据点。 随后如例如通过匹配滤波器技术处理如此获得的多个数据点，以确定目标的感兴趣的属性。 感兴趣的属性可以是例如目标的温度或目标的冶金状态。
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3.发明授权
公开(公告)号：US5724138A
公开(公告)日：1998-03-03
申请号：US634286
申请日：1996-04-18
申请人： Judith E. Reich , Petros A. Kotidis
发明人： Judith E. Reich , Petros A. Kotidis
IPC分类号： G01B17/02 , G01N29/00 , G01N29/12 , G01N29/24 , G01N29/46 , G01N29/50 , G01N29/52 , G01B9/02
CPC分类号： G01N29/46 , G01N29/12 , G01N29/2418 , G01N29/50 , G01N29/52 , G01N2291/0427 , G01N2291/2634
摘要： A laser ultrasonics technique is used to characterize a composite dispersive response signal from a sample under analysis, such as a semiconductor wafer. Rather than measuring individual acoustic wave velocities at specific frequencies, an entire dispersive response signal is analyzed. In a presently preferred embodiment of this invention the entire dispersive response signal is analyzed using a wavelet-based technique, such as a discrete wavelet transform analysis technique. The discrete wavelet transform analysis technique is shown to provide an accurate, non-contact measurement of the temperature of the wafer.
摘要翻译： 激光超声波技术用于表征来自分析样品（例如半导体晶片）的复合色散响应信号。 不是在特定频率下测量各个声波速度，而是分析整个色散响应信号。 在本发明的当前优选实施例中，使用基于小波的技术（例如离散小波变换分析技术）来分析整个色散响应信号。 显示了离散小波变换分析技术，以提供晶片温度的精确，非接触式测量。
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4.发明授权Method and apparatus for measuring surface movement of an object using a polarizing interfeometer 失效使用偏振干涉仪测量物体的表面运动的方法和装置
公开(公告)号：US5414510A
公开(公告)日：1995-05-09
申请号：US194032
申请日：1994-02-09
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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5.发明授权Method and apparatus for measuring surface movement of a solid object that is subjected to external vibrations 失效用于测量经受外部振动的固体物体的表面运动的方法和装置
公开(公告)号：US5410405A
公开(公告)日：1995-04-25
申请号：US160279
申请日：1993-12-02
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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6.发明授权Match filter apparatus and method for remote ultrasonic determination of thin material properties 失效匹配过滤装置和方法，用于远程超声波确定薄材料性能公开(公告)号：US06198538B1
公开(公告)日：2001-03-06
申请号：US09289569
申请日：1999-04-09
IPC分类号： G01N2100
CPC分类号： G01K11/22
摘要： In an apparatus and method for remote ultrasonic determination of thin material properties, a match filter calibration technique is employed. For a plurality of known material property values and known material thicknesses, an elastic stress wave is generated in the material at a source location. The intensity of a signal generated by the elastic stress wave is sensed at a sense location positioned a known distance from the source location. A feature is selected from among the sensed signals which demonstrates minimal thickness dependents from a plurality of known material thicknesses. The selected feature is applied to the sensed signals to determine propagation time of the signals over the known distance. A calibration curve is then generated to characterize the relationship between signal propagation time and material property value for each material thickness. The present technique is especially amenable to determination of thin material properties, for example temperature, in a manner which is independent of material thickness. In an embodiment adapted for determination of temperature, precision on the order of ±1° C. is achievable over a range of material thicknesses.
摘要翻译： 在用于远程超声波确定薄材料性质的装置和方法中，采用匹配滤波器校准技术。 对于多种已知的材料特性值和已知材料厚度，在源位置处的材料中产生弹性应力波。 由位于离源位置已知距离的感测位置处感测由弹性应力波产生的信号的强度。 从感测到的信号中选择一个特征，其显示出来自多个已知材料厚度的最小厚度依赖性。 所选择的特征被应用于所感测的信号，以确定信号在已知距离上的传播时间。 然后产生校准曲线以表征每个材料厚度的信号传播时间和材料特性值之间的关系。 本技术特别适于以与材料厚度无关的方式确定薄材料性质，例如温度。 在适于测定温度的实施例中，可在一定范围的材料厚度上实现±1℃的精度。
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7.发明授权Apparatus and method for remote ultrasonic determination of thin material properties using signal correlation 失效使用信号相关的远程超声波测定薄材料特性的装置和方法公开(公告)号：US06393384B1
公开(公告)日：2002-05-21
申请号：US09288887
申请日：1999-04-09
IPC分类号： G06G748
CPC分类号： G01N29/4418 , G01N29/11 , G01N29/50 , G01N2291/0237 , G01N2291/0422 , G01N2291/0427
摘要： In an apparatus and method for remote ultrasonic determination of thin material properties using signal correlation, a method and apparatus are provided by which an arbitrarily-oriented anisotropic thin material may be interrogated for characterizing an unknown material property value thereof. The unknown material property may comprise for example temperature, pressure, elastic constants, density, hardness, composition, crystal orientation, grain size, and residual stress, or any material property that is variable with respect to known physical parameters of the material, for example known material elastic constants and/or density. In a first embodiment, theoretical signals are generated, for example a theoretical signal matrix, to characterize a material property value of a thin anisotropic material. A model of the thin material is generated comprising the behavior of the known material physical properties as functions of the unknown material property value to be characterized. For a plurality of known material thicknesses and known material property values, a transduction mechanism is simulated at a source location for generating a simulated elastic stress wave operating on the model at a plurality of source locations. The simulated intensities of signals generated by the simulated elastic stress waves are computed at a sense location to provide a representative composite signal. Theoretical signals are determined from the composite signal at each thickness and at each material property value. In a second aspect, the present invention is directed to a method for empirical characterization of a transduction event in a thin material using iterative temporal decomposition of an initial estimate of the transduction event converging on a measured signal.
摘要翻译： 在使用信号相关性进行薄材料特性的远程超声波测定的装置和方法中，提供了可以询问任意取向的各向异性薄材料以表征其未知材料特性值的方法和装置。 未知的材料性质可以包括例如温度，压力，弹性常数，密度，硬度，组成，晶体取向，晶粒尺寸和残余应力，或者相对于材料的已知物理参数是可变的任何材料性质，例如 已知的材料弹性常数和/或密度。 在第一实施例中，产生理论信号，例如理论信号矩阵，以表征薄的各向异性材料的材料属性值。 产生薄材料的模型，其包括作为要表征的未知材料性质值的函数的已知材料物理性质的行为。 对于多个已知的材料厚度和已知的材料性质值，在源位置处模拟换能机构，以产生在多个源位置上在模型上操作的模拟弹性应力波。 由模拟弹性应力波产生的信号的模拟强度在感测位置计算，以提供代表性的复合信号。 在每个厚度和每个材料属性值下，从复合信号确定理论信号。 在第二方面，本发明涉及一种利用在测量信号上收敛的转导事件的初始估计的迭代时间分解来对薄材料中的转导事件进行经验表征的方法。
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公开(公告)号：US5404224A
公开(公告)日：1995-04-04
申请号：US160730
申请日：1993-12-02
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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公开(公告)号：US5402233A
公开(公告)日：1995-03-28
申请号：US132851
申请日：1993-10-07
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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公开(公告)号：US5286313A
公开(公告)日：1994-02-15
申请号：US785787
申请日：1991-10-31
CPC分类号： G01H9/00 , G10K15/046
摘要： A system for non-destructively measuring an object and controlling industrial processes in response to the measurement is disclosed in which an impulse laser generates a plurality of sound waves over timed increments in an object. A polarizing interferometer is used to measure surface movement of the object caused by the sound waves and sensed by phase shifts in the signal beam. A photon multiplier senses the phase shift and develops an electrical signal. A signal conditioning arrangement modifies the electrical signals to generate an average signal correlated to the sound waves which in turn is correlated to a physical or metallurgical property of the object, such as temperature, which property may then be used to control the process. External, random vibrations of the workpiece are utilized to develop discernible signals which can be sensed in the interferometer by only one photon multiplier. In addition the interferometer includes an arrangement for optimizing its sensitivity so that movement attributed to various waves can be detected in opaque objects. The interferometer also includes a mechanism for sensing objects with rough surfaces which produce speckle light patterns. Finally the interferometer per se, with the addition of a second photon multiplier is capable of accurately recording beam length distance differences with only one reading.
摘要翻译： 公开了一种用于非破坏性地测量物体并且响应于测量来控制工业过程的系统，其中脉冲激光器通过物体中的定时增量产生多个声波。 偏振干涉仪用于测量由声波引起的物体的表面移动，并通过信号光束中的相移来检测。 光子倍增器检测相移并产生电信号。 信号调节装置修改电信号以产生与声波相关的平均信号，该平均信号又与物体的物理或冶金特性（例如温度）相关，该属性然后可用于控制该过程。 使用工件的外部随机振动来产生可辨别的信号，只有一个光子倍增器可以在干涉仪中感测到这些信号。 此外，干涉仪包括用于优化其灵敏度的装置，从而可以在不透明物体中检测归因于各种波的运动。 干涉仪还包括用于感测具有产生斑点光图案的粗糙表面的物体的机构。 最后，干涉仪本身，添加第二个光子倍增器能够仅用一个读数精确地记录光束长度的距离差。
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