公开(公告)号：US08829396B2

公开(公告)日：2014-09-09

申请号：US13303949

申请日：2011-11-23

Applicant: Luis Alejandro Rey Garcia ,  Richard W. Parks ,  Peter G. Ragay

Inventor： Luis Alejandro Rey Garcia ,  Richard W. Parks ,  Peter G. Ragay

IPC: F27D11/00 ,  B65G17/12 ,  F27B17/00 ,  H01L21/677 ,  F27D3/00 ,  B65G17/26 ,  H01L21/67 ,  B65G47/00 ,  B65G17/32

CPC classification number: B65G17/12 ,  B65G17/26 ,  B65G17/32 ,  F27B17/0025 ,  F27D3/0084 ,  H01L21/67109 ,  H01L21/67706 ,  H01L21/67742

Abstract: A new class of work-piece conveyors, comprising zero-mass, shadow-less transport systems, with a drive having a pair of parallel, laterally spaced, movable chains defining a processing path, with fingers projecting transversely toward the process path centerline. The gap between fingers eliminates conveyor tube/rod supports, improving wafer quality and conserving energy. Implementations include wire chain, band and roller chain transports to which fingers are secured. Fingers are angled down so that the intersection of the bottom and side edges of the work-piece make only point contacts with each finger. A pair of finger chains implement a single lane drive; adding center bilateral finger drive chains with oppositely pointing fingers implement a multi-lane system. The inventive method includes individually configurable processing temperature profiles in side-by-side lanes, on a zone-by-zone, upper and lower half basis for broad processing flexibility. A novel transducer-based lamp-voltage control system provides stable lamp power for precise temperature control.

Abstract translation: 一种新型的工件输送机，包括零质量，无阴影传输系统，驱动器具有一对平行的，横向间隔的可移动的链，其限定了处理路径，手指横向于过程路径中心线突出。 手指之间的间隙消除输送管/杆支撑，提高晶圆质量并节约能源。 实施包括固定手指的线链，带和滚链链条输送。 手指向下倾斜，使得工件的底部和侧边的交点仅与每个手指进行点接触。 一对手指链实现单车道驱动; 用指向手指的中心双手指驱动链加上多通道系统。 本发明的方法包括在逐行通道中的单独配置的处理温度曲线，逐区，上下半部分，用于广泛的处理灵活性。 一种新型的基于传感器的灯电压控制系统提供稳定的灯功率，用于精确的温度控制。

公开(公告)号：US20140017848A1

公开(公告)日：2014-01-16

申请号：US14030907

申请日：2013-09-18

Applicant: Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

Inventor： Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

IPC: H05B3/00 ,  H01L31/18

CPC classification number: H05B3/0047 ,  H01L31/1876 ,  H05B3/0076

Abstract: Multi-zone IR solar cell processing furnaces using a single, full-width conveyor belt; selected zones are divided into multiple lanes by upper or/and lower longitudinal divider walls, and heated by high intensity radiation IR lamps backed by a flat plate of ultra-high reflectance ceramic material. Lamp numbers and spacing in each zone/lane can be varied. Power to each lamp, or zone/lane lamp array, both upper and lower, is individually and independently controlled to provide infinite number of temperature profiles in each heating zone/lane. In multi-lane zones the IR lamps are folded, the inner ends being supported by the lane dividers. Lamp external power leads are both accessible from one side of the furnace. The lamp internal filaments include non-radiant and radiant sections arranged so that a pair of radiant sections are aligned in the lamp-folded configuration and disposed over the full width of the solar cell wafers.

Abstract translation: 多区域红外线太阳能电池加工炉采用单一全宽输送带; 所选择的区域由上或下纵向分隔壁分成多个通道，并由由超高反射率陶瓷材料的平板支撑的高强度辐射IR灯加热。 每个区域/车道中的灯号和间距可以变化。 单独和独立地控制每个灯或上/下的区域/车道灯阵列的功率，以在每个加热区/通道中提供无限数量的温度曲线。 在多车道区域中，IR灯被折叠，内端由车道分配器支撑。 灯外部电源线可从炉的一侧接近。 灯内部细丝包括非辐射和辐射部分，其布置成使得一对辐射部分在灯折叠构型中对准并且设置在太阳能电池晶片的整个宽度上。

公开(公告)号：US20120269226A1

公开(公告)日：2012-10-25

申请号：US13540482

申请日：2012-07-02

Applicant: Richard W. Parks ,  Luis Alejandro Rey Garcia ,  Peter G. Ragay

Inventor： Richard W. Parks ,  Luis Alejandro Rey Garcia ,  Peter G. Ragay

IPC: F27D9/00

CPC classification number: F27B9/20 ,  F27B9/243 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/2254 ,  H01L21/324 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/6776 ,  H01L31/18

Abstract: Multi-zone, solar cell diffusion furnaces having a plurality of radiant element (SiC) or/and high intensity IR lamp heated process zones, including baffle, ramp-up, firing, soaking and cooling zone(s). The transport of solar cell wafers, e.g., silicon, selenium, germanium or gallium-based solar cell wafers, through the furnace is implemented by use of an ultra low-mass, wafer transport system comprising laterally spaced shielded, synchronously driven, metal bands or chains carrying non-rotating alumina tubes suspended on wires between them. The wafers rest on raised circumferential standoffs spaced laterally along the alumina tubes, which reduces contamination. The high intensity IR flux rapidly photo-radiation conditions the wafers so that diffusion occurs>3× faster than conventional high-mass thermal furnaces. Longitudinal side wall heaters comprising coil heaters in Inconel sheaths inserted in carrier tubes are employed to insure even heating of wafer edges adjacent the side walls.

Abstract translation: 具有多个辐射元件（SiC）或/和高强度IR灯加热过程区域的多区域太阳能电池扩散炉，包括挡板，斜坡上升，点火，均热和冷却区域。 太阳能电池晶片（例如硅，硒，锗或镓基太阳能电池晶片）通过炉子的传输通过使用超低质量的晶片传输系统来实现，其包括横向隔开的屏蔽，同步驱动的金属带或 链条承载悬挂在它们之间的电线上的非旋转氧化铝管。 晶片搁置在沿氧化铝管横向分开的凸起的周向支座上，这减少了污染。 高强度IR通量快速光辐射条件使晶片发生扩散，比传统的高质量热熔炉快3倍。 使用包括插入载体管的Inconel护套中的线圈加热器的纵向侧壁加热器来确保邻近侧壁的晶片边缘的均匀加热。

公开(公告)号：US20120149182A1

公开(公告)日：2012-06-14

申请号：US13230481

申请日：2011-09-12

Applicant: Luis Alejandro Rey Garcia ,  Peter G. Ragay ,  Richard W. Parks

Inventor： Luis Alejandro Rey Garcia ,  Peter G. Ragay ,  Richard W. Parks

IPC: H01L21/225 ,  B01J19/12 ,  C23C16/48 ,  C23C16/56 ,  C23C16/448 ,  H01L21/28 ,  C23C16/02

CPC classification number: H01L31/1876 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Silicon wafer processing system, apparatus and method of doping silicon wafers with hot concentrated acid dopant compositions for forming p-n junction and back contact layers during processing into PV solar cells. Highly concentrated acid dopant is atomized with pressurized gas and heated in the range of 80-200° C., then introduced into a concentrated acid vapor processing chamber to apply vapor over 1.5-6 min to wafers moving horizontally on a multi-lane conveyor system through the processing chamber. The wafers are dried and forwarded to a diffusion furnace. An optional UV pre-treatment assembly pre-conditions the wafers with UV radiation prior to dopant application, and doped wafers may be post-treated in a UV treatment module before being fired. The wafers may be cooled in the processing chamber. Post-firing, the wafers exhibit excellent sheet resistance in the 60-95 Ω/sq range, and are highly uniform across the wafers and wafer-to-wafer.

Abstract translation: 硅晶片处理系统，用热浓缩酸性掺杂剂组合物掺杂硅晶片的装置和方法，用于在加工成PV太阳能电池期间形成p-n结和背接触层。 高浓度酸性掺杂剂用加压气体雾化并在80-200℃范围内加热，然后引入浓酸蒸汽处理室，以将蒸汽施加1.5-6分钟以上，在多通道输送系统上水平移动的晶片 通过处理室。 将晶片干燥并转移至扩散炉。 可选的UV预处理组件在掺杂剂施加之前用UV辐射预处理晶片，并且在烧制之前可以在UV处理模块中对掺杂晶片进行后处理。 晶片可以在处理室中冷却。 后焙烧时，晶片在60-95和OHgr / / sq范围内表现出优异的薄层电阻，并且在晶片和晶片到晶片之间具有高度均匀性。

公开(公告)号：US20120132638A1

公开(公告)日：2012-05-31

申请号：US13303949

申请日：2011-11-23

Applicant: Luis Alejandro Rey Garcia ,  Richard W. Parks ,  Peter G. Ragay

Inventor： Luis Alejandro Rey Garcia ,  Richard W. Parks ,  Peter G. Ragay

IPC: B65G17/12 ,  F27D11/00 ,  B65G17/30

CPC classification number: B65G17/12 ,  B65G17/26 ,  B65G17/32 ,  F27B17/0025 ,  F27D3/0084 ,  H01L21/67109 ,  H01L21/67706 ,  H01L21/67742

Abstract: A new class of work-piece conveyors, comprising zero-mass, shadow-less transport systems, with a drive having a pair of parallel, laterally spaced, movable chains defining a processing path, with fingers projecting transversely toward the process path centerline. The gap between fingers eliminates conveyor tube/rod supports, improving wafer quality and conserving energy. Implementations include wire chain, band and roller chain transports to which fingers are secured. Fingers are angled down so that the intersection of the bottom and side edges of the work-piece make only point contacts with each finger. A pair of finger chains implement a single lane drive; adding center bilateral finger drive chains with oppositely pointing fingers implement a multi-lane system. The inventive method includes individually configurable processing temperature profiles in side-by-side lanes, on a zone-by-zone, upper and lower half basis for broad processing flexibility. A novel transducer-based lamp-voltage control system provides stable lamp power for precise temperature control.

Abstract translation: 一种新型的工件输送机，包括零质量，无阴影传输系统，驱动器具有一对平行的，横向间隔的可移动的链，其限定了处理路径，手指横向于过程路径中心线突出。 手指之间的间隙消除输送管/杆支撑，提高晶圆质量并节约能源。 实施包括固定手指的线链，带和滚链链条输送。 手指向下倾斜，使得工件的底部和侧边的交点仅与每个手指进行点接触。 一对手指链实现单车道驱动; 用指向手指的中心双手指驱动链加上多通道系统。 本发明的方法包括在逐行通道中的单独配置的处理温度曲线，逐区，上下半部分，用于广泛的处理灵活性。 一种新型的基于传感器的灯电压控制系统提供稳定的灯功率，用于精确的温度控制。

公开(公告)号：US09301340B2

公开(公告)日：2016-03-29

申请号：US14030907

申请日：2013-09-18

Applicant: Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

Inventor： Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

IPC: F26B13/10 ,  F26B3/30 ,  A21B2/00 ,  H05B3/00 ,  H01L31/18

CPC classification number: H05B3/0047 ,  H01L31/1876 ,  H05B3/0076

Abstract: Multi-zone IR solar cell processing furnaces using a single, full-width conveyor belt; selected zones are divided into multiple lanes by upper or/and lower longitudinal divider walls, and heated by high intensity radiation IR lamps backed by a flat plate of ultra-high reflectance ceramic material. Lamp numbers and spacing in each zone/lane can be varied. Power to each lamp, or zone/lane lamp array, both upper and lower, is individually and independently controlled to provide infinite number of temperature profiles in each heating zone/lane. In multi-lane zones the IR lamps are folded, the inner ends being supported by the lane dividers. Lamp external power leads are both accessible from one side of the furnace. The lamp internal filaments include non-radiant and radiant sections arranged so that a pair of radiant sections are aligned in the lamp-folded configuration and disposed over the full width of the solar cell wafers.

Abstract translation: 多区域红外线太阳能电池加工炉采用单一全宽输送带; 所选择的区域由上或下纵向分隔壁分成多个通道，并由由超高反射率陶瓷材料的平板支撑的高强度辐射IR灯加热。 每个区域/车道中的灯号和间距可以变化。 单独和独立地控制每个灯或上/下的区域/车道灯阵列的功率，以在每个加热区/通道中提供无限数量的温度曲线。 在多车道区域中，IR灯被折叠，内端由车道分配器支撑。 灯外部电源线可从炉的一侧接近。 灯内部细丝包括非辐射和辐射部分，其布置成使得一对辐射部分在灯折叠构型中对准并且设置在太阳能电池晶片的整个宽度上。

公开(公告)号：US08742532B2

公开(公告)日：2014-06-03

申请号：US13230481

申请日：2011-09-12

Applicant: Luis Alejandro Rey Garcia ,  Peter G. Ragay ,  Richard W. Parks

Inventor： Luis Alejandro Rey Garcia ,  Peter G. Ragay ,  Richard W. Parks

IPC: H01L31/102

CPC classification number: H01L31/1876 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: Silicon wafer processing system, apparatus and method of doping silicon wafers with hot concentrated acid dopant compositions for forming p-n junction and back contact layers during processing into PV solar cells. Highly concentrated acid dopant is atomized with pressurized gas and heated in the range of 80-200° C., then introduced into a concentrated acid vapor processing chamber to apply vapor over 1.5-6 min to wafers moving horizontally on a multi-lane conveyor system through the processing chamber. The wafers are dried and forwarded to a diffusion furnace. An optional UV pre-treatment assembly pre-conditions the wafers with UV radiation prior to dopant application, and doped wafers may be post-treated in a UV treatment module before being fired. The wafers may be cooled in the processing chamber. Post-firing, the wafers exhibit excellent sheet resistance in the 60-95Ω/sq range, and are highly uniform across the wafers and wafer-to-wafer.

Abstract translation: 硅晶片处理系统，用热浓缩酸性掺杂剂组合物掺杂硅晶片的装置和方法，用于在加工成PV太阳能电池期间形成p-n结和背接触层。 高浓度酸性掺杂剂用加压气体雾化并在80-200℃范围内加热，然后引入浓酸蒸汽处理室，以将蒸汽施加1.5-6分钟以上，在多通道输送系统上水平移动的晶片 通过处理室。 将晶片干燥并转移至扩散炉。 可选的UV预处理组件在掺杂剂施加之前用UV辐射预处理晶片，并且在烧制之前可以在UV处理模块中对掺杂晶片进行后处理。 晶片可以在处理室中冷却。 后焙烧时，晶片在60-95和OHgr / / sq范围内表现出优异的薄层电阻，并且在晶片和晶片到晶片之间具有高度均匀性。

公开(公告)号：US08571396B2

公开(公告)日：2013-10-29

申请号：US12892856

申请日：2010-09-28

Applicant: Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

Inventor： Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia

IPC: A45D20/40 ,  F26B3/30 ,  F26B19/00 ,  A21B2/00

CPC classification number: H05B3/0076

Abstract: High reflectance element IR lamp module and method of firing multi-zone IR furnaces for solar cell processing comprising lamps disposed backed by a flat or configured plate of ultra-high reflectance ceramic material. Optionally, the high reflectance plate can be configured with ripples or grooves to isolate each lamp from adjacent lamps in the process zone. Furnace cooling air is exhausted and recycled upstream for energy conservation. Lamp spacing can be varied and power to each lamp individually controlled to provide infinite control of temperature profile in each heating zone. The high reflectance element may be constructed of dense ceramic fiber board, and then coated with high reflectance ceramic composition, and baked or fired to form the finished element.

Abstract translation: 高反射元件IR灯模块和用于太阳能电池处理的多区域IR炉的点火方法，包括由超高反射率陶瓷材料的平板或配置板支撑的灯。 可选地，高反射板可以配置有波纹或凹槽，以将每个灯与在处理区中的相邻灯隔离。 炉冷却空气被耗尽并在上游再循环用于节能。 灯间距可以变化，每个灯的功率单独控制，以提供每个加热区域温度曲线的无限制控制。 高反射率元件可以由致密陶瓷纤维板构成，然后涂覆高反射率陶瓷组合物，并烘烤或烧制以形成成品元件。

公开(公告)号：US20100267188A1

公开(公告)日：2010-10-21

申请号：US12761632

申请日：2010-04-16

Applicant: Richard W. Parks ,  Peter G. Ragay ,  Luis Alejandro Rey Garcia

Inventor： Richard W. Parks ,  Peter G. Ragay ,  Luis Alejandro Rey Garcia

IPC: H01L31/18 ,  F27B9/24 ,  F27B9/36 ,  H01L21/225

CPC classification number: H01L21/2254 ,  F27B9/20 ,  F27B9/243 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/6776 ,  H01L31/18 ,  Y10S438/905 ,  Y10S438/907

Abstract: Multi-zone, solar cell diffusion furnaces having a plurality of radiant element (SiC) or/and high intensity IR lamp heated process zones, including baffle, ramp-up, firing, soaking and cooling zone(s). The transport of solar cell wafers, e.g., silicon, selenium, germanium or gallium-based solar cell wafers, through the furnace is implemented by use of an ultra low-mass, wafer transport system comprising laterally spaced shielded metal bands or chains carrying non-rotating alumina tubes suspended on wires between them. The wafers rest on raised circumferential standoffs spaced laterally along the alumina tubes, which reduces contamination. The bands or chains are driven synchronously at ultra-low tension by a pin drive roller or sprocket at either the inlet or outlet end of the furnace, with appropriate tensioning systems disposed in the return path. The high intensity IR flux rapidly photo-radiation conditions the wafers so that diffusion occurs >3× faster than conventional high-mass thermal furnaces.

Abstract translation: 具有多个辐射元件（SiC）或/和高强度IR灯加热过程区域的多区域太阳能电池扩散炉，包括挡板，斜坡上升，点火，均热和冷却区域。 通过使用超低质量的晶片传输系统来实现太阳能电池晶片（例如硅，硒，锗或镓基太阳能电池晶片）的输送，该超低质量晶片输送系统包括横向隔开的屏蔽金属带或链 旋转氧化铝管悬挂在它们之间的电线上。 晶片搁置在沿氧化铝管横向分开的凸起的周向支座上，这减少了污染。 带或链通过销的驱动辊或链轮在炉的入口端或出口端以超低张力同步地驱动，并且适当的张紧系统设置在返回路径中。 高强度IR通量快速光辐射条件使晶片发生扩散，比传统的高质量热熔炉快3倍。

公开(公告)号：US20080012499A1

公开(公告)日：2008-01-17

申请号：US11768067

申请日：2007-06-25

Applicant: Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia ,  Raymond G. Kruzek

Inventor： Peter G. Ragay ,  Richard W. Parks ,  Luis Alejandro Rey Garcia ,  Raymond G. Kruzek

IPC: H01J7/26

CPC classification number: H05B3/0076 ,  H01L21/67109 ,  H01L21/67115

Abstract: Isolation IR heat lamp module and method of firing multi-zone IR furnaces for solar cell processing comprising lamps disposed in individual parallel channels in a reflector/insulator body to provide a cooling air channel surrounding each tube; the channels are covered with IR-transmissive plate material to isolate each lamp from adjacent lamps and the process zone. Cooling air is exhausted and recycled upstream for energy conservation. Lamp spacing can be varied and power to each lamp individually controlled to provide infinite control of temperature profile in each heating zone. For a spike zone, and in combination with downstream quench control and annealing zones, steep heating and cooling curves with very short dwell (sharp) peak temperature profiles permit faster throughput due to operation of the lampsm at essentially 100% rated capacity, at a 2× or greater heating and throughput rate without compromising lamp life, while producing solar cells with improved output efficiency.

Abstract translation: 隔离IR加热灯模块和用于太阳能电池处理的多区域IR炉的点火方法，包括设置在反射器/绝缘体中的各个并行通道中的灯，以提供围绕每个管的冷却空气通道; 通道用IR透射板材料覆盖，以将每个灯与相邻的灯和处理区隔离开。 冷却空气已经耗尽，并在上游回收节能。 灯间距可以变化，每个灯的功率单独控制，以提供每个加热区域温度曲线的无限制控制。 对于尖峰区域，并与下游淬火控制和退火区域结合使用，具有非常短停留（锋利的）峰值温度曲线的陡峭的加热和冷却曲线允许由于在基本上100％额定容量下操作灯具的更快的生产量，以2x 或更高的加热和生产率而不损害灯的寿命，同时生产具有改善的输出效率的太阳能电池。