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公开(公告)号:US20060095228A1
公开(公告)日:2006-05-04
申请号:US11282652
申请日:2005-11-21
申请人: Robert Wilby
发明人: Robert Wilby
CPC分类号: G01G9/00 , G01R31/2648 , H01L22/12
摘要: In order to determine the dielectric constant of a layer deposited on a semiconductor wafer (2), the density of the layer is obtained. To obtain that density, the wafer (2) without the layer is weighed in a weighing chamber (4) in which a weighing pan (7) supports the wafer on a weighing balance. The weight of the wafer is determined taking into account the buoyancy exerted by the air on the wafer (2). Then the layer is deposited on the wafer (2) and the weighing operation repeated. Alternatively a reference wafer may be used. If the material of the layer is known, the weight of the layer can be used to derive its density using a thickness measurement. Alternatively, if the density is known, the thickness can be obtained.
摘要翻译: 为了确定沉积在半导体晶片(2)上的层的介电常数,获得了该层的密度。 为了获得该密度,在称重室(4)中称量没有层的晶片(2),其中称重盘(7)在称重平衡面上支撑晶片。 考虑到空气对晶片(2)施加的浮力来确定晶片的重量。 然后将该层沉积在晶片(2)上,重复称重操作。 或者,可以使用参考晶片。 如果层的材料是已知的,则可以使用层的重量来使用厚度测量来获得其密度。 或者,如果密度是已知的,则可以获得厚度。
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公开(公告)号:US20050202981A1
公开(公告)日:2005-09-15
申请号:US10898804
申请日:2004-07-26
申请人: Renee Eveland , Frederick Koch , Robert Wilby , Virginia Carrick , William Abraham , Gordon Lamb , John Pudelski
发明人: Renee Eveland , Frederick Koch , Robert Wilby , Virginia Carrick , William Abraham , Gordon Lamb , John Pudelski
IPC分类号: C10M129/42 , C10M133/46 , C10M133/56 , C10M133/58 , C10M169/04
CPC分类号: C10M129/42 , C10M133/56 , C10M169/04 , C10M2207/026 , C10M2207/262 , C10M2215/064 , C10M2215/28 , C10M2223/045 , C10M2227/061 , C10N2210/02 , C10N2230/06 , C10N2230/10 , C10N2230/36 , C10N2230/45 , C10N2240/10 , C10N2240/102
摘要: A dispersant composition comprising the product of an amine, an alcohol, or an amino alcohol, with a hydrocarbyl-substituted succinic anhydride component exhibits improved viscosity stability and reduced chlorine content, when the hydrocarbyl-substituted succinic anhydride component comprises: (a) 10 to 95 weight percent of a component prepared by reacting a polyisobutylene with maleic anhydride in the presence of chlorine; and (b) 5 to 90 weight percent of a component prepared by reacting a polyisobutylene with maleic anhydride in the substantial absence of chlorine.
摘要翻译: 包含胺,醇或氨基醇与烃基取代的琥珀酸酐组分的产物的分散剂组合物当烃基取代的琥珀酸酐组分包含:(a)10至 95重量%的通过在氯气存在下使聚异丁烯与马来酸酐反应制备的组分; 和(b)5-90重量%的通过使聚异丁烯与马来酸酐基本上不存在氯反应制备的组分。
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